David E. Noga, Ph.D.

Affiliations: 
2008 Georgia Institute of Technology, Atlanta, GA 
Area:
Polymer Chemistry, Organic Chemistry, Biochemistry
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David M. Collard grad student 2008 Georgia Tech
 (Synthesis of functional lactide copolymers for use in biomedical applications.)
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Publications

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Yeh WM, Noga DE, Lawson RA, et al. (2010) Thin film buckling as a method to explore the effect of reactive rinse treatments on the mechanical properties of resist thin films Proceedings of Spie - the International Society For Optical Engineering. 7639
Noga DE, Yeh WM, Lawson RA, et al. (2010) The use of surface modifiers to mitigate pattern collapse in thin film lithography Proceedings of Spie - the International Society For Optical Engineering. 7639
Noga DE, Yeh WM, Lawson RA, et al. (2010) Methods to explore and prevent pattern collapse in thin film lithography Proceedings of Spie - the International Society For Optical Engineering. 7639
Lawson RA, Noga DE, Cheng J, et al. (2010) Non-traditional resist designs using molecular resists: Positive tone cross-linked and non-chemically amplified molecular resists Proceedings of Spie - the International Society For Optical Engineering. 7639
Lawson RA, Cheng J, Noga DE, et al. (2010) Aqueous and solvent developed negative-tone molecular resists Proceedings of Spie - the International Society For Optical Engineering. 7639
Yeh WM, Noga DE, Lawson RA, et al. (2010) Comparison of positive tone versus negative tone resist pattern collapse behavior Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 28
Noga DE, Lawson RA, Lee CT, et al. (2009) Understanding pattern collapse in high-resolution lithography: Impact of feature width on critical stress Proceedings of Spie - the International Society For Optical Engineering. 7273
Lawson RA, Noga DE, Tolbert LM, et al. (2009) Non-ionic PAG behavior under high energy exposure sources Proceedings of Spie - the International Society For Optical Engineering. 7273
Lawson RA, Noga DE, Tolbert LM, et al. (2009) Nonionic photoacid generator behavior under high-energy exposure sources Journal of Micro/Nanolithography, Mems, and Moems. 8
Lawson RA, Noga DE, Younkin TR, et al. (2009) Negative tone molecular resists using cationic polymerization: Comparison of epoxide and oxetane functional groups Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 27: 2998-3003
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