Year |
Citation |
Score |
2016 |
Nagar M, Radisic A, Strubbe K, Vereecken PM. The Effect of the Substrate Characteristics on the Electrochemical Nucleation and Growth of Copper Journal of the Electrochemical Society. 163: D3053-D3061. DOI: 10.1149/2.0081612JES |
0.461 |
|
2014 |
Nagar M, Radisic A, Strubbe K, Vereecken PM. The effect of polyether suppressors on the nucleation and growth of copper on RuTa seeded substrate for direct copper plating Electrochimica Acta. 127: 315-326. DOI: 10.1016/j.electacta.2014.02.052 |
0.405 |
|
2013 |
Armini S, El-Mekki Z, Nagar M, Radisic A, Ruythooren W, Vereecken PM. Wafer scale copper direct plating on thin PVD RuTa layers: A route to enable filling 30 nm features and below? Ecs Transactions. 58: 3-15. DOI: 10.1149/05817.0003ecst |
0.323 |
|
2013 |
Nagar M, Radisic A, Strubbe K, Vereecken PM. The effect of cupric ion concentration on the nucleation and growth of copper on RuTa seeded substrates Electrochimica Acta. 92: 474-483. DOI: 10.1016/j.electacta.2013.01.037 |
0.445 |
|
2012 |
Nagar M, Radisic A, Strubbe K, Vereecken PM. Nucleation and growth of copper on Ru-based substrates: II. The effect of the suppressor additive Ecs Transactions. 41: 99-110. DOI: 10.1149/1.3699384 |
0.336 |
|
2012 |
Nagar M, Vereecken PM, Strubbe K, Radisic A. Nucleation and growth of copper on ru-based substrates: I. The effect of the inorganic components Ecs Transactions. 41: 75-82. DOI: 10.1149/1.3699382 |
0.346 |
|
2011 |
Armini S, Demuynck S, El-Mekki Z, Swerts J, Nagar M, Radisic A, Heylen N, Beyer G, Leunissen L, Vereecken PM. Direct copper electrochemical deposition on Ru-based substrates for advanced interconnects target 30 nm and 1/2 pitch lines: From coupon to full-wafer experiments Ecs Transactions. 35: 117-123. DOI: 10.1149/1.3568853 |
0.323 |
|
2011 |
Guo L, Oskam G, Radisic A, Hoffmann PM, Searson PC. Island growth in electrodeposition Journal of Physics D: Applied Physics. 44. DOI: 10.1088/0022-3727/44/44/443001 |
0.698 |
|
2011 |
Armini S, Tokei Z, Volders H, El-Mekki Z, Radisic A, Beyer G, Ruythooren W, Vereecken PM. Impact of "terminal effect" on Cu electrochemical deposition: Filling capability for different metallization options Microelectronic Engineering. 88: 754-759. DOI: 10.1016/j.mee.2010.08.013 |
0.304 |
|
2010 |
Armini S, Wilson CJ, Moussa A, Franquet A, Vanstreels K, Atanasova T, Radisic A, Civale Y, Redolfi A, Van Ammel A, El-Mekki Z, Bryce G, Ruythooren W. Seed-less copper electrochemical deposition on PVD resistive substrates as a replacement/enhancement for PVD Cu seed layers in HAR TSVs Ecs Transactions. 28: 77-87. DOI: 10.1149/1.3502446 |
0.339 |
|
2010 |
Nagar M, Vereecken PM, Radisic A, Strubbe K. Tailoring copper island density for copper plating on a RuTa substrate Ecs Transactions. 28: 9-16. DOI: 10.1149/1.3502439 |
0.403 |
|
2010 |
Radisic A, Nagar M, Strubbe K, Armini S, El-Mekki Z, Volders H, Ruythooren W, Vereecken PM. Copper plating on resistive substrates, diffusion barrier and alternative seed layers Ecs Transactions. 25: 175-184. DOI: 10.1149/1.3318516 |
0.31 |
|
2010 |
Luhn O, Radisic A, Van Hoof C, Ruythooren W, Celis JP. Monitoring the superfilling of blind holes with electrodeposited copper Journal of the Electrochemical Society. 157. DOI: 10.1149/1.3301623 |
0.314 |
|
2009 |
Lühn O, Radisic A, Vereecken PM, Van Hoof C, Ruythooren W, Celis JP. Changing superfilling mode for copper electrodeposition in blind holes from differential inhibition to differential acceleration Electrochemical and Solid-State Letters. 12. DOI: 10.1149/1.3087790 |
0.31 |
|
2008 |
Radisic A, Boelen P, Rosenfeld A, Hernandez JL, Beyer GP, Vereecken PM. Electrochemical nucleation and growth of copper on resistive substrates Ecs Transactions. 11: 25-33. DOI: 10.1149/1.2931339 |
0.408 |
|
2008 |
Lühn O, Radisic A, Vereecken PM, Swinnen B, Van Hoof C, Ruythooren W, Celis JP. Reducing the electrodeposition time for filling microvias with copper for 3D technology Proceedings - Electronic Components and Technology Conference. 866-870. DOI: 10.1109/ECTC.2008.4550078 |
0.338 |
|
2007 |
Radisic A, Hernandez JL, Tokei Z, Beyer GP, Vereecken PM. Electrochemical deposition of manganese and copper-manganese alloy on silicon Ecs Transactions. 3: 69-76. DOI: 10.1149/1.2721519 |
0.351 |
|
2006 |
Nikolov V, Radisic A, Hristova K, Searson PC. Bias-dependent admittance in hybrid bilayer membranes. Langmuir : the Acs Journal of Surfaces and Colloids. 22: 7156-8. PMID 16893210 DOI: 10.1021/La061562K |
0.446 |
|
2006 |
Radisic A, Ross FM, Searson PC. In situ study of the growth kinetics of individual island electrodeposition of copper. The Journal of Physical Chemistry. B. 110: 7862-8. PMID 16610883 DOI: 10.1021/jp057549a |
0.618 |
|
2006 |
Radisic A, Vereecken PM, Hannon JB, Searson PC, Ross FM. Quantifying electrochemical nucleation and growth of nanoscale clusters using real-time kinetic data. Nano Letters. 6: 238-42. PMID 16464042 DOI: 10.1021/Nl052175I |
0.602 |
|
2006 |
Guo L, Radisic A, Searson PC. Electrodeposition of copper on oxidized ruthenium Journal of the Electrochemical Society. 153. DOI: 10.1149/1.2354454 |
0.687 |
|
2006 |
Drews TO, Radisic A, Erlebacher J, Braatz RD, Searson PC, Alkire RC. Stochastic simulation of the early stages of kinetically limited electrodeposition Journal of the Electrochemical Society. 153. DOI: 10.1149/1.2191167 |
0.582 |
|
2006 |
Pesika NS, Radisic A, Stebe KJ, Searson PC. Fabrication of complex architectures using electrodeposition into patterned self-assembled monolayers Nano Letters. 6: 1023-1026. DOI: 10.1021/Nl060368F |
0.609 |
|
2006 |
Radisic A, Vereecken PM, Searson PC, Ross FM. The morphology and nucleation kinetics of copper islands during electrodeposition Surface Science. 600: 1817-1826. DOI: 10.1016/J.Susc.2006.02.025 |
0.597 |
|
2005 |
Guo L, Radisic A, Searson PC. Kinetic Monte Carlo simulations of nucleation and growth in electrodeposition. The Journal of Physical Chemistry. B. 109: 24008-15. PMID 16375391 DOI: 10.1021/Jp055077U |
0.666 |
|
2004 |
Radisic A, Oskam G, Searson PC. Influence of oxide thickness on nucleation and growth of copper on tantalum Journal of the Electrochemical Society. 151. DOI: 10.1149/1.1738673 |
0.605 |
|
2003 |
Radisic A, Cao Y, Taephaisitphongse P, West AC, Searson PC. Direct copper electrodeposition on TaN barrier layers Journal of the Electrochemical Society. 150. DOI: 10.1149/1.1565137 |
0.638 |
|
2002 |
Radisic A, West AC, Searson PC. Influence of additives on nucleation and growth of copper on n-Si(111) from acidic sulfate solutions Journal of the Electrochemical Society. 149. DOI: 10.1149/1.1430719 |
0.654 |
|
2001 |
Radisic A, Long JG, Hoffmann PM, Searson PC. Nucleation and growth of copper on TiN from pyrophosphate solution Journal of the Electrochemical Society. 148. DOI: 10.1149/1.1344539 |
0.686 |
|
2000 |
Hoffmann PM, Radisic A, Searson PC. Growth kinetics for copper deposition on Si(100) from pyrophosphate solution Journal of the Electrochemical Society. 147: 2576-2580. DOI: 10.1149/1.1393571 |
0.689 |
|
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