Richard Lawson
Affiliations: | Chemical Engineering | Georgia Institute of Technology, Atlanta, GA |
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| Peters AJ, Lawson RA, Nation BD, et al. (2016) Calculations of the free energy of dislocation defects in lamellae forming diblock copolymers using thermodynamic integration Journal of Micro/ Nanolithography, Mems, and Moems. 15 |
| Peters AJ, Lawson RA, Nation BD, et al. (2016) Coarse-grained molecular dynamics modeling of the kinetics of lamellar block copolymer defect annealing Journal of Micro/ Nanolithography, Mems, and Moems. 15 |
| Peters AJ, Lawson RA, Nation BD, et al. (2015) Simulation study of the effect of molar mass dispersity on domain interfacial roughness in lamellae forming block copolymers for directed self-assembly. Nanotechnology. 26: 385301 |
| Lawson RA, Henderson CL. (2015) Investigating SEM metrology effects using a detailed SEM simulation and stochastic resist model Proceedings of Spie - the International Society For Optical Engineering. 9424 |
| Lawson RA, Peters AJ, Nation BD, et al. (2015) Effect of |
| Sharp B, Lawson RA, Fralick A, et al. (2015) Base developable negative tone molecular resist based on epoxide cross-linking Proceedings of Spie - the International Society For Optical Engineering. 9425 |
| Narcross H, Lawson RA, Sharp B, et al. (2015) Effect of molecular resist structure on glass transition temperature and lithographic performance in epoxide functionalized negative tone resists Proceedings of Spie - the International Society For Optical Engineering. 9425 |
| Lawson RA, Narcross H, Sharp B, et al. (2015) Optimizing performance in cross-linking negative-tone molecular resists Proceedings of Spie - the International Society For Optical Engineering. 9425 |
| Peters AJ, Lawson RA, Nation BD, et al. (2015) Coarse-grained molecular dynamics modeling of the kinetics of lamellar BCP defect annealing Proceedings of Spie - the International Society For Optical Engineering. 9423 |
| Nation BD, Peters A, Lawson RA, et al. (2015) Effect of chemoepitaxial guiding underlayer design on the pattern quality and shape of aligned lamellae for fabrication of line-space patterns Proceedings of Spie - the International Society For Optical Engineering. 9423 |