Year |
Citation |
Score |
2006 |
Pawloski AR, Acheta A, Levinson HJ, Michaelson TB, Jamieson A, Nishimura Y, Grant Willson C. Line edge roughness and intrinsic bias for two methacrylate polymer resist systems Journal of Microlithography, Microfabrication and Microsystems. 5. DOI: 10.1117/1.2200675 |
0.738 |
|
2005 |
Meiring JE, Michaelson TB, Jamieson AT, Schmid GM, Willson CG. Using mesoscale simulation to explore photoresist line edge roughness Progress in Biomedical Optics and Imaging - Proceedings of Spie. 5753: 350-360. DOI: 10.1117/12.599736 |
0.576 |
|
2004 |
Jamieson A, Willson CG, Hsu Y, Brodie AD. Low-voltage electron beam lithography resist processes: Top surface imaging and hydrogen silisesquioxane bilayer Journal of Microlithography, Microfabrication and Microsystems. 3: 442-449. DOI: 10.1117/1.1758268 |
0.568 |
|
2003 |
Johnson SC, Bailey TC, Dickey MD, Smith BJ, Kim EK, Jamieson AT, Stacey NA, Ekerdt JG, Willson CG, Mancini DP, Dauksher WJ, Nordquist KJ, Resnick DJ. Advances in step and flash imprint lithography Proceedings of Spie - the International Society For Optical Engineering. 5037: 197-202. DOI: 10.1117/12.484985 |
0.573 |
|
2003 |
Johnson HF, Ozair SN, Jamieson A, Trinque BC, Brodsky CC, Willson CG. Cationic graft polymerization lithography Proceedings of Spie - the International Society For Optical Engineering. 5037: 943-951. DOI: 10.1117/12.484974 |
0.635 |
|
2001 |
Jamieson A, Somervell M, Hoang Vi Tran, Hung R, MacDonald SA, Grant Willson C. Top surface imaging at 157 nm Proceedings of Spie - the International Society For Optical Engineering. 4345: 406-416. DOI: 10.1117/12.436872 |
0.678 |
|
2000 |
Brodsky C, Byers J, Conley W, Hung R, Yamada S, Patterson K, Somervell M, Trinque B, Tran HV, Cho S, Chiba T, Lin SH, Jamieson A, Johnson H, Vander Heyden T, et al. 157 nm resist materials: Progress report Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 18: 3396-3401. DOI: 10.1116/1.1321762 |
0.499 |
|
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