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Fangyu Wu, Ph.D.

Affiliations: 
2011 Georgia Institute of Technology, Atlanta, GA 
Area:
Chemical Engineering, Electronics and Electrical Engineering, Inorganic Chemistry
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"Fangyu Wu"
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Dennis W. Hess grad student 2011 Georgia Tech
 (Hydrogen-based plasma etch of copper at low temperature.)

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Publications

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Wu F, Levitin G, Hess DW. (2011) Temperature Effects and Optical Emission Spectroscopy Studies of Hydrogen-Based Plasma Etching of Copper Journal of the Electrochemical Society. 159
Wu F, Levitin G, Hess DW. (2011) Mechanistic considerations of low temperature hydrogen-based plasma etching of Cu Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 29: 11013
Wu F, Levitin G, Hess DW. (2010) Patterning of Cu Films by a Two-Step Plasma Etching Process at Low Temperature Journal of the Electrochemical Society. 157
Wu F, Levitin G, Hess DW. (2010) Low-Temperature Etching of Cu by Hydrogen-Based Plasmas Acs Applied Materials & Interfaces. 2: 2175-2179
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