Huatan Qiu, Ph.D. - Publications

Affiliations: 
2007 University of Illinois, Urbana-Champaign, Urbana-Champaign, IL 
Area:
Fluid and Plasma Physics, Materials Science Engineering

11 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2009 Qiu H, Srivastava SN, Thompson KC, Neumann MJ, Ruzic DN. Effectiveness of Mo-Au Gibbsian segregating alloys and the surface removal effect on the Gibbsian segregating performance for extreme ultraviolet collector optics Optical Engineering. 48. DOI: 10.1117/1.3126002  0.775
2008 Qiu H, Srivastava SN, Thompson KC, Neumann MJ, Ruzic DN. Time exposure performance of Mo-Au Gibbsian segregating alloys for extreme ultraviolet collector optics. Applied Optics. 47: 2443-51. PMID 18449311 DOI: 10.1364/Ao.47.002443  0.768
2008 Qiu H, Srivastava SN, Thompson KC, Neumann MJ, Ruzic DN. Temperature dependence of Mo-Au Gibbsian segregating alloys Journal of Micro/Nanolithography, Mems, and Moems. 7. DOI: 10.1117/1.2964218  0.754
2007 Qiu H, Srivastava SN, Anderson JC, Ruzic DN. Gibbsian Segregating (GS) alloys: A potential solution to minimize collector degradation Proceedings of Spie - the International Society For Optical Engineering. 6517. DOI: 10.1117/12.712465  0.71
2007 Neumann MJ, Defrees RA, Qiu H, Ruzic DN, Khodykin O, Ershov A, Bristol RL. Plasma cleaning of lithium off of collector optics material for use in extreme ultraviolet lithography applications Journal of Micro/Nanolithography, Mems, and Moems. 6. DOI: 10.1117/1.2750651  0.754
2007 Srivastava SN, Thompson KC, Antonsen EL, Qiu H, Spencer JB, Papke D, Ruzic DN. Lifetime measurements on collector optics from Xe and Sn extreme ultraviolet sources Journal of Applied Physics. 102. DOI: 10.1063/1.2756525  0.63
2006 Qiu H, Thompson KC, Srivastava SN, Antonsen EL, Alman DA, Jurczyk BE, Ruzic DN. Optical exposure characterization and comparisons for discharge produced plasma Sn extreme ultraviolet system Journal of Microlithography, Microfabrication and Microsystems. 5. DOI: 10.1117/1.2358124  0.752
2006 Qiu H, Alman DA, Thompson KC, Spencer JB, Antonsen EL, Jurczyk BE, Ruzic DN, Spila TP. Characterization of collector optic material samples before and after exposure in laser produced plasma and discharge produced plasma extreme ultraviolet sources Journal of Microlithography, Microfabrication and Microsystems. 5. DOI: 10.1117/1.2243082  0.723
2005 Neumann MJ, Shin H, Qiu H, Ritz E, DeFrees RA, Hendricks MR, Alman DA, Jurczyk BE, Ruzic DN, Bristol R. Evaluating advanced fuel candidates in surface cleaning of optics by plasma exposure (scope) Progress in Biomedical Optics and Imaging - Proceedings of Spie. 5751: 1125-1136. DOI: 10.1117/12.600117  0.769
2005 Qiu H, Alman DA, Thompson KC, Coventry MD, Spencer JB, Hendricks MR, Antonsen EL, Jurczyk BE, Ruzic DN, Spila TP, Edwards G, Wurm S, Wood O, Bristol R. Characterization of collector optic material samples before and after exposure in LPP and DPP EUV sources Progress in Biomedical Optics and Imaging - Proceedings of Spie. 5751: 1211-1222. DOI: 10.1117/12.600093  0.655
2005 Alman DA, Qiu H, Thompson KC, Antonsen EL, Spencer JB, Hendricks MR, Jurczyk BE, Ruzic DN, Spila T, Edwards G, Wurm S, Wood O, Bristol R. UIUC collector erosion and optical lifetime project results: Time dependent exposures Progress in Biomedical Optics and Imaging - Proceedings of Spie. 5751: 1118-1124. DOI: 10.1117/12.599978  0.571
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