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Serdar Aksu, Ph.D. - Publications

Affiliations: 
2002 University of California, Berkeley, Berkeley, CA, United States 
Area:
Materials Science Engineering
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12 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2010 Aksu S. Role of phosphoric acid in copper electrochemical mechanical planarization slurries Materials Research Society Symposium Proceedings. 1157: 139-144.  0.538
2009 Aksu S. Potential-pH diagrams of copper for the planarization slurries with different complexing agents Ecs Transactions. 19: 15-24. DOI: 10.1149/13123770  0.406
2009 Aksu S. Electrochemical equilibria of copper in aqueous phosphoric acid solutions Journal of the Electrochemical Society. 156. DOI: 10.1149/1.3215996  0.506
2006 Patri UB, Aksu S, Babu SV. Role of the functional groups of complexing agents in copper slurries Journal of the Electrochemical Society. 153. DOI: 10.1149/1.2199307  0.305
2006 Aksu S, Emesh I, Başol B. Electrochemical Mechanical Planarization (eCMP) of copper overburden 2006 Proceedings - 11th International Chemical-Mechanical Planarization For Ulsi Multilevel Interconnection Conference, Cmp-Mic 2006. 19-26.  0.311
2005 Aksu S. Electrochemistry of copper in aqueous oxalic acid solutions Journal of the Electrochemical Society. 152. DOI: 10.1149/1.2121737  0.422
2005 Aksu S. Potential-pH diagrams of interest to chemical mechanical planarization of copper thin films Materials Research Society Symposium Proceedings. 867: 15-20.  0.442
2003 Aksu S, Wang L, Doyle FM. Effect of hydrogen peroxide on oxidation of copper in CMP slurries containing glycine Journal of the Electrochemical Society. 150. DOI: 10.1149/1.1615611  0.63
2002 Aksu S, Doyle FM. Electrochemistry of copper in aqueous ethylenediamine solutions Journal of the Electrochemical Society. 149. DOI: 10.1149/1.1481067  0.64
2002 Aksu S, Doyle FM. The role of glycine in the chemical mechanical planarization of copper Journal of the Electrochemical Society. 149. DOI: 10.1149/1.1474436  0.621
2001 Aksu S, Doyle FM. Electrochemistry of copper in aqueous glycine solutions Journal of the Electrochemical Society. 148. DOI: 10.1149/1.1344532  0.641
2000 Aksu S, Doyle FM. The role of ethylenediaminetetraacetic acid (EDTA) and glycine in the chemical mechanical planarization (CMP) of copper Proceedings of the Second International Conference On Processing Materials For Properties. 225-230.  0.505
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