Year |
Citation |
Score |
2012 |
Horne SF, Partlow MJ, Gustafson DS, Besen MM, Smith DK, Blackborow PA. High brightness Electrodeless Z-pinchâ„¢ EUV source for mask inspection tools Proceedings of Spie - the International Society For Optical Engineering. 8322. DOI: 10.1117/12.916476 |
0.47 |
|
2012 |
Partlow MJ, Besen MM, Blackborow PA, Collins R, Gustafson D, Horne SF, Smith DK. Extreme-ultraviolet light source development to enable pre-production mask inspection Journal of Micro-Nanolithography Mems and Moems. 11. DOI: 10.1117/1.Jmm.11.2.021105 |
0.483 |
|
2011 |
Smith D, Partlow M, Horne S. Inductively Driven, Electrodeless Z-Pinch Sources for EUV and Soft X-Ray Applications Frontiers in Optics. DOI: 10.1364/Fio.2011.Fmj4 |
0.395 |
|
2011 |
Gustafson D, Horne SF, Partlow MJ, Besen MM, Smith DK, Blackborow PA. EQ-10 Electrodeless Z-pinch EUV source for metrology applications Proceedings of Spie - the International Society For Optical Engineering. 8166. DOI: 10.1117/12.899141 |
0.367 |
|
2011 |
Horne SF, Gustafson D, Partlow MJ, Besen MM, Smith DK, Blackborow PA. Improvements in the EQ-10 electrodeless Z-pinch EUV source for metrology applications Proceedings of Spie - the International Society For Optical Engineering. 7969. DOI: 10.1117/12.880794 |
0.474 |
|
2010 |
Horne S, Smith D, Besen M, Partlow M, Stolyarov D, Zhu H, Holber W. A novel high-brightness, broadband light-source technology from the VUV to the IR Proceedings of Spie - the International Society For Optical Engineering. 7680. DOI: 10.1117/12.850269 |
0.4 |
|
2010 |
Blackborow PA, Partlow MJ, Horne SF, Besen MM, Smith DK, Gustafson D. EUV source development for AIMS and blank inspection Proceedings of Spie - the International Society For Optical Engineering. 7636. DOI: 10.1117/12.846559 |
0.465 |
|
2009 |
Horne SF, Niell FM, Partlow MJ, Besen MM, Smith DK, Blackborow PA, Gustafson D. Development of a high pulse rate EUV source Proceedings of Spie - the International Society For Optical Engineering. 7271. DOI: 10.1117/12.813765 |
0.37 |
|
2008 |
Blackborow PA, Partlow MJ, Horne SF, Besen MM, Smith DK, Gustafson DS. EUV source development at Energetiq Proceedings of Spie - the International Society For Optical Engineering. 6921. DOI: 10.1117/12.772890 |
0.469 |
|
2004 |
Partlow M, Miao X, Bochmann J, Cashen M, Metcalf H. Bichromatic slowing and collimation to make an intense helium beam. Physical Review Letters. 93: 213004. PMID 15601007 DOI: 10.1103/Physrevlett.93.213004 |
0.368 |
|
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