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Suresh k. Govindaswamy, Ph.D.

Affiliations: 
2006 Clarkson University, Potsdam, NY, United States 
Area:
Chemical Engineering
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Yuzhuo Li grad student 2006 Clarkson University
 (Chemical mechanical planarization of copper thin films.)

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Govindaswamy SK, Li Y. (2007) Corrosion Inhibitor for Cu CMP Slurry Microelectronic Applications of Chemical Mechanical Planarization. 249-275
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