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David W. Humbird, Ph.D. - Publications

Affiliations: 
2004 University of California, Berkeley, Berkeley, CA, United States 
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12 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2008 Végh JJ, Humbird D, Graves DB. Silicon etch in the presence of a fluorocarbon overlayer: The role of fluorocarbon cluster ejection Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 26: 52-61. DOI: 10.1116/1.2812444  0.659
2005 Végh JJ, Humbird D, Graves DB. Silicon etch by fluorocarbon and argon plasmas in the presence of fluorocarbon films Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 23: 1598-1604. DOI: 10.1116/1.2049304  0.67
2005 Humbird D, Graves DB. Atomistic simulations of Ar +M -ion-assisted etching of silicon by fluorine and chlorine Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 23: 31-38. DOI: 10.1116/1.1814106  0.665
2004 Humbird D, Graves DB. Improved interatomic potentials for silicon-fluorine and silicon-chlorine. The Journal of Chemical Physics. 120: 2405-12. PMID 15268380 DOI: 10.1063/1.1636722  0.658
2004 Humbird D, Graves DB. Molecular dynamics simulations of Si-F surface chemistry with improved interatomic potentials Plasma Sources Science and Technology. 13: 548-552. DOI: 10.1088/0963-0252/13/3/022  0.644
2004 Humbird D, Graves DB. Mechanism of silicon etching in the presence of CF 2, F, and Ar + Journal of Applied Physics. 96: 2466-2471. DOI: 10.1063/1.1769602  0.671
2004 Humbird D, Graves DB. Atomistic simulations of spontàneous etching of silicon by fluorine and chlorine Journal of Applied Physics. 96: 791-798. DOI: 10.1063/1.1753657  0.656
2004 Humbird D, Graves DB. Fluorocarbon plasma etching of silicon: Factors controlling etch rate Journal of Applied Physics. 96: 65-70. DOI: 10.1063/1.1736321  0.679
2004 Humbird D, Graves DB, Hua X, Oehrlein GS. Molecular dynamics simulations of Ar +-induced transport of fluorine through fluorocarbon films Applied Physics Letters. 84: 1073-1075. DOI: 10.1063/1.1644338  0.672
2002 Humbird D, Graves DB. Ion-induced damage and annealing of silicon. Molecular dynamics simulations Pure and Applied Chemistry. 74: 419-422. DOI: 10.1351/Pac200274030419  0.602
2002 Humbird D, Graves DB. Controlling surfaces in plasma processing: Role of ions via molecular dynamics simulations of surface chemistry Plasma Sources Science and Technology. 11: A191-A195. DOI: 10.1088/0963-0252/11/3A/328  0.668
2002 Graves DB, Humbird D. Surface chemistry associated with plasma etching processes Applied Surface Science. 192: 72-87. DOI: 10.1016/S0169-4332(02)00021-1  0.671
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