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John Daugherty - Publications

Affiliations: 
1989-1994 Chemical and Biomolecular Engineering University of California, Berkeley, Berkeley, CA, United States 
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4 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2002 Ullal SJ, Singh H, Daugherty J, Vahedi V, Aydil ES. Formation and removal of composite halogenated silicon oxide and fluorocarbon films deposited on chamber walls during plasma etching of multiple film stacks Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 20: 1939-1946. DOI: 10.1116/1.1502698  0.39
2002 Ullal SJ, Singh H, Daugherty J, Vahedi V, Aydil ES. Maintaining reproducible plasma reactor wall conditions: SF6 plasma cleaning of films deposited on chamber walls during Cl2/O2 plasma etching of Si Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 20: 1195-1201. DOI: 10.1116/1.1479733  0.405
1995 Daugherty JE, Graves DB. Derivation and experimental verification of a particulate transport model for a glow discharge Journal of Applied Physics. 78: 2279-2287. DOI: 10.1063/1.360145  0.406
1993 Daugherty JE, Graves DB. Particulate Temperature in Radio Frequency Glow Discharges Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 11: 1126-1131. DOI: 10.1116/1.578452  0.392
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