Trace Q. Hurd, Ph.D.
Affiliations: | 2005 | University of North Texas, Denton, TX, United States |
Area:
Analytical Chemistry, Inorganic ChemistryGoogle:
"Trace Hurd"Mean distance: (not calculated yet)
Parents
Sign in to add mentorOliver Ming-Ren Chyan | grad student | 2005 | University of North Texas | |
(Chemistry, detection, and control of metals during silicon processing.) |
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Publications
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Yu KK, Thomas N, Venkataraman SS, et al. (2011) Study of Cu bimetallic corrosion in CMP chemical environments using optical scanning and micropattern corrosion screening Ecs Transactions. 35: 173-184 |
Canaperi DF, Rao SSP, Hurd TQ, et al. (2010) Reducing time dependent line to line leakage following post CMP clean Materials Research Society Symposium Proceedings. 1249: 43-49 |
Arunagiri TN, Zhang Y, Chyan O, et al. (2005) Interfacial diffusion studies of Cu/(5 nm Ru)/Si structures physical vapor deposited vs electrochemically deposited Cu Journal of the Electrochemical Society. 152 |
Chan R, Arunagiri TN, Zhang Y, et al. (2004) Diffusion studies of copper on ruthenium thin film a plateable copper diffusion barrier Electrochemical and Solid-State Letters. 7 |
Rotondar ALP, Hurd TQ, Kaniava A, et al. (1996) Impact of Fe and Cu contamination on the minority carrier lifetime of silicon substrates Journal of the Electrochemical Society. 143: 3014-3019 |
Rotondaro ALP, Hurd TQ, Schmidt HF, et al. (1995) Outplating of metallic contaminants on silicon wafers from diluted acid solutions Materials Research Society Symposium - Proceedings. 386: 183-188 |