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Erik N. Hoggan, Ph.D. - Publications

Affiliations: 
2002 North Carolina State University, Raleigh, NC 
Area:
Chemical Engineering
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6 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2004 Hoggan EN, Wang K, Flowers D, DeSimone JM, Carbonell RG. "Dry" lithography using liquid and supercritical carbon dioxide based chemistries and processes Ieee Transactions On Semiconductor Manufacturing. 17: 510-516. DOI: 10.1109/Tsm.2004.837002  0.646
2004 Hoggan EN, Flowers D, Wang K, DeSimone JM, Carbonell RG. Spin Coating of Photoresists Using Liquid Carbon Dioxide Industrial and Engineering Chemistry Research. 43: 2113-2122. DOI: 10.1021/Ie0308543  0.631
2002 Hoggan EN, Flowers D, DeSimone JM, Carbonell RG. Spin coating and photolithography using liquid and supercritical carbon dioxide Proceedings of Spie - the International Society For Optical Engineering. 4690: 1217-1223. DOI: 10.1117/12.474199  0.64
2001 Flowers D, Hoggan E, DeSimone JM, Carbonell R. Designing Photoresist Systems for Microlithography in Carbon Dioxide Mrs Proceedings. 705. DOI: 10.1557/Proc-705-Y7.8  0.681
2001 Flowers D, Hoggan E, DeSimone JM, Carbonell R. All CO2-Processed Fluoropolymer-Containing Photoresist Systems Mrs Proceedings. 705. DOI: 10.1557/Proc-705-Y2.4  0.684
2001 McAdams CL, Flowers D, Hoggan EN, Carbonell RG, DeSimone JM. All CO2-processed 157-nm fluoropolymer-containing photoresist systems Proceedings of Spie - the International Society For Optical Engineering. 4345: 327-334. DOI: 10.1117/12.436835  0.503
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