Year |
Citation |
Score |
2020 |
Mustafazade A, Pandit M, Zhao C, Sobreviela G, Du Z, Steinmann P, Zou X, Howe RT, Seshia AA. A vibrating beam MEMS accelerometer for gravity and seismic measurements. Scientific Reports. 10: 10415. PMID 32591608 DOI: 10.1038/S41598-020-67046-X |
0.556 |
|
2019 |
Nicaise SM, Lin C, Azadi M, Bozorg-Grayeli T, Adebayo-Ige P, Lilley DE, Pfitzer Y, Cha W, Van Houten K, Melosh NA, Howe RT, Schwede JW, Bargatin I. Micron-gap spacers with ultrahigh thermal resistance and mechanical robustness for direct energy conversion. Microsystems & Nanoengineering. 5: 31. PMID 31636923 DOI: 10.1038/S41378-019-0071-4 |
0.707 |
|
2019 |
Schindler P, Riley DC, Bargatin I, Sahasrabuddhe K, Schwede JW, Sun S, Pianetta P, Shen ZX, Howe RT, Melosh NA. Surface Photovoltage-Induced Ultralow Work Function Material for Thermionic Energy Converters. Acs Energy Letters. 4: 2436-2443. PMID 31633034 DOI: 10.1021/Acsenergylett.9B01214 |
0.668 |
|
2019 |
Chia C, Shulaker MM, Provine J, Jeffrey SS, Howe RT. ALD HfO Films for Defining Microelectrodes for Electrochemical Sensing and Other Applications. Acs Applied Materials & Interfaces. PMID 31305057 DOI: 10.1021/Acsami.9B06891 |
0.382 |
|
2017 |
Shulaker MM, Hills G, Park RS, Howe RT, Saraswat K, Wong HP, Mitra S. Three-dimensional integration of nanotechnologies for computing and data storage on a single chip. Nature. 547: 74-78. PMID 28682331 DOI: 10.1038/Nature22994 |
0.329 |
|
2016 |
Wu T, Hamann SS, Ceballos AC, Chang CE, Solgaard O, Howe RT. Design and fabrication of silicon-tessellated structures for monocentric imagers. Microsystems & Nanoengineering. 2: 16019. PMID 31057822 DOI: 10.1038/Micronano.2016.19 |
0.322 |
|
2016 |
Harrison KL, Clary WA, Provine J, Howe RT. Back-end-of-line compatible Poly-SiGe lateral nanoelectromechanical relays with multi-level interconnect Microsystem Technologies. 1-6. DOI: 10.1007/S00542-016-2932-1 |
0.312 |
|
2015 |
Yuan H, Chang S, Bargatin I, Wang NC, Riley DC, Wang H, Schwede JW, Provine J, Pop E, Shen ZX, Pianetta PA, Melosh NA, Howe RT. Engineering Ultra-Low Work Function of Graphene. Nano Letters. 15: 6475-80. PMID 26401728 DOI: 10.1021/Acs.Nanolett.5B01916 |
0.673 |
|
2015 |
Arun A, Gupta C, Howe R. Polyether ether ketone (PEEK) fluidic cell to study electrochemistry of microelectrodes on silicon substrate Ecs Solid State Letters. 4: P67-P71. DOI: 10.1149/2.0021510Ssl |
0.344 |
|
2015 |
Ng EJ, Harrison KL, Yang Y, Ahn CH, Hong VA, Howe RT, Kenny TW. Stable Encapsulated Charge-Biased Resonators Journal of Microelectromechanical Systems. DOI: 10.1109/Jmems.2015.2483365 |
0.318 |
|
2014 |
Tang WM, Aboudi U, Provine J, Howe RT, Wong HSP. Improved performance of bottom-contact organic thin-film transistor using Al doped HfO2 gate dielectric Ieee Transactions On Electron Devices. 61: 2398-2403. DOI: 10.1109/Ted.2014.2325042 |
0.334 |
|
2014 |
Park B, Jung IW, Provine J, Gellineau A, Landry J, Howe RT, Solgaard O. Double-layer silicon photonic crystal fiber-tip temperature sensors Ieee Photonics Technology Letters. 26: 900-903. DOI: 10.1109/Lpt.2014.2309345 |
0.309 |
|
2014 |
Shavezipur M, Harrison K, Lee WS, Mitra S, Wong HSP, Howe RT. Partitioning Electrostatic and Mechanical Domains in Nanoelectromechanical Relays Journal of Microelectromechanical Systems. DOI: 10.1109/Jmems.2014.2335157 |
0.343 |
|
2014 |
Lee JH, Bargatin I, Vancil BK, Gwinn TO, Maboudian R, Melosh NA, Howe RT. Microfabricated thermally isolated low work-function emitter Journal of Microelectromechanical Systems. 23: 1182-1187. DOI: 10.1109/Jmems.2014.2307882 |
0.742 |
|
2014 |
Chou SH, Voss J, Vojvodic A, Howe RT, Abild-Pedersen F. DFT study of atomically-modified alkali-earth metal oxide films on tungsten Journal of Physical Chemistry C. 118: 11303-11309. DOI: 10.1021/Jp4120578 |
0.303 |
|
2013 |
Littau KA, Sahasrabuddhe K, Barfield D, Yuan H, Shen ZX, Howe RT, Melosh NA. Microbead-separated thermionic energy converter with enhanced emission current. Physical Chemistry Chemical Physics : Pccp. 15: 14442-6. PMID 23881241 DOI: 10.1039/C3Cp52895B |
0.31 |
|
2013 |
Voss J, Vojvodic A, Chou SH, Howe RT, Bargatin I, Abild-Pedersen F. Thermionic current densities from first principles. The Journal of Chemical Physics. 138: 204701. PMID 23742494 DOI: 10.1063/1.4805002 |
0.647 |
|
2013 |
Schwede JW, Sarmiento T, Narasimhan VK, Rosenthal SJ, Riley DC, Schmitt F, Bargatin I, Sahasrabuddhe K, Howe RT, Harris JS, Melosh NA, Shen ZX. Photon-enhanced thermionic emission from heterostructures with low interface recombination. Nature Communications. 4: 1576. PMID 23481384 DOI: 10.1038/Ncomms2577 |
0.652 |
|
2013 |
Parsa R, Lee WS, Shavezipur M, Provine J, Maboudian R, Mitra S, Wong HSP, Howe RT. Laterally actuated platinum-coated polysilicon NEM relays Journal of Microelectromechanical Systems. 22: 768-778. DOI: 10.1109/Jmems.2013.2244779 |
0.524 |
|
2013 |
Hennessy RG, Shulaker MM, Messana M, Graham AB, Klejwa N, Provine J, Kenny TW, Howe RT. Vacuum encapsulated resonators for humidity measurement Sensors and Actuators, B: Chemical. 185: 575-581. DOI: 10.1016/J.Snb.2013.05.016 |
0.301 |
|
2012 |
Chou SH, Voss J, Bargatin I, Vojvodic A, Howe RT, Abild-Pedersen F. An orbital-overlap model for minimal work functions of cesiated metal surfaces. Journal of Physics. Condensed Matter : An Institute of Physics Journal. 24: 445007. PMID 23018485 DOI: 10.1088/0953-8984/24/44/445007 |
0.641 |
|
2012 |
Paik KH, Liu Y, Tabard-Cossa V, Waugh MJ, Huber DE, Provine J, Howe RT, Dutton RW, Davis RW. Control of DNA capture by nanofluidic transistors. Acs Nano. 6: 6767-75. PMID 22762282 DOI: 10.1021/Nn3014917 |
0.717 |
|
2012 |
Roper CS, Gutés A, Carraro C, Howe RT, Maboudian R. Single crystal silicon nanopillars, nanoneedles and nanoblades with precise positioning for massively parallel nanoscale device integration. Nanotechnology. 23: 225303. PMID 22572054 DOI: 10.1088/0957-4484/23/22/225303 |
0.745 |
|
2012 |
Yoneoka S, Lee J, Liger M, Yama G, Kodama T, Gunji M, Provine J, Howe RT, Goodson KE, Kenny TW. Electrical and thermal conduction in atomic layer deposition nanobridges down to 7 nm thickness. Nano Letters. 12: 683-6. PMID 22224582 DOI: 10.1021/Nl203548W |
0.342 |
|
2012 |
Lee JH, Bargatin I, Park J, Milaninia KM, Theogarajan LS, Sinclair R, Howe RT. Smart-cut layer transfer of single-crystal SiC using spin-on-glass Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 30. DOI: 10.1116/1.4734006 |
0.675 |
|
2012 |
Chong S, Lee B, Mitra S, Howe RT, Wong HSP. Integration of nanoelectromechanical relays with silicon nMOS Ieee Transactions On Electron Devices. 59: 255-258. DOI: 10.1109/Ted.2011.2172946 |
0.33 |
|
2012 |
Lee JH, Bargatin I, Gwinn TO, Vincent M, Littau KA, Maboudian R, Shen ZX, Melosh NA, Howe RT. Microfabricated silicon carbide thermionic energy converter for solar electricity generation Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 1261-1264. DOI: 10.1109/MEMSYS.2012.6170386 |
0.704 |
|
2012 |
Sedky S, Tawfik H, Ashour M, Graham AB, Provine J, Wang Q, Zhang XX, Howe RT. Microencapsulation of silicon cavities using a pulsed excimer laser Journal of Micromechanics and Microengineering. 22. DOI: 10.1088/0960-1317/22/7/075012 |
0.307 |
|
2012 |
Chen JWP, Provine J, Klejwa N, Howe RT. A dry wafer-reconstitution process with zero insertion force by embedded alignment guide tabs Journal of Micromechanics and Microengineering. 22. DOI: 10.1088/0960-1317/22/6/065007 |
0.342 |
|
2012 |
Sahasrabuddhe K, Schwede JW, Bargatin I, Jean J, Howe RT, Shen ZX, Melosh NA. A model for emission yield from planar photocathodes based on photon-enhanced thermionic emission or negative-electron-affinity photoemission Journal of Applied Physics. 112. DOI: 10.1063/1.4764106 |
0.66 |
|
2012 |
Lee JH, Bargatin I, Melosh NA, Howe RT. Optimal emitter-collector gap for thermionic energy converters Applied Physics Letters. 100. DOI: 10.1063/1.4707379 |
0.65 |
|
2012 |
Broderick SR, Suh C, Provine J, Roper CS, Maboudian R, Howe RT, Rajan K. Application of principal component analysis to a full profile correlative analysis of FTIR spectra Surface and Interface Analysis. 44: 365-371. DOI: 10.1002/Sia.3813 |
0.743 |
|
2012 |
Lee JH, Bargatin I, Iwami K, Littau KA, Vincent M, Maboudian R, Shen ZX, Melosh NA, Howe RT. Encapsulated thermionic energy converter with stiffened suspension Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. 493-496. |
0.671 |
|
2012 |
Snapp JP, Lee JH, Provine J, Bargatin I, Maboudian R, Lee TH, Howe RT. Sidewall silicon carbide emitters for terahertz vacuum electronics Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. 336-338. |
0.714 |
|
2011 |
Jain JR, Ly-Gagnon DS, Balram KC, White JS, Brongersma ML, Miller DAB, Howe RT. Tensile-strained germanium-on-insulator substrate fabrication for silicon-compatible optoelectronics Optical Materials Express. 1: 1121-1126. DOI: 10.1364/Ome.1.001121 |
0.399 |
|
2011 |
Lee JH, Bargatin I, Provine J, Liu F, Seo MK, Maboudian R, Brongersma ML, Melosh NA, Shen ZX, Howe RT. Effect of illlumination on thermionic emission from microfabricated silicon carbide structures 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 2658-2661. DOI: 10.1109/TRANSDUCERS.2011.5969879 |
0.707 |
|
2011 |
Laboriante I, Klejwa N, Suwandi A, Carraro C, Howe RT, Maboudian R. Suppression of wear in cyclically loaded polycrystalline silicon MEMS via a thin silicon carbide coating 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 2319-2322. DOI: 10.1109/TRANSDUCERS.2011.5969544 |
0.485 |
|
2011 |
Chen KL, Wang S, Salvia JC, Melamud R, Howe RT, Kenny TW. Wafer-level epitaxial silicon packaging for out-of-plane RF MEMS resonators with integrated actuation electrodes Ieee Transactions On Components, Packaging and Manufacturing Technology. 1: 310-317. DOI: 10.1109/Tcpmt.2010.2100711 |
0.357 |
|
2011 |
Parsa R, Shavezipur M, Lee WS, Chong S, Lee D, Wong HSP, Maboudian R, Howe RT. Nanoelectromechanical relays with decoupled electrode and suspension Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 1361-1364. DOI: 10.1109/MEMSYS.2011.5734687 |
0.394 |
|
2011 |
Mallick SB, Jung IW, Meisner AM, Provine J, Howe RT, Solgaard O. Multilayered monolithic silicon photonic crystals Ieee Photonics Technology Letters. 23: 730-732. DOI: 10.1109/Lpt.2011.2132698 |
0.314 |
|
2010 |
Schwede JW, Bargatin I, Riley DC, Hardin BE, Rosenthal SJ, Sun Y, Schmitt F, Pianetta P, Howe RT, Shen ZX, Melosh NA. Photon-enhanced thermionic emission for solar concentrator systems. Nature Materials. 9: 762-7. PMID 20676086 DOI: 10.1038/Nmat2814 |
0.663 |
|
2010 |
Bahl G, Salvia J, Bargatin I, Yoneoka S, Melamud R, Kim B, Chandorkar S, Hopcroft MA, Bahl R, Howe RT, Kenny TW. Charge-drift elimination in resonant electrostatic MEMS Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 108-111. DOI: 10.1109/MEMSYS.2010.5442555 |
0.619 |
|
2010 |
Yoneoka S, Roper CS, Candler RN, Chandorkar SA, Graham AB, Provine J, Maboudian R, Howe RT, Kenny TW. Characterization of encapsulated micromechanical resonators sealed and coated with polycrystalline SiC Journal of Microelectromechanical Systems. 19: 357-366. DOI: 10.1109/Jmems.2010.2040460 |
0.772 |
|
2010 |
Bahl G, Melamud R, Kim B, Chandorkar SA, Salvia JC, Hopcroft MA, Elata D, Hennessy RG, Candler RN, Howe RT, Kenny TW. Model and observations of dielectric charge in thermally oxidized silicon resonators Journal of Microelectromechanical Systems. 19: 162-174. DOI: 10.1109/Jmems.2009.2036274 |
0.304 |
|
2010 |
Graham AB, Messana MW, Hartwell PG, Provine J, Yoneoka S, Melamud R, Kim B, Howe RT, Kenny TW. A method for wafer-scale encapsulation of large lateral deflection MEMS devices Journal of Microelectromechanical Systems. 19: 28-37. DOI: 10.1109/Jmems.2009.2035717 |
0.39 |
|
2010 |
Ziaei-Moayyed M, Elata D, Quévy EP, Howe RT. Differential internal dielectric transduction of a Lamé-mode resonator Journal of Micromechanics and Microengineering. 20. DOI: 10.1088/0960-1317/20/11/115036 |
0.327 |
|
2009 |
Kant R, Ferralis N, Provine J, Maboudian R, Howe RT. Experimental investigation of silicon surface migration in low pressure nonreducing gas environments Electrochemical and Solid-State Letters. 12: H437-H440. DOI: 10.1149/1.3236781 |
0.638 |
|
2009 |
Roper CS, Howe RT, Maboudian R. Room-temperature wet etching of polycrystalline and nanocrystalline silicon carbide thin films with hf and hn O3 Journal of the Electrochemical Society. 156: D104-D107. DOI: 10.1149/1.3061944 |
0.759 |
|
2009 |
Roper CS, Radmilovic V, Howe RT, Maboudian R. Electrical and mechanical characterization of doped and annealed polycrystalline 3C-SiC thin films Journal of the Electrochemical Society. 156: D5-D10. DOI: 10.1149/1.3000002 |
0.745 |
|
2009 |
Klejwa N, Misra R, Provine J, Howe RT, Klejwa SJ. Laser print patterning of planar spiral inductors and interdigitated capacitors Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 27: 2745-2749. DOI: 10.1116/1.3264673 |
0.342 |
|
2009 |
Chen KL, Salvia J, Potter R, Howe RT, Kenny TW. Performance evaluation and equivalent model of silicon interconnects for fully-encapsulated RF MEMS devices Ieee Transactions On Advanced Packaging. 32: 402-409. DOI: 10.1109/Tadvp.2008.2005114 |
0.339 |
|
2009 |
Roper CS, Candler R, Yoneoka S, Kenny T, Howe RT, Maboudian R. Simultaneous wafer-scale vacuum encapsulation and microstructure cladding with LPCVD polycrystalline 3C-SiC Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 1031-1034. DOI: 10.1109/SENSOR.2009.5285964 |
0.704 |
|
2009 |
Chen KL, Chandrahalim H, Grahaml AB, Bhave SA, Howe RT, Kenny TW. Epitaxial silicon microshell vacuum-encapsulated cmos-compatible 200 mhz bulk-mode resonator Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 23-26. DOI: 10.1109/MEMSYS.2009.4805309 |
0.761 |
|
2008 |
Roper CS, Howe RT, Maboudian R. Large-scale polycrystalline SiC micromachining technologies Ecs Transactions. 16: 63-71. DOI: 10.1149/1.2992229 |
0.687 |
|
2008 |
Roper CS, Radmilovic V, Howe RT, Maboudian R. Effects of annealing on residual stress and strain gradient of doped polycrystalline SiC thin films Electrochemical and Solid-State Letters. 11: D35-D37. DOI: 10.1149/1.2831906 |
0.747 |
|
2008 |
Provine J, Roper C, Schuller JA, Brongersma ML, Maboudian R, Howe RT. The dependence of poly-crystalline SiC mid-infrared optical properties on deposition conditions 2008 Ieee/Leos International Conference On Optical Mems and Nanophotonics, Opt Mems. 182-183. DOI: 10.1109/OMEMS.2008.4607889 |
0.476 |
|
2008 |
Arellano N, Quévy EP, Provine J, Maboudian R, Howe RT. Silicon nanowire coupled micro-resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 721-724. DOI: 10.1109/MEMSYS.2008.4443758 |
0.73 |
|
2008 |
Roper CS, Radmilovic V, Howe RT, Maboudian R. Characterization of polycrystalline 3C-SiC films deposited from the precursors 1,3-disilabutane and dichlorosilane Journal of Applied Physics. 103. DOI: 10.1063/1.2907871 |
0.733 |
|
2008 |
Zhang J, Zimmer JW, Howe RT, Maboudian R. Characterization of boron-doped micro- and nanocrystalline diamond films deposited by wafer-scale hot filament chemical vapor deposition for MEMS applications Diamond and Related Materials. 17: 23-28. DOI: 10.1016/J.Diamond.2007.09.010 |
0.738 |
|
2007 |
Paulo AS, Arellano N, Plaza JA, He R, Carraro C, Maboudian R, Howe RT, Bokor J, Yang P. Suspended mechanical structures based on elastic silicon nanowire arrays. Nano Letters. 7: 1100-4. PMID 17375964 DOI: 10.1021/Nl062877N |
0.775 |
|
2007 |
Chandrahalim H, Bhave SA, Quévy EP, Howe RT. Aqueous transduction of poly-sige disk resonators Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 313-316. DOI: 10.1109/SENSOR.2007.4300131 |
0.732 |
|
2007 |
Provine J, Catrysse PB, Roper CS, Maboudian R, Fan S, Howe RT. Phonon polariton reflectance spectra in a silicon carbide membrane hole array Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-Leos. 466-467. DOI: 10.1109/LEOS.2007.4382481 |
0.703 |
|
2007 |
Low CW, Liu TJK, Howe RT. Characterization of polycrystalline silicon-germanium film deposition for modularly integrated MEMS applications Journal of Microelectromechanical Systems. 16: 68-77. DOI: 10.1109/Jmems.2006.886030 |
0.807 |
|
2007 |
Zhang J, Carraro C, Howe RT, Maboudian R. Electrical, mechanical and metal contact properties of polycrystalline 3C-SiC films for MEMS in harsh environments Surface and Coatings Technology. 201: 8893-8898. DOI: 10.1016/J.Surfcoat.2007.05.007 |
0.74 |
|
2007 |
Zhang J, Howe RT, Maboudian R. Nickel and platinum ohmic contacts to polycrystalline 3C-silicon carbide Materials Science and Engineering B: Solid-State Materials For Advanced Technology. 139: 235-239. DOI: 10.1016/J.Mseb.2007.03.006 |
0.716 |
|
2007 |
San Paulo A, Quevy E, Black J, Howe RT, White R, Bokor J. Mode shape imaging of out-of-plane and in-plane vibrating RF micromechanical resonators by atomic force microscopy Microelectronic Engineering. 84: 1354-1357. DOI: 10.1016/J.Mee.2007.01.223 |
0.482 |
|
2006 |
Roper CS, Carraro C, Howe RT, Maboudian R. Silicon carbide thin films using 1,3-disilabutane single precursor for MEMS applications-A review Ecs Transactions. 3: 267-280. DOI: 10.1149/1.2357267 |
0.741 |
|
2006 |
Low CW, Liu TJK, Howe RT. Study of poly-SiGe structural properties for modularly integrated MEMS Ecs Transactions. 3: 1131-1142. DOI: 10.1149/1.2355907 |
0.77 |
|
2006 |
Roper CS, Radmilovic V, Howe RT, Maboudian R. Single-source chemical vapor deposition of SiC films in a large-scale low-pressure CVD growth, chemical, and mechanical characterization reactor Journal of the Electrochemical Society. 153: C562-C566. DOI: 10.1149/1.2208911 |
0.765 |
|
2006 |
Zhang J, Howe RT, Maboudian R. Electrical characterization of n-type polycrystalline 3C-silicon carbide thin films deposited by 1,3-disilabutane Journal of the Electrochemical Society. 153: G548-G551. DOI: 10.1149/1.2188327 |
0.724 |
|
2006 |
Srikantha Phani A, Seshia AA, Palaniapan M, Howe RT, Yasaitis JA. Modal coupling in micromechanical vibratory rate gyroscopes Ieee Sensors Journal. 6: 1144-1152. DOI: 10.1109/Jsen.2006.881432 |
0.732 |
|
2006 |
Roper CS, Howe RT, Maboudian R. Stress control of polycrystalline 3C-SiC films in a large-scale LPCVD reactor using 1,3-disilabutane and dichlorosilane as precursors Journal of Micromechanics and Microengineering. 16: 2736-2739. DOI: 10.1088/0960-1317/16/12/029 |
0.746 |
|
2006 |
Zhang J, Howe RT, Maboudian R. Control of strain gradient in doped polycrystalline silicon carbide films through tailored doping Journal of Micromechanics and Microengineering. 16: L1-L5. DOI: 10.1088/0960-1317/16/10/L01 |
0.732 |
|
2006 |
Gao D, Carraro C, Howe RT, Maboudian R. Polycrystalline silicon carbide as a substrate material for reducing adhesion in MEMS Tribology Letters. 21: 226-232. DOI: 10.1007/S11249-006-9024-9 |
0.68 |
|
2006 |
Quévy EP, San Paulo A, Basol E, Howe RT, King TJ, Bokor J. Back-end-of-line poly-SiGe disk resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2006: 234-237. |
0.368 |
|
2006 |
Zendejas FJ, Srinivasan U, Holtz WJ, Keasling JD, Howe RT. Microfluidic generation of tunable monodisperse double emulsions for templated silica particles Micro Total Analysis Systems - Proceedings of Microtas 2006 Conference: 10th International Conference On Miniaturized Systems For Chemistry and Life Sciences. 230-232. |
0.747 |
|
2005 |
Gao D, He R, Carraro C, Howe RT, Yang P, Maboudian R. Selective growth of Si nanowire arrays via galvanic displacement processes in water-in-oil microemulsions. Journal of the American Chemical Society. 127: 4574-5. PMID 15796513 DOI: 10.1021/Ja043645Y |
0.629 |
|
2005 |
Takeuchi H, Wung A, Sun X, Howe RT, King TJ. Thermal budget limits of quarter-micrometer foundry CMOS for post-processing MEMS devices Ieee Transactions On Electron Devices. 52: 2081-2086. DOI: 10.1109/Ted.2005.854287 |
0.316 |
|
2005 |
Bhave SA, Howe RT. Silicon nitride-on-silicon bar resonator using internal electrostatic transduction Digest of Technical Papers - International Conference On Solid State Sensors and Actuators and Microsystems, Transducers '05. 2: 2139-2142. DOI: 10.1109/SENSOR.2005.1497527 |
0.582 |
|
2005 |
Paulo AS, Bokor J, Howe RT, He R, Yang P, Gao D, Carraro C, Maboudian R. Mechanical elasticity of single and double clamped silicon nanobeams fabricated by the vapor-liquid-solid method Applied Physics Letters. 87. DOI: 10.1063/1.2008364 |
0.709 |
|
2005 |
Zendejas FJ, Srinivasan U, Holtz WJ, Keasling JD, Howe RT. Microfluidic generation of tunable emulsions for templated monodisperse silica Digest of Technical Papers - International Conference On Solid State Sensors and Actuators and Microsystems, Transducers '05. 2: 1473-1476. |
0.757 |
|
2005 |
Bhave SA, Gao D, Maboudian R, Howe RT. Fully-differential poly-SiC lamé-mode resonator and checkerboard filter Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 223-226. |
0.512 |
|
2004 |
Maharbiz MM, Holtz WJ, Howe RT, Keasling JD. Microbioreactor arrays with parametric control for high-throughput experimentation. Biotechnology and Bioengineering. 86: 485-90. PMID 15146839 |
0.615 |
|
2004 |
Maharbiz MM, Holtz WJ, Howe RT, Keasling JD. Microbioreactor arrays with parametric control for high-throughput experimentation. Biotechnology and Bioengineering. 85: 376-81. PMID 14755555 DOI: 10.1002/Bit.10835 |
0.645 |
|
2004 |
Low CW, Bircumshaw BL, Dorofeeva T, Solomon G, King TJ, Howe RT. Stress stability of poly-SiGe and various oxide films in humid environments Materials Research Society Symposium Proceedings. 854: 22-27. DOI: 10.1557/Proc-854-U3.3 |
0.803 |
|
2004 |
Wijesundara MBJ, Valente G, Ashurst WR, Howe RT, Pisano AP, Carraro C, Maboudian R. Single-Source Chemical Vapor Deposition of 3C-SiC Films in a LPCVD Reactor I. Growth, Structure, and Chemical Characterization Journal of the Electrochemical Society. 151: C210-C214. DOI: 10.1149/1.1646141 |
0.691 |
|
2004 |
Gao D, Wijesundara MBJ, Carraro C, Howe RT, Maboudian R. Transformer coupled plasma etching of 3C-SiC films using fluorinated chemistry for microelectromechanical systems applications Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22: 513-518. DOI: 10.1116/1.1648067 |
0.662 |
|
2004 |
Bircumshaw BL, Wasilik ML, Kim EB, Su YR, Takeuchi H, Low CW, Liu G, Pisano AP, King TJ, Howe RT. Hydrogen peroxide etching and stability of p-type poly-SiGe films Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 514-519. DOI: 10.1109/MEMSYS.2003.1189799 |
0.775 |
|
2004 |
Takeuchi H, Quévy E, Bhave SA, King TJ, Howe RT. Ge-blade damascene process for post-CMOS integration of nano-mechanical resonators Ieee Electron Device Letters. 25: 529-531. DOI: 10.1109/Led.2004.831898 |
0.638 |
|
2004 |
Gao D, Wijesundara MBJ, Carraro C, Howe RT, Maboudian R. Recent progress toward a manufacturable polycrystalline SiC surface micromachining technology Ieee Sensors Journal. 4: 441-448. DOI: 10.1109/Jsen.2004.828859 |
0.68 |
|
2004 |
Gao D, Carraro C, Radmilovic V, Howe RT, Maboudian R. Fracture of polycrystalline 3C-SiC films in microelectromechanical systems Journal of Microelectromechanical Systems. 13: 972-976. DOI: 10.1109/Jmems.2004.838372 |
0.626 |
|
2004 |
Sedky S, Howe RT, King TJ. Pulsed-laser annealing, a low-thermal-budget technique for eliminating stress gradient in Poly-SiGe MEMS structures Journal of Microelectromechanical Systems. 13: 669-675. DOI: 10.1109/Jmems.2004.832189 |
0.368 |
|
2004 |
Marharbiz M, Holz W, Sharifzadeh S, Keasling J, Howe R. Errata to “A Microfabricated Electrochemical Oxygen Generator for High-Density Cell Culture Arrays” Journal of Microelectromechanical Systems. 13: 386-386. DOI: 10.1109/Jmems.2004.827681 |
0.403 |
|
2004 |
Scott KL, Hirano T, Yang H, Singh H, Howe RT, Niknejad AM. High-performance inductors using capillary based fluidic self-assembly Journal of Microelectromechanical Systems. 13: 300-309. DOI: 10.1109/Jmems.2003.823234 |
0.362 |
|
2004 |
Low CW, Wasilik ML, Takeuchi H, King TJ, Howe RT. In-situ doped poly-sige LPCVD process using BCL3 for post-cmos integration of MEMS devices Proceedings - Electrochemical Society. 7: 1021-1032. |
0.78 |
|
2004 |
Phani AS, Seshia AA, Palaniapan M, Howe RT, Yasaitis J. Coupling of resonant modes in micromechanical vibratory rate gyroscopes 2004 Nsti Nanotechnology Conference and Trade Show - Nsti Nanotech 2004. 2: 335-338. |
0.602 |
|
2003 |
Lin BCY, King TJ, Howe RT. Optimization of poly-SiGe deposition processes for modular MEMS integration Materials Research Society Symposium - Proceedings. 782: 43-48. DOI: 10.1557/Proc-782-A2.4 |
0.404 |
|
2003 |
Jeon Y, King T, Howe RT. Properties of Phosphorus-Doped Poly-SiGe Films for Microelectromechanical System Applications Journal of the Electrochemical Society. 150: H1. DOI: 10.1149/1.1522837 |
0.4 |
|
2003 |
Yasaitis J, Judy M, Brosnihan T, Garone P, Pokrovskiy N, Sniderman D, Limb S, Howe R, Boser B, Palaniapan M, Jiang X, Bhave S. A modular process for integrating thick polysilicon MEMS devices with sub-micron CMOS Proceedings of Spie - the International Society For Optical Engineering. 4979: 145-154. DOI: 10.1117/12.478294 |
0.747 |
|
2003 |
Riehl PS, Scott KL, Muller RS, Howe RT, Yasaitis JA. Electrostatic charge and field sensors based on micromechanical resonators Journal of Microelectromechanical Systems. 12: 577-589. DOI: 10.1109/Jmems.2003.818066 |
0.783 |
|
2003 |
Maharbiz MM, Holtz WJ, Sharifzadeh S, Keasling JD, Howe RT. A microfabricated electrochemical oxygen generator for high-density cell culture arrays Journal of Microelectromechanical Systems. 12: 590-599. DOI: 10.1109/Jmems.2003.815828 |
0.647 |
|
2003 |
Franke AE, Heck JM, King TJ, Howe RT. Polycrystalline silicon-germanium films for integrated microsystems Journal of Microelectromechanical Systems. 12: 160-171. DOI: 10.1109/Jmems.2002.805051 |
0.799 |
|
2003 |
Gao D, Howe RT, Maboudian R. High-selectivity etching of polycrystalline 3C-SiC films using HBr-based transformer coupled plasma Applied Physics Letters. 82: 1742-1744. DOI: 10.1063/1.1560561 |
0.666 |
|
2003 |
Wijesundara MB, Gao D, Carraro C, Howe RT, Maboudian R. Nitrogen doping of polycrystalline 3C-SiC films grown using 1,3-disilabutane in a conventional LPCVD reactor Journal of Crystal Growth. 259: 18-25. DOI: 10.1016/S0022-0248(03)01573-2 |
0.657 |
|
2002 |
Sedky S, Schroeder J, Sands T, Howe R, King T. Pulsed Laser Annealing of Silicon-Germanium Films Mrs Proceedings. 741. DOI: 10.1557/Proc-741-J4.2 |
0.308 |
|
2002 |
Howe RT, King T. Low-Temperature LPCVD MEMS Technologies Mrs Proceedings. 729. DOI: 10.1557/Proc-729-U5.1 |
0.426 |
|
2002 |
Srinivasan U, Helmbrecht MA, Muller RS, Howe RT. MEMS: Some Self-Assembly Required Optics and Photonics News. 13: 20. DOI: 10.1364/Opn.13.11.000020 |
0.761 |
|
2002 |
Seshia AA, Palaniapan M, Roessig TA, Howe RT, Gooch RW, Schimert TR, Montague S. A vacuum packaged surface micromachined resonant accelerometer Journal of Microelectromechanical Systems. 11: 784-793. DOI: 10.1109/Jmems.2002.805207 |
0.74 |
|
2002 |
Srinivasan U, Helmbrecht MA, Rembe C, Muller RS, Howe RT. Fluidic self-assembly of micromirrors onto microactuators using capillary forces Ieee Journal On Selected Topics in Quantum Electronics. 8: 4-11. DOI: 10.1109/2944.991393 |
0.768 |
|
2002 |
Stoldt CR, Carraro C, Ashurst WR, Gao D, Howe RT, Maboudian R. A low-temperature CVD process for silicon carbide MEMS Sensors and Actuators, a: Physical. 97: 410-415. DOI: 10.1016/S0924-4247(01)00810-X |
0.686 |
|
2002 |
Wijesundara MBJ, Stoldt CR, Carraro C, Howe RT, Maboudian R. Nitrogen doping of polycrystalline 3C-SiC films grown by single-source chemical vapor deposition Thin Solid Films. 419: 69-75. DOI: 10.1016/S0040-6090(02)00782-4 |
0.577 |
|
2001 |
Franke AE, King T, Howe RT. Integrated MEMS Technologies Mrs Bulletin. 26: 291-295. DOI: 10.1557/Mrs2001.62 |
0.72 |
|
2001 |
Muller L, Pisano A, Howe R. Microgimbal torsion beam design using open, thin-walled cross sections Journal of Microelectromechanical Systems. 10: 550-560. DOI: 10.1109/84.967378 |
0.521 |
|
2001 |
Srinivasan U, Liepmann D, Howe RT. Microstructure to substrate self-assembly using capillary forces Journal of Microelectromechanical Systems. 10: 17-24. DOI: 10.1109/84.911087 |
0.611 |
|
2001 |
Ashurst W, Yau C, Carraro C, Lee C, Kluth G, Howe RT, Maboudian R. Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS Sensors and Actuators a: Physical. 91: 239-248. DOI: 10.1016/S0924-4247(01)00593-3 |
0.565 |
|
2001 |
Muller L, Howe RT, Pisano AP. High-aspect-ratio, molded microstructures with electrical isolation and embedded interconnects Microsystem Technologies. 7: 47-54. DOI: 10.1007/S005420000075 |
0.584 |
|
2000 |
Hui EE, Howe RT, Rodgers MS. Single-step assembly of complex 3-D microstructures Proceedings of the Ieee Micro Electro Mechanical Systems (Mems). 602-607. |
0.557 |
|
1999 |
Singh A, Horsley D, Cohn M, Pisano A, Howe R. Batch transfer of microstructures using flip-chip solder bonding Journal of Microelectromechanical Systems. 8: 27-33. DOI: 10.1109/84.749399 |
0.547 |
|
1998 |
Cohn MB, Boehringer KF, Noworolski JM, Singh A, Keller CG, Goldberg KA, Howe RT. Microassembly technologies for MEMS Proceedings of Spie. 3515: 2-16. DOI: 10.1117/12.322082 |
0.307 |
|
1998 |
Srinivasan U, Houston MR, Howe RT, Maboudian R. Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines Journal of Microelectromechanical Systems. 7: 252-259. DOI: 10.1109/84.679393 |
0.69 |
|
1997 |
Roessig TA, Howe RT, Pisano AP, Smith JH. Surface-micromachined resonant accelerometer Sensors. 2: 859-862. DOI: 10.1109/Sensor.1997.635237 |
0.551 |
|
1997 |
Brosnihan TJ, Bustillo JM, Pisano AP, Howe RT. Embedded interconnect and electrical isolation for high-aspect-ratio, SOI inertial instruments Sensors. 1: 637-640. DOI: 10.1109/Sensor.1997.613732 |
0.581 |
|
1997 |
Singh A, Horsley DA, Cohn MB, Pisano AP, Howe RT. Batch transfer of microstructures using flip-chip solder bump bonding Sensors. 1: 265-268. DOI: 10.1109/Sensor.1997.613634 |
0.548 |
|
1997 |
Lin L, Pisano AP, Howe RT. A micro strain gauge with mechanical amplifier Ieee\/Asme Journal of Microelectromechanical Systems. 6: 313-321. DOI: 10.1109/84.650128 |
0.544 |
|
1997 |
Houston MR, Howe RT, Maboudian R. Effect of hydrogen termination on the work of adhesion between rough polycrystalline silicon surfaces Journal of Applied Physics. 81: 3474-3483. DOI: 10.1063/1.365045 |
0.521 |
|
1996 |
Howe RT. Recent Advances in Surface Micromachining Ieej Transactions On Sensors and Micromachines. 116: 90-97. DOI: 10.1541/Ieejsmas.116.90 |
0.406 |
|
1996 |
Fedder GK, Howe RT. Multimode digital control of a suspended polysilicon microstructure Journal of Microelectromechanical Systems. 5: 283-297. DOI: 10.1109/84.546408 |
0.308 |
|
1996 |
Boser B, Howe R. Surface micromachined accelerometers Ieee Journal of Solid-State Circuits. 31: 366-375. DOI: 10.1109/4.494198 |
0.33 |
|
1996 |
Howe RT, Boser BE, Pisano AP. Polysilicon integrated microsystems: technologies and applications Sensors and Actuators a: Physical. 56: 167-177. DOI: 10.1016/0924-4247(96)01291-5 |
0.587 |
|
1995 |
Houston MR, Howe RT, Komvopoulos K, Maboudian R. Diamond-Like Carbon Films for Silicon Passivation in Microelectromechanical Devices Mrs Proceedings. 383. DOI: 10.1557/Proc-383-391 |
0.566 |
|
1994 |
Cho Y, Pisano AP, Howe RT. Viscous damping model for laterally oscillating microstructures Ieee\/Asme Journal of Microelectromechanical Systems. 3: 81-87. DOI: 10.1109/84.294325 |
0.525 |
|
1994 |
Alley RL, Komvopoulos K, Howe RT. Self‐assembled monolayer film for enhanced imaging of rough surfaces with atomic force microscopy Journal of Applied Physics. 76: 5731-5737. DOI: 10.1063/1.358408 |
0.312 |
|
1994 |
Cho Y, Kwak BM, Pisano AP, Howe RT. Slide film damping in laterally driven microstructures Sensors and Actuators a: Physical. 40: 31-39. DOI: 10.1016/0924-4247(94)85027-5 |
0.548 |
|
1994 |
Bustillo JM, Fedder GK, Nguyen CTC, Howe RT. Process technology for the modular integration of CMOS and polysilicon microstructures Microsystem Technologies. 1: 30-41. DOI: 10.1007/Bf01367758 |
0.357 |
|
1993 |
Monk D, Krulevitch P, Howe R, Johnson G. Stress-Corrosion Cracking and Blistering of Thin Polycrystalline Silicon Films in Hydrofluoric Acid Mrs Proceedings. 308. DOI: 10.1557/Proc-308-641 |
0.382 |
|
1993 |
Monk DJ, Soane DS, Howe RT. A review of the chemical reaction mechanism and kinetics for hydrofluoric acid etching of silicon dioxide for surface micromachining applications Thin Solid Films. 232: 1-12. DOI: 10.1016/0040-6090(93)90752-B |
0.32 |
|
1992 |
Krulevitch P, Johnson GC, Howe RT. Stress and Microstructure in Phosphorus Doped Polycrystalline Silicon Mrs Proceedings. 276. DOI: 10.1557/Proc-276-79 |
0.379 |
|
1992 |
Monk DJ, Soane DS, Howe RT. LPCVD Silicon Dioxide Sacrificial Layer Etching for Surface Micromachining Mrs Proceedings. 276. DOI: 10.1557/Proc-276-303 |
0.339 |
|
1992 |
Tang W, Lim M, Howe R. Electrostatic Comb Drive Levitation And Control Method Journal of Microelectromechanical Systems. 1: 170-178. DOI: 10.1109/Jmems.1992.752508 |
0.583 |
|
1991 |
Krulevitch P, Johnson GC, Howe RT. Stress and Microstructure in Lpcvd Polycrystalline Silicon Films: Experimental Results and Closed Form Modeling of Stresses Mrs Proceedings. 239. DOI: 10.1557/Proc-239-13 |
0.38 |
|
1990 |
Krulevitch P, Nguyen TD, Johnson GC, Howe RT, Wenk HR, Gronsky R. Lpcvd Polycrystalline Silicon Thin Films: The Evolution of Structure, Texture and Stress Mrs Proceedings. 202. DOI: 10.1557/Proc-202-167 |
0.378 |
|
1990 |
Huang J, Krulevitch P, Johnson G, Howe R, Wenk H. Investigation of Texture and Stress in Undoped Polysilicon Films Mrs Proceedings. 182. DOI: 10.1557/Proc-182-201 |
0.309 |
|
1990 |
Howe RT, Muller RS, Gabriel KJ, Trimmer WSN. Silicon micromechanics: sensors and actuators on a chip Ieee Spectrum. 27: 29-35. DOI: 10.1109/6.58424 |
0.648 |
|
1990 |
Muller RS, Howe RT. Technologies for microdynamic devices Nanotechnology. 1: 8-12. DOI: 10.1088/0957-4484/1/1/002 |
0.593 |
|
1990 |
Fan L, Howe R, Muller R. Fracture toughness characterization of brittle thin films Sensors and Actuators a: Physical. 23: 872-874. DOI: 10.1016/0924-4247(90)87049-O |
0.563 |
|
1990 |
Tang WC, Nguyen TH, Judy MW, Howe RT. Electrostatic-comb drive of lateral polysilicon resonators Sensors and Actuators a: Physical. 21: 328-331. DOI: 10.1016/0924-4247(90)85065-C |
0.607 |
|
1989 |
Huang J, Howe R, Lee H. Vacuum-insulated-gate field-effect transistor Electronics Letters. 25: 1571. DOI: 10.1049/El:19891055 |
0.307 |
|
1989 |
Putty MW, Chang S, Howe RT, Robinson AL, Wise KD. Process Integration for active polysilicon resonant microstructures Sensors and Actuators. 20: 143-151. DOI: 10.1016/0250-6874(89)87112-4 |
0.344 |
|
1989 |
Tang WC, Nguyen TH, Howe RT. Laterally Driven Polysilicon Resonant Microstructures Sensors and Actuators. 20: 25-32. DOI: 10.1016/0250-6874(89)87098-2 |
0.639 |
|
1989 |
Howe RT. Microsensor and microactuator applications of thin films Thin Solid Films. 181: 235-243. DOI: 10.1016/0040-6090(89)90490-2 |
0.383 |
|
1988 |
Howe RT. Surface micromachining for microsensors and microactuators Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 6: 1809. DOI: 10.1116/1.584158 |
0.386 |
|
1988 |
Bart SF, Lober TA, Howe RT, Lang JH, Schlecht MF. Design considerations for micromachined electric actuators Sensors and Actuators. 14: 269-292. DOI: 10.1016/0250-6874(88)80074-X |
0.353 |
|
1987 |
Howe RT. Applications of Polysilicon Films in Microsensors and Microactuators Mrs Proceedings. 106. DOI: 10.1557/Proc-106-213 |
0.344 |
|
1987 |
Allen MG, Mehregany M, Howe RT, Senturia SD. Microfabricated structures for the in situ measurement of residual stress, Young's modulus, and ultimate strain of thin films Applied Physics Letters. 51: 241-243. DOI: 10.1063/1.98460 |
0.313 |
|
1987 |
Mehregany M, Howe RT, Senturia SD. Novel microstructures for the in situ measurement of mechanical properties of thin films Journal of Applied Physics. 62: 3579-3584. DOI: 10.1063/1.339285 |
0.324 |
|
1986 |
Howe RT. Polycrystalline silicon micromachining: a new technology for integrated sensors. Annals of Biomedical Engineering. 14: 187-97. PMID 3740570 DOI: 10.1007/Bf02584269 |
0.421 |
|
1986 |
Howe RT, Muller RS. Resonant-microbridge vapor sensor Ieee Transactions On Electron Devices. 33: 499-506. DOI: 10.1109/T-Ed.1986.22519 |
0.607 |
|
1983 |
Howe RT, Muller RS. Stress in polycrystalline and amorphous silicon thin films Journal of Applied Physics. 54: 4674-4675. DOI: 10.1063/1.332628 |
0.616 |
|
1983 |
Howe R, Muller R. Polycrystalline and amorphous silicon micromechanical beams: annealing and mechanical properties Sensors and Actuators. 4: 447-454. DOI: 10.1016/0250-6874(83)85056-2 |
0.603 |
|
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