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Mark J. Willey, Ph.D. - Publications

Affiliations: 
2007 Columbia University, New York, NY 
Area:
Chemical Engineering
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11 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2011 Hatch JJ, Willey MJ, Gewirth AA. Influence of aromatic functionality on quaternary ammonium levelers for Cu plating Journal of the Electrochemical Society. 158: D323-D329. DOI: 10.1149/1.3575636  0.478
2009 Gallaway JW, Willey MJ, West AC. Copper filling of 100 nm trenches using PEG, PPG, and a triblock copolymer as plating suppressors Journal of the Electrochemical Society. 156. DOI: 10.1149/1.3142422  0.587
2009 Gallaway JW, Willey MJ, West AC. Acceleration kinetics of PEG, PPG, and a triblock copolymer by SPS during copper electroplating Journal of the Electrochemical Society. 156. DOI: 10.1149/1.3078405  0.617
2009 Willey MJ, McInerney EJ. Adsorption and Desorption Kinetics of a Block Copolymer Wetting Agent Used in Copper Electroplating Journal of the Electrochemical Society. 156. DOI: 10.1149/1.3058600  0.42
2008 Willey MJ, Emekli U, West AC. Uniformity effects when electrodepositing Cu onto resistive substrates in the presence of organic additives Journal of the Electrochemical Society. 155. DOI: 10.1149/1.2837857  0.53
2007 Willey MJ, Reid J, West AC. Adsorption kinetics of polyvinylpyrrolidone during copper electrodeposition Electrochemical and Solid-State Letters. 10. DOI: 10.1149/1.2436653  0.67
2007 Willey MJ, West AC. SPS adsorption and desorption during copper electrodeposition and its impact on PEG adsorption Journal of the Electrochemical Society. 154. DOI: 10.1149/1.2431320  0.616
2007 Willey MJ, West AC. Nucleation on resistive substrates: Analysis of effect on film uniformity Electrochimica Acta. 52: 6484-6489. DOI: 10.1016/J.Electacta.2007.04.049  0.656
2006 Willey MJ, West AC. Microfluidic studies of adsorption and desorption of polyethylene glycol during copper electrodeposition Journal of the Electrochemical Society. 153. DOI: 10.1149/1.2335587  0.612
2006 Willey MJ, West AC. A microfluidic device to measure electrode response to changes in electrolyte composition Electrochemical and Solid-State Letters. 9. DOI: 10.1149/1.2201253  0.597
2005 Zheng M, Willey M, West AC. Electrochemical nucleation of copper on ruthenium effect of Cl -, PEG, and SPS Electrochemical and Solid-State Letters. 8. DOI: 10.1149/1.2035701  0.64
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