Trace Q. Hurd, Ph.D.

Affiliations: 
2005 University of North Texas, Denton, TX, United States 
Area:
Analytical Chemistry, Inorganic Chemistry
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Oliver Ming-Ren Chyan grad student 2005 University of North Texas
 (Chemistry, detection, and control of metals during silicon processing.)
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Publications

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Yu KK, Thomas N, Venkataraman SS, et al. (2011) Study of Cu bimetallic corrosion in CMP chemical environments using optical scanning and micropattern corrosion screening Ecs Transactions. 35: 173-184
Canaperi DF, Rao SSP, Hurd TQ, et al. (2010) Reducing time dependent line to line leakage following post CMP clean Materials Research Society Symposium Proceedings. 1249: 43-49
Arunagiri TN, Zhang Y, Chyan O, et al. (2005) Interfacial diffusion studies of Cu/(5 nm Ru)/Si structures physical vapor deposited vs electrochemically deposited Cu Journal of the Electrochemical Society. 152
Chan R, Arunagiri TN, Zhang Y, et al. (2004) Diffusion studies of copper on ruthenium thin film a plateable copper diffusion barrier Electrochemical and Solid-State Letters. 7
Rotondar ALP, Hurd TQ, Kaniava A, et al. (1996) Impact of Fe and Cu contamination on the minority carrier lifetime of silicon substrates Journal of the Electrochemical Society. 143: 3014-3019
Rotondaro ALP, Hurd TQ, Schmidt HF, et al. (1995) Outplating of metallic contaminants on silicon wafers from diluted acid solutions Materials Research Society Symposium - Proceedings. 386: 183-188
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