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Takahito Ono - Publications

Affiliations: 
Tohoku University, Sendai-shi, Miyagi-ken, Japan 
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204 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2020 Van Toan N, Tuoi TTK, Tsai YC, Lin YC, Ono T. Micro-Fabricated Presure Sensor Using 50 nm-Thick of Pd-Based Metallic Glass Freestanding Membrane. Scientific Reports. 10: 10108. PMID 32572097 DOI: 10.1038/S41598-020-67150-Y  0.35
2020 Li Y, Toan NV, Wang Z, Samat KF, Ono T. Thermoelectrical properties of silicon substrates with nanopores synthesized by metal-assisted chemical etching. Nanotechnology. PMID 32365347 DOI: 10.1088/1361-6528/Ab8Fe1  0.413
2020 Wang Z, Chen Y, Lin Y, Ono T, Lin M, Tsai Y. Electrostatic metallic glass micro-mirror fabricated by the self-aligned structures Japanese Journal of Applied Physics. 59: SIIL02. DOI: 10.35848/1347-4065/Ab7477  0.308
2020 Enju J, Trung NH, Fadzli SK, Chen P, Ono T. Design and Fabrication of On-Chip Micro-Thermoelectric Cooler Based on Electrodeposition Process Ieej Transactions On Sensors and Micromachines. 140: 18-23. DOI: 10.1541/Ieejsmas.140.18  0.314
2020 Wang Z, Kimura M, Inomata N, Li J, Ono T. Compact Micro Thermal Sensor Based on Silicon Thermocouple Junction and Suspended Fluidic Channel Ieee Sensors Journal. 20: 11122-11127. DOI: 10.1109/Jsen.2020.2997926  0.361
2020 Toda M, Nakamura T, Inomata N, Toan NV, Ono T. Bridged resonator based on assembled Si thin wire Journal of Micromechanics and Microengineering. 30: 105015. DOI: 10.1088/1361-6439/Aba6Cc  0.341
2020 Van Toan N, Kim Tuoi TT, Li J, Inomata N, Ono T. Liquid and solid states on-chip micro-supercapacitors using silicon nanowire-graphene nanowall-pani electrode based on microfabrication technology Materials Research Bulletin. 131: 110977. DOI: 10.1016/J.Materresbull.2020.110977  0.347
2020 Van Toan N, Tuoi TTK, Ono T. Thermoelectric generators for heat harvesting: From material synthesis to device fabrication Energy Conversion and Management. 225: 113442. DOI: 10.1016/J.Enconman.2020.113442  0.339
2020 Toda M, Li C, Toan NV, Tsai Y, Lin Y, Ono T. Torsional resonator of Pd–Si–Cu metallic glass with a low rotational spring constant Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems. 1-7. DOI: 10.1007/S00542-020-04996-2  0.34
2019 Nishino H, Hara M, Yano Y, Toda M, Kanamori Y, Kajita M, Ido T, Ono T. A reflection-type vapor cell using anisotropic etching of silicon for micro atomic clocks Applied Physics Express. 12: 072012. DOI: 10.7567/1882-0786/Ab2A3C  0.356
2019 Ou C, Lin Y, Keikoin Y, Ono T, Esashi M, Tsai Y. Two-dimensional MEMS Fe-based metallic glass micromirror driven by an electromagnetic actuator Japanese Journal of Applied Physics. 58: SDDL01. DOI: 10.7567/1347-4065/Ab0493  0.488
2019 Wang Z, Kimura M, Toda M, Ono T. Silicon-Based Micro Calorimeter With Single Thermocouple Structure for Thermal Characterization Ieee Electron Device Letters. 40: 1198-1200. DOI: 10.1109/Led.2019.2918238  0.404
2019 Zhu M, Inomata N, Adachi N, Sakurai A, Nomura M, Ono T. High-Gauge Factor Strain Sensor Based on Piezoelectric Aluminum Nitride Coupled to MOSFET Ieee Sensors Journal. 19: 3626-3632. DOI: 10.1109/Jsen.2019.2895267  0.308
2019 Zhu M, Sakamoto K, Li J, Inomata N, Toda M, Ono T. Piezoresistive strain sensor based on monolayer molybdenum disulfide continuous film deposited by chemical vapor deposition Journal of Micromechanics and Microengineering. 29: 055002. DOI: 10.1088/1361-6439/Ab0726  0.32
2019 Van Toan N, Hasnan MMIM, Udagawa D, Inomata N, Toda M, Said SM, Sabri MFM, Ono T. Thermoelectric power battery using al2o3 nanochannels of 10 nm diameter for energy harvesting of low-grade waste heat Energy Conversion and Management. 199: 111979. DOI: 10.1016/J.Enconman.2019.111979  0.312
2019 Inomata N, Kamakura K, Van Toan N, Ono T. Fabrication of on‐chip vacuum pump using a silicon nanostructure by metal‐assisted chemical etching Ieej Transactions On Electrical and Electronic Engineering. 14: 954-958. DOI: 10.1002/Tee.22887  0.397
2019 Van Toan N, Wang X, Inomata N, Toda M, Voiculescu I, Ono T. Low Cost and High‐Aspect Ratio Micro/Nano Device Fabrication by Using Innovative Metal‐Assisted Chemical Etching Method Advanced Engineering Materials. 21: 1900490. DOI: 10.1002/Adem.201900490  0.316
2018 Voiculescu I, Toda M, Inomata N, Ono T, Li F. Nano and Microsensors for Mammalian Cell Studies. Micromachines. 9. PMID 30424372 DOI: 10.3390/Mi9090439  0.354
2018 Hara M, Yano Y, Kajita M, Nishino H, Ibata Y, Toda M, Hara S, Kasamatsu A, Ito H, Ono T, Ido T. Microwave oscillator using piezoelectric thin-film resonator aiming for ultraminiaturization of atomic clock. The Review of Scientific Instruments. 89: 105002. PMID 30399742 DOI: 10.1063/1.5048633  0.314
2018 Van Toan N, Inomata N, Toda M, Ono T. Ion transport by gating voltage to nanopores produced via metal-assisted chemical etching method. Nanotechnology. 29: 195301. PMID 29473829 DOI: 10.1088/1361-6528/Aab1D3  0.335
2018 Van Toan N, Inomata N, Trung NH, Ono T. Knudsen pump produced via silicon deep RIE, thermal oxidation, and anodic bonding processes for on-chip vacuum pumping Journal of Micromechanics and Microengineering. 28: 055001. DOI: 10.1088/1361-6439/Aaae26  0.369
2018 Wang Z, Kimura M, Ono T. Manufacturing and characterization of simple cantilever thermal biosensor with Si-Metal thermocouple structure for enzymatic reaction detection Thermochimica Acta. 668: 110-115. DOI: 10.1016/J.Tca.2018.08.020  0.359
2018 Voiculescu I, Liao M, Zakerin M, Berger R, Ono T, Toda M. Pico-thermogravimetric material properties analysis using diamond cantilever beam Sensors and Actuators a: Physical. 271: 356-363. DOI: 10.1016/J.Sna.2018.01.004  0.338
2018 Li J, Zhu M, An Z, Wang Z, Toda M, Ono T. Constructing in-chip micro-supercapacitors of 3D graphene nanowall/ruthenium oxides electrode through silicon-based microfabrication technique Journal of Power Sources. 401: 204-212. DOI: 10.1016/J.Jpowsour.2018.08.099  0.358
2018 Inomata N, Suwa W, Van Toan N, Toda M, Ono T. Resonant magnetic sensor using concentration of magnetic field gradient by asymmetric permalloy plates Microsystem Technologies. 25: 3983-3989. DOI: 10.1007/S00542-018-4257-8  0.312
2018 Wang Z, Kimura M, Ono T. The effect of increasing interfacial strength in micro fluidic system for heat detection with micro-sandglass shaped interlocks Microsystem Technologies. 25: 633-640. DOI: 10.1007/S00542-018-3990-3  0.368
2017 Toan NV, Shimazaki T, Inomata N, Song Y, Ono T. Design and Fabrication of Capacitive Silicon Nanomechanical Resonators with Selective Vibration of a High-Order Mode. Micromachines. 8. PMID 30400502 DOI: 10.3390/Mi8100312  0.351
2017 Van Toan N, Ono T. Progress in performance enhancement methods for capacitive silicon resonators Japanese Journal of Applied Physics. 56: 110101. DOI: 10.7567/Jjap.56.110101  0.356
2017 Inomata N, Ono T. Geometry dependence of temperature coefficient of resonant frequency in highly sensitive resonant thermal sensors Japanese Journal of Applied Physics. 56: 087201. DOI: 10.7567/Jjap.56.087201  0.324
2017 Van Toan N, Toda M, Ono T. High Aspect Ratio Silicon Structures Produced via Metal-Assisted Chemical Etching and Assembly Technology for Cantilever Fabrication Ieee Transactions On Nanotechnology. 16: 567-573. DOI: 10.1109/Tnano.2016.2645781  0.401
2017 Zhu M, Toda M, Ono T. Fabrication of an Assembled Scanning Probe With Nitrogen Vacancy Centers in Diamond Particle Ieee Transactions On Nanotechnology. 16: 545-550. DOI: 10.1109/Tnano.2016.2640191  0.38
2017 Trung NH, Van Toan N, Ono T. Fabrication ofπ-type flexible thermoelectric generators using an electrochemical deposition method for thermal energy harvesting applications at room temperature Journal of Micromechanics and Microengineering. 27: 125006. DOI: 10.1088/1361-6439/Aa8F16  0.329
2017 Zhu M, Li J, Toda M, Ono T. Microfabrication of a scanning probe with NV centers in a selectively grown diamond thin film through a xenon difluoride etching process Journal of Micromechanics and Microengineering. 27: 125007. DOI: 10.1088/1361-6439/Aa8F12  0.34
2017 Kikuchi A, Yao A, Mori I, Ono T, Samukawa S. Composite films of highly ordered Si nanowires embedded in SiGe0.3 for thermoelectric applications Journal of Applied Physics. 122: 165302. DOI: 10.1063/1.4986355  0.392
2017 Seo Y, Harii K, Takahashi R, Chudo H, Oyanagi K, Qiu Z, Ono T, Shiomi Y, Saitoh E. Fabrication and magnetic control of Y3Fe5O12 cantilevers Applied Physics Letters. 110: 132409. DOI: 10.1063/1.4979553  0.33
2017 Kikuchi A, Yao A, Mori I, Ono T, Samukawa S. Extremely low thermal conductivity of high density and ordered 10 nm-diameter silicon nanowires array Applied Physics Letters. 110: 091908. DOI: 10.1063/1.4977778  0.343
2017 Van Toan N, Van Nha N, Song Y, Ono T. Fabrication and evaluation of capacitive silicon resonators with piezoresistive heat engines Sensors and Actuators a: Physical. 262: 99-107. DOI: 10.1016/J.Sna.2017.05.031  0.379
2017 Inomata N, Van Toan N, Ono T. Piezoresistive property of an aluminum-doped zinc oxide thin film deposited via atomic-layer deposition for microelectromechanical system/nanoelectromenchanical system applications Ieej Transactions On Electrical and Electronic Engineering. 12: S120-S124. DOI: 10.1002/Tee.22570  0.357
2017 Toda M, Inomata N, Ono T, Voiculescu I. Cantilever beam temperature sensors for biological applications Ieej Transactions On Electrical and Electronic Engineering. 12: 153-160. DOI: 10.1002/Tee.22360  0.354
2017 Van Toan N, Toda M, Hokama T, Ono T. Cantilever with High Aspect Ratio Nanopillars on Its Top Surface for Moisture Detection in Electronic Products Advanced Engineering Materials. 19: 1700203. DOI: 10.1002/Adem.201700203  0.352
2016 Van Toan N, Toda M, Ono T. An Investigation of Processes for Glass Micromachining. Micromachines. 7. PMID 30407424 DOI: 10.3390/Mi7030051  0.358
2016 Toan NV, Hahng S, Song Y, Ono T. Fabrication of Vacuum-Sealed Capacitive Micromachined Ultrasonic Transducer Arrays Using Glass Reflow Process. Micromachines. 7. PMID 30404250 DOI: 10.3390/Mi7050076  0.414
2016 Inomata N, Toda M, Ono T. Highly sensitive thermometer using a vacuum-packed Si resonator in a microfluidic chip for the thermal measurement of single cells. Lab On a Chip. 16: 3597-603. PMID 27526966 DOI: 10.1039/C6Lc00949B  0.36
2016 Inomata N, Pan L, Toda M, Ono T. Temperature-depended mechanical properties of microfabricated vanadium oxide mechanical resonators for thermal sensing Japanese Journal of Applied Physics. 55. DOI: 10.7567/Jjap.55.037201  0.358
2016 Yamada T, Inomata N, Ono T. Sensitive thermal microsensor with pn junction for heat measurement of a single cell Japanese Journal of Applied Physics. 55. DOI: 10.7567/Jjap.55.027001  0.323
2016 Van Toan N, Sangu S, Ono T. High Aspect Ratio SiO2 Pillar Structures Capable of the Integration of an Image Sensor for Application of Optical Modulator Ieej Transactions On Sensors and Micromachines. 136: 41-42. DOI: 10.1541/Ieejsmas.136.41  0.309
2016 Xue G, Toda M, Ono T. Comb-Drive XYZ-microstage With Large Displacements Based on Chip-Level Microassembly Journal of Microelectromechanical Systems. 25: 989-998. DOI: 10.1109/Jmems.2016.2607233  0.345
2016 Toan NV, Sangu S, Ono T. Fabrication of High Aspect Ratio SiO2and Tempax Glass Pillar Structures and Its Application for Optical Modulator Device Journal of Microelectromechanical Systems. 25: 668-674. DOI: 10.1109/Jmems.2016.2581184  0.35
2016 Van Toan N, Sangu S, Ono T. Design and fabrication of a large area freestanding compressive stress SiO2optical window Journal of Micromechanics and Microengineering. 26: 075016. DOI: 10.1088/0960-1317/26/7/075016  0.356
2016 Van Toan N, Sangu S, Ono T. Glass reflow process for microsystem applications Journal of Micromechanics and Microengineering. 26: 115018. DOI: 10.1088/0960-1317/26/11/115018  0.383
2016 Li J, Zhu M, Wang Z, Ono T. Engineering micro-supercapacitors of graphene nanowalls/Ni heterostructure based on microfabrication technology Applied Physics Letters. 109: 153901. DOI: 10.1063/1.4964787  0.305
2016 Van Toan N, Shimazaki T, Ono T. Single and mechanically coupled capacitive silicon nanomechanical resonators Micro & Nano Letters. 11: 591-594. DOI: 10.1049/Mnl.2016.0265  0.411
2016 Voiculescu I, Liu F, Ono T, Toda M. Investigation of bimaterial cantilever beam for heat sensing in liquid Sensors and Actuators, a: Physical. 242: 58-66. DOI: 10.1016/J.Sna.2015.11.030  0.309
2016 Inomata N, Pan L, Wang Z, Kimura M, Ono T. Vanadium oxide thermal microsensor integrated in a microfluidic chip for detecting cholesterol and glucose concentrations Microsystem Technologies. 1-7. DOI: 10.1007/S00542-016-3090-1  0.31
2016 Inomata N, Saito K, Ono T. Q factor enhancement of Si resonator by nonlinear damping Microsystem Technologies. 23: 1201-1205. DOI: 10.1007/S00542-016-2827-1  0.34
2016 van Toan N, Sangu S, Saito T, Inomata N, Ono T. Fabrication of a SiO2 optical window for controlling light transmission Microsystem Technologies. 1-9. DOI: 10.1007/S00542-016-2826-2  0.341
2015 An Z, He L, Toda M, Yamamoto G, Hashida T, Ono T. Microstructuring of carbon nanotubes-nickel nanocomposite. Nanotechnology. 26: 195601. PMID 25900535 DOI: 10.1088/0957-4484/26/19/195601  0.327
2015 Kawai Y, Kotani K, Shao C, Ono T. Micro-Assembly of Electrostatically driven Scanning Force Microscopy Probe using Clip Mechanism Ieej Transactions On Sensors and Micromachines. 135: 98-102. DOI: 10.1541/Ieejsmas.135.98  0.314
2015 Sabri MFM, Ono T, Said SM, Kawai Y, Esashi M. Fabrication and characterization of microstacked PZT actuator for MEMS applications Journal of Microelectromechanical Systems. 24: 80-90. DOI: 10.1109/Jmems.2014.2317495  0.531
2015 Seo YJ, Toda M, Ono T. Si nanowire probe with Nd-Fe-B magnet for attonewton-scale force detection Journal of Micromechanics and Microengineering. 25. DOI: 10.1088/0960-1317/25/4/045015  0.391
2015 Van Toan N, Sangu S, Inomata N, Ono T. Glass capillaries based on a glass reflow into nano-trench for controlling light transmission Microsystem Technologies. 22: 2835-2840. DOI: 10.1007/S00542-015-2607-3  0.331
2015 Belbachir RY, An Z, Ono T. Impact of thermal contact resistances on micro-gap heat losses for microthermionic power generators Microsystem Technologies. DOI: 10.1007/S00542-015-2591-7  0.309
2015 Lin YC, Tsai YC, Ono T, Liu P, Esashi M, Gessner T, Chen M. Metallic Glass as a Mechanical Material for Microscanners Advanced Functional Materials. 25: 5677-5682. DOI: 10.1002/Adfm.201502456  0.536
2014 Chiou MJ, Lin YC, Ono T, Esashi M, Yeh SL, Wu TT. Focusing and waveguiding of Lamb waves in micro-fabricated piezoelectric phononic plates. Ultrasonics. 54: 1984-90. PMID 24909597 DOI: 10.1016/J.Ultras.2014.05.007  0.502
2014 Mitsui Y, Ono T. Nonlinear Coupled Silicon Resonator with Binary Vibration Ieej Transactions On Sensors and Micromachines. 134: 270-275. DOI: 10.1541/Ieejsmas.134.270  0.312
2014 Toan NV, Toda M, Kawai Y, Ono T. A long bar type silicon resonator with a high quality factor Ieej Transactions On Sensors and Micromachines. 134: 26-31+2. DOI: 10.1541/Ieejsmas.134.26  0.404
2014 Seo YJ, Toda M, Kawai Y, Ono T. Fabrication of silicon nanowire probe with magnet for magnetic resonance force microscopy Ieej Transactions On Sensors and Micromachines. 134: 166-167. DOI: 10.1541/Ieejsmas.134.166  0.355
2014 Wu T, Chiou M, Lin Y, Ono T. Design and fabrication of a gradient-index phononic quartz plate lens Proceedings of Spie. 8994. DOI: 10.1117/12.2047881  0.32
2014 Kobayashi M, Miyashita H, Inomata N, Ono T. Synthesis of cubic boron nitride films on Si tips via chemical vapor deposition and the field emission properties Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 32: 02B102. DOI: 10.1116/1.4843075  0.321
2014 Belbachir RY, An Z, Ono T. Thermal investigation of a micro-gap thermionic power generator Journal of Micromechanics and Microengineering. 24: 085009. DOI: 10.1088/0960-1317/24/8/085009  0.313
2014 Toan NV, Kubota T, Sekhar H, Samukawa S, Ono T. Mechanical quality factor enhancement in a silicon micromechanical resonator by low-damage process using neutral beam etching technology Journal of Micromechanics and Microengineering. 24: 085005. DOI: 10.1088/0960-1317/24/8/085005  0.41
2014 Ono T, Tanno K, Kawai Y. Synchronized micromechanical resonators with a nonlinear coupling element Journal of Micromechanics and Microengineering. 24: 025012. DOI: 10.1088/0960-1317/24/2/025012  0.329
2014 Toan NV, Toda M, Kawai Y, Ono T. A capacitive silicon resonator with a movable electrode structure for gap width reduction Journal of Micromechanics and Microengineering. 24. DOI: 10.1088/0960-1317/24/2/025006  0.371
2014 Liu T, Tsai Y, Lin Y, Ono T, Tanaka S, Wu T. Design and fabrication of a phononic-crystal-based Love wave resonator in GHz range Aip Advances. 4: 124201. DOI: 10.1063/1.4902018  0.369
2014 Liu T, Lin Y, Tsai Y, Ono T, Tanaka S, Wu T. Evidence of a Love wave bandgap in a quartz substrate coated with a phononic thin layer Applied Physics Letters. 104: 181905. DOI: 10.1063/1.4875981  0.305
2014 Toda M, Yokoyama A, Van Toan N, Inomata N, Ono T. Fabrication of nano-gap structures based on plastic deformation of strained Si springs by stiction effects Microsystem Technologies. 21: 649-654. DOI: 10.1007/S00542-014-2182-Z  0.366
2014 He L, Toda M, Kawai Y, Miyashita H, Omori M, Hashida T, Berger R, Ono T. Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis Microsystem Technologies. 20: 201-208. DOI: 10.1007/S00542-013-1771-6  0.325
2013 Tanaka Y, Miyashita H, Esashi M, Ono T. An optically switchable emitter array with carbon nanotubes grown on a Si tip for multielectron beam lithography. Nanotechnology. 24: 015203. PMID 23221318 DOI: 10.1088/0957-4484/24/1/015203  0.54
2013 Inomata N, Ono T. Thermal Sensor Probe with a Si Resonator in a Cavity for Thermal Insulation Japanese Journal of Applied Physics. 52: 117201. DOI: 10.7567/Jjap.52.117201  0.366
2013 Wada A, Yanagisawa Y, Altansukh B, Kubota T, Ono T, Yamasaki S, Samukawa S. Energy-loss mechanism of single-crystal silicon microcantilever due to surface defects generated during plasma processing Journal of Micromechanics and Microengineering. 23: 065020. DOI: 10.1088/0960-1317/23/6/065020  0.315
2013 Van Toan N, Miyashita H, Toda M, Kawai Y, Ono T. Fabrication of an hermetically packaged silicon resonator on LTCC substrate Microsystem Technologies. 19: 1165-1175. DOI: 10.1007/S00542-012-1716-5  0.423
2013 Toda M, Otake T, Miyashita H, Kawai Y, Ono T. Suspended bimaterial microchannel resonators for thermal sensing of local heat generation in liquid Microsystem Technologies. 19: 1049-1054. DOI: 10.1007/S00542-012-1698-3  0.363
2012 Minh PN, Ono T, Tanaka S, Esashi M. Near-field optical apertured tip and modified structures for local field enhancement. Applied Optics. 40: 2479-84. PMID 18357258 DOI: 10.1364/Ao.40.002479  0.519
2012 He L, Toda M, Kawai Y, Sarbi MF, Omori M, Hashida T, Ono T. Fabrication of a Si-PZT Hybrid XY-Microstage with CNT-Carbon Hinges Ieej Transactions On Sensors and Micromachines. 132: 425-426. DOI: 10.1541/Ieejsmas.132.425  0.337
2012 An Z, Esashi M, Ono T. Piezoresistive Silicon Microresonator for Measurements of Hydrogen Adsorption in Carbon Nanotubes Japanese Journal of Applied Physics. 51: 116601. DOI: 10.1143/Jjap.51.116601  0.484
2012 Yabe T, Mimura Y, Takahashi H, Onoe A, Muroga S, Yamaguchi M, Ono T, Esashi M. Three-dimensional microcoil oscillator fabricated with monolithic process on LSI Electronics and Communications in Japan. 95: 49-56. DOI: 10.1002/Ecj.11404  0.522
2011 Yoshida S, Ono T, Esashi M. Local electrical modification of a conductivity-switching polyimide film formed by molecular layer deposition. Nanotechnology. 22: 335302. PMID 21788684 DOI: 10.1088/0957-4484/22/33/335302  0.482
2011 Yabe T, Mimura Y, Takahashi H, Onoe A, Muroga S, Yamaguchi M, Ono T, Esashi M. Three-dimensional micro-coil oscillator fabricated with monolithic process on LSI Ieej Transactions On Sensors and Micromachines. 131: 363-368. DOI: 10.1541/Ieejsmas.131.363  0.533
2011 Jiang Y, Esashi M, Ono T. Design Issues for Piezoresistive Nanocantilever Sensors with Non-uniform Nanoscale Doping Profiles Ieej Transactions On Sensors and Micromachines. 131: 270-271. DOI: 10.1541/Ieejsmas.131.270  0.469
2011 Jiang Y, Esashi M, Ono T. Modeling and Experimental Analysis on the Nonlinearity of Single Crystal Silicon Cantilevered Microstructures Ieej Transactions On Sensors and Micromachines. 131: 195-196. DOI: 10.1541/Ieejsmas.131.195  0.456
2011 Miyashita H, Tomono E, Kawai Y, Toda M, Esashi M, Ono T. Fabrication of Einzel Lens Array with One-Mask Reactive Ion Etching Process for Electron Micro-Optics Japanese Journal of Applied Physics. 50: 106503. DOI: 10.1143/Jjap.50.106503  0.534
2011 Lee Y, Toda M, Esashi M, Ono T. Micro wishbone interferometer for Fourier transform infrared spectrometry Journal of Micromechanics and Microengineering. 21: 065039. DOI: 10.1088/0960-1317/21/6/065039  0.536
2010 Takahashi A, Esashi M, Ono T. Quartz-crystal scanning probe microcantilevers with a silicon tip based on direct bonding of silicon and quartz. Nanotechnology. 21: 405502. PMID 20829565 DOI: 10.1088/0957-4484/21/40/405502  0.559
2010 Shao CY, Kawai Y, Esashi M, Ono T. Electrostatic actuator probe with curved electrodes for time-of-flight scanning force microscopy. The Review of Scientific Instruments. 81: 083702. PMID 20815608 DOI: 10.1063/1.3469796  0.526
2010 Toda M, Ono T, Liu F, Voiculescu I. Evaluation of bimaterial cantilever beam for heat sensing at atmospheric pressure. The Review of Scientific Instruments. 81: 055104. PMID 20515169 DOI: 10.1063/1.3397320  0.307
2010 Shao C, Kawai Y, Esashi M, Ono T. Electrostatically Switchable Microprobe for Mass-Analysis Scanning Force Microscopy Ieej Transactions On Sensors and Micromachines. 130: 59-60. DOI: 10.1541/Ieejsmas.130.59  0.461
2010 Lee Y, Toda M, Esashi M, Ono T. Micro Wishbone Interferometer for Miniature FTIR Spectrometer Ieej Transactions On Sensors and Micromachines. 130: 333-334. DOI: 10.1541/Ieejsmas.130.333  0.543
2010 Tomura M, Huang C, Yoshida Y, Ono T, Yamasaki S, Samukawa S. Plasma-Induced Deterioration of Mechanical Characteristics of Microcantilever Japanese Journal of Applied Physics. 49: 04DL20. DOI: 10.1143/Jjap.49.04Dl20  0.307
2010 Feng J, Ye X, Esashi M, Ono T. Mechanically coupled synchronized resonators for resonant sensing applications Journal of Micromechanics and Microengineering. 20: 115001. DOI: 10.1088/0960-1317/20/11/115001  0.493
2010 Yoshida S, Ono T, Esashi M. Deposition of conductivity-switching polyimide film by molecular layer deposition and electrical modification using scanning probe microscope Micro & Nano Letters. 5: 321. DOI: 10.1049/Mnl.2010.0128  0.502
2009 Takahashi H, Mimura Y, Mori S, Ishimori M, Onoe A, Ono T, Esashi M. The fabrication of metallic tips with a silicon cantilever for probe-based ferroelectric data storage and their durability experiments. Nanotechnology. 20: 365201. PMID 19687555 DOI: 10.1088/0957-4484/20/36/365201  0.528
2009 Kim SJ, Ono T, Esashi M. Thermal imaging with tapping mode using a bimetal oscillator formed at the end of a cantilever. The Review of Scientific Instruments. 80: 033703. PMID 19334923 DOI: 10.1063/1.3095680  0.545
2009 Sabri MFM, Ono T, Esashi M. Microassembly of PZT Actuators into Silicon Microstructures Ieej Transactions On Sensors and Micromachines. 129: 471-472. DOI: 10.1541/Ieejsmas.129.471  0.564
2009 Wang DF, Nakajima M, Ono T, Esashi M. 504 Crystallographic orientations and thermal treatments influences on nanomechanics of ultra-thin single crystal silicon (SCS) resonators for ultimate sensing The Proceedings of Ibaraki District Conference. 2009: 125-126. DOI: 10.1299/jsmeibaraki.2009.125  0.441
2009 Sabri MFM, Ono T, Esashi M. Modeling and experimental validation of the performance of a silicon XY-microstage driven by PZT actuators Journal of Micromechanics and Microengineering. 19: 095004. DOI: 10.1088/0960-1317/19/9/095004  0.545
2009 Jiang Y, Ono T, Esashi M. Temperature-dependent mechanical and electrical properties of boron-doped piezoresistive nanocantilevers Journal of Micromechanics and Microengineering. 19: 065030. DOI: 10.1088/0960-1317/19/6/065030  0.504
2008 Yoshida S, Ono T, Esashi M. Conductive polymer patterned media fabricated by diblock copolymer lithography for scanning multiprobe data storage. Nanotechnology. 19: 475302. PMID 21836269 DOI: 10.1088/0957-4484/19/47/475302  0.495
2008 Ho J, Ono T, Tsai CH, Esashi M. Photolithographic fabrication of gated self-aligned parallel electron beam emitters with a single-stranded carbon nanotube. Nanotechnology. 19: 365601. PMID 21828872 DOI: 10.1088/0957-4484/19/36/365601  0.546
2008 Yoshida S, Ono T, Esashi M. Formation of a Flat Conductive Polymer Film Using Template-Stripped Gold (TSG) Surface and Surface-Graft Polymerization for Scanning Multiprobe Data Storage E-Journal of Surface Science and Nanotechnology. 6: 202-208. DOI: 10.1380/Ejssnt.2008.202  0.474
2008 Iwami K, Ono T, Esashi M. A New Approach to Terahertz Local Spectroscopy Using Microfabricated Scanning Near-Field Probe Japanese Journal of Applied Physics. 47: 8095-8097. DOI: 10.1143/Jjap.47.8095  0.466
2008 Ono T, Yoshida Y, Jiang YG, Esashi M. Noise-enhanced sensing of light and magnetic force based on a nonlinear silicon microresonator Applied Physics Express. 1: 1230011-1230013. DOI: 10.1143/Apex.1.123001  0.488
2008 Seki H, Ono T, Kawai Y, Esashi M. Bonding of a Si microstructure using field-assisted glass melting Journal of Micromechanics and Microengineering. 18: 085003. DOI: 10.1088/0960-1317/18/8/085003  0.535
2008 Klein MJK, Ono T, Esashi M, Korvink JG. Process for the fabrication of hollow core solenoidal microcoils in borosilicate glass Journal of Micromechanics and Microengineering. 18: 075002. DOI: 10.1088/0960-1317/18/7/075002  0.553
2008 Jiang YG, Ono T, Esashi M. Fabrication of piezoresistive nanocantilevers for ultra-sensitive force detection Measurement Science and Technology. 19. DOI: 10.1088/0957-0233/19/8/084011  0.526
2008 Ahn Y, Ono T, Esashi M. Micromachined Si cantilever arrays for parallel AFM operation Journal of Mechanical Science and Technology. 22: 308-311. DOI: 10.1007/S12206-007-1029-2  0.533
2007 Kim SJ, Ono T, Esashi M. Mass detection using capacitive resonant silicon resonator employing LC resonant circuit technique. The Review of Scientific Instruments. 78: 085103. PMID 17764351 DOI: 10.1063/1.2766840  0.54
2007 Kawai Y, Ono T, Esashi M, Meyer E, Gerber C. Resonator combined with a piezoelectric actuator for chemical analysis by force microscopy. The Review of Scientific Instruments. 78: 063709. PMID 17614618 DOI: 10.1063/1.2748394  0.56
2007 Iwami K, Ono T, Esashi M. Sputter Deposited Zinc Oxide Photoconductive Antenna on Silicon Substrate for Sub-Terahertz Time-Domain Spectroscopy Ieej Transactions On Sensors and Micromachines. 127: 508-509. DOI: 10.1541/Ieejsmas.127.508  0.494
2007 Yoshida S, Ono T, Esashi M. Conductive polymer patterned media for scanning multiprobe data storage Nanotechnology. 18: 505302. DOI: 10.1088/0957-4484/18/50/505302  0.478
2007 Kim S, Ono T, Esashi M. Study on the noise of silicon capacitive resonant mass sensors in ambient atmosphere Journal of Applied Physics. 102: 104304. DOI: 10.1063/1.2811911  0.52
2007 Cho W, Ono T, Esashi M. Proximity electron lithography using permeable electron windows Applied Physics Letters. 91: 044104. DOI: 10.1063/1.2762281  0.472
2007 Ono T, Yoshida S, Kawai Y, Esashi M. Optical amplification of the resonance of a bimetal silicon cantilever Applied Physics Letters. 90: 243112. DOI: 10.1063/1.2748848  0.532
2007 Fujikawa Y, Yamada-Takamura Y, Yoshikawa G, Ono T, Esashi M, Zhang PP, Lagally MG, Sakurai T. Silicon on insulator for symmetry-converted growth Applied Physics Letters. 90. DOI: 10.1063/1.2748099  0.525
2007 Ono T, Kim S, Esashi M. Imaging of acoustic pressure radiation from vibrating microstructure in atmosphere using thermal microprobe Applied Physics Letters. 90: 211911. DOI: 10.1063/1.2742908  0.508
2007 Tsai C, Ono T, Esashi M. Fabrication of diamond Schottky emitter array by using electrophoresis pre-treatment and hot-filament chemical vapor deposition Diamond and Related Materials. 16: 1398-1402. DOI: 10.1016/J.Diamond.2006.11.032  0.551
2006 Takahashi H, Onoe A, Ono T, Cho Y, Esashi M. High-Density Ferroelectric Recording Using Diamond Probe by Scanning Nonlinear Dielectric Microscopy Japanese Journal of Applied Physics. 45: 1530-1533. DOI: 10.1143/Jjap.45.1530  0.535
2006 Iwami K, Ono T, Esashi M. Optical Near-Field Probe Integrated With Self-Aligned Bow-Tie Antenna and Electrostatic Actuator for Local Field Enhancement Journal of Microelectromechanical Systems. 15: 1201-1208. DOI: 10.1109/Jmems.2006.879694  0.529
2006 Takahashi H, Ono T, Onoe A, Cho Y, Esashi M. A diamond-tip probe with silicon-based piezoresistive strain gauge for high-density data storage using scanning nonlinear dielectric microscopy Journal of Micromechanics and Microengineering. 16: 1620-1624. DOI: 10.1088/0960-1317/16/8/025  0.547
2006 Jiang YG, Ono T, Esashi M. High aspect ratio spiral microcoils fabricated by a silicon lost molding technique Journal of Micromechanics and Microengineering. 16: 1057-1061. DOI: 10.1088/0960-1317/16/5/025  0.55
2006 Xu HG, Ono T, Esashi M. Precise motion control of a nanopositioning PZT microstage using integrated capacitive displacement sensors Journal of Micromechanics and Microengineering. 16: 2747-2754. DOI: 10.1088/0960-1317/16/12/031  0.486
2006 Motoki T, Gao W, Kiyono S, Ono T. A nanoindentation instrument for mechanical property measurement of 3D micro/nano-structured surfaces Measurement Science and Technology. 17: 495-499. DOI: 10.1088/0957-0233/17/3/S06  0.361
2006 Kim S, Ono T, Esashi M. Capacitive resonant mass sensor with frequency demodulation detection based on resonant circuit Applied Physics Letters. 88: 053116. DOI: 10.1063/1.2171650  0.511
2006 Xu H, Ono T, Zhang D, Esashi M. Fabrication and characterizations of a monolithic PZT microstage Microsystem Technologies. 12: 883-890. DOI: 10.1007/S00542-006-0206-Z  0.537
2005 Kim S, Ono T, Esashi M. Resonant Silicon Mass Sensor with Capacitive Readout The Japan Society of Applied Physics. 2005: 82-83. DOI: 10.7567/Ssdm.2005.D-1-7  0.512
2005 ONO T, IWAMI K, GOTO K, ESASHI M. Near-Field Optics and MEMS Technology The Review of Laser Engineering. 33: 739-744. DOI: 10.2184/Lsj.33.739  0.448
2005 ESASHI M, ONO T. MEMS and Nanotechnology Hyomen Kagaku. 26: 68-73. DOI: 10.1380/Jsssj.26.68  0.553
2005 Ono T, Iwami K, Esashi M. Micromachined Optical Near-Field Bow-Tie Antenna Probe with Integrated Electrostatic Actuator Japanese Journal of Applied Physics. 44: L445-L448. DOI: 10.1143/Jjap.44.L445  0.513
2005 Goto K, Ono T, Kim Y. Evanescent light enhancement in a nanometer aperture surrounded by corrugated metal thin film for a terabyte optical disk head Ieee Transactions On Magnetics. 41: 1037-1041. DOI: 10.1109/Tmag.2004.842031  0.317
2005 Ahn Y, Ono T, Esashi M. Si multiprobes integrated with lateral actuators for independent scanning probe applications Journal of Micromechanics and Microengineering. 15: 1224-1229. DOI: 10.1088/0960-1317/15/6/012  0.543
2005 Lin Y, Ono T, Esashi M. Fabrication and characterization of micromachined quartz-crystal cantilever for force sensing Journal of Micromechanics and Microengineering. 15: 2426-2432. DOI: 10.1088/0960-1317/15/12/026  0.547
2005 Ono T, Wakamatsu H, Esashi M. Parametrically amplified thermal resonant sensor with pseudo-cooling effect Journal of Micromechanics and Microengineering. 15: 2282-2288. DOI: 10.1088/0960-1317/15/12/010  0.526
2005 Ono T, Fan CC, Esashi M. Micro instrumentation for characterizing thermoelectric properties of nanomaterials Journal of Micromechanics and Microengineering. 15: 1-5. DOI: 10.1088/0960-1317/15/1/001  0.509
2005 Wang DF, Takahashi A, Matsumoto Y, Itoh KM, Yamamoto Y, Ono T, Esashi M. Magnetic mesa structures fabricated by reactive ion etching with CO/NH3/Xe plasma chemistry for an all-silicon quantum computer Nanotechnology. 16: 990-994. DOI: 10.1088/0957-4484/16/6/062  0.498
2005 Yoshida S, Ono T, Oi S, Esashi M. Reversible electrical modification on conductive polymer for proximity probe data storage Nanotechnology. 16: 2516-2520. DOI: 10.1088/0957-4484/16/11/009  0.484
2005 Esashi M, Ono T. From MEMS to nanomachine Journal of Physics D: Applied Physics. 38: R223-R230. DOI: 10.1088/0022-3727/38/13/R01  0.553
2005 Ono T, Esashi M. Stress-induced mass detection with a micromechanical/nanomechanical silicon resonator Review of Scientific Instruments. 76: 093107. DOI: 10.1063/1.2041591  0.517
2005 Ono T, Lin Y, Esashi M. Scanning probe microscopy with quartz crystal cantilever Applied Physics Letters. 87: 074102. DOI: 10.1063/1.2031937  0.51
2005 Ono T, Esashi M. Effect of ion attachment on mechanical dissipation of a resonator Applied Physics Letters. 87: 044105. DOI: 10.1063/1.1993771  0.478
2005 Zhang D, Ono T, Esashi M. Piezoactuator-integrated monolithic microstage with six degrees of freedom Sensors and Actuators a: Physical. 122: 301-306. DOI: 10.1016/J.Sna.2005.03.076  0.511
2005 Tuyen LTT, Minh PN, Roduner E, Chi PTD, Ono T, Miyashita H, Khoi PH, Esashi M. Hydrogen termination for the growth of carbon nanotubes on silicon Chemical Physics Letters. 415: 333-336. DOI: 10.1016/J.Cplett.2005.09.014  0.52
2004 ESASHI M, ONO T, TANAKA S. Micro Industry Equipments Jsme International Journal Series B. 47: 429-438. DOI: 10.1299/Jsmeb.47.429  0.488
2004 Ono T, Miyashita H, Esashi M. Nanomechanical Structure with Integrated Carbon Nanotube Japanese Journal of Applied Physics. 43: 855-859. DOI: 10.1143/Jjap.43.855  0.511
2004 Ngoc Minh P, Ono T, Sato N, Mimura H, Esashi M. Microelectron field emitter array with focus lenses for multielectron beam lithography based on silicon on insulator wafer Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 22: 1273. DOI: 10.1116/1.1738118  0.533
2004 Bae JH, Minh PN, Ono T, Esashi M. Schottky emitter using boron-doped diamond Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 22: 1349. DOI: 10.1116/1.1736640  0.497
2004 Wang DF, Ono T, Esashi M. Thermal treatments and gas adsorption influences on nanomechanics of ultra-thin silicon resonators for ultimate sensing Nanotechnology. 15: 1851-1854. DOI: 10.1088/0957-4484/15/12/028  0.511
2004 Ono T, Esashi M. Mass sensing with resonating ultra-thin silicon beams detected by a double-beam laser Doppler vibrometer Measurement Science and Technology. 15: 1977-1981. DOI: 10.1088/0957-0233/15/10/005  0.515
2003 Esashi M, Ono T. OS6(3)-11(OS06W0429) Micro-Nano Electromechanical Systems by Silicon Bulk-Micromachining The Abstracts of Atem : International Conference On Advanced Technology in Experimental Mechanics : Asian Conference On Experimental Mechanics. 2003: 113. DOI: 10.1299/jsmeatem.2003.113  0.444
2003 Ono T, Sugimoto S, Miyashita H, Esashi M. Mechanical Energy Dissipation of Multiwalled Carbon Nanotube in Ultrahigh Vacuum Japanese Journal of Applied Physics. 42: L683-L684. DOI: 10.1143/Jjap.42.L683  0.471
2003 Ono T, Konoma C, Miyashita H, Kanamori Y, Esashi M. Pattern Transfer of Self-Ordered Structure with Diamond Mold Japanese Journal of Applied Physics. 42: 3867-3870. DOI: 10.1143/Jjap.42.3867  0.509
2003 Minh PN, Tuyen LTT, Ono T, Miyashita H, Suzuki Y, Mimura H, Esashi M. Selective growth of carbon nanotubes on Si microfabricated tips and application for electron field emitters Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 21: 1705. DOI: 10.1116/1.1580115  0.518
2003 Ono T, Yoshida S, Esashi M. Electrical modification of a conductive polymer using a scanning probe microscope Nanotechnology. 14: 1051-1054. DOI: 10.1088/0957-4484/14/9/321  0.481
2003 Ono T, Esashi M. Magnetic force and optical force sensing with ultrathin silicon resonator Review of Scientific Instruments. 74: 5141-5146. DOI: 10.1063/1.1623627  0.518
2003 Li X, Ono T, Wang Y, Esashi M. Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young’s modulus Applied Physics Letters. 83: 3081-3083. DOI: 10.1063/1.1618369  0.564
2003 Wang DF, Ono T, Esashi M. Crystallographic influence on nanomechanics of (100)-oriented silicon resonators Applied Physics Letters. 83: 3189-3191. DOI: 10.1063/1.1616652  0.53
2003 Ono T, Wang DF, Esashi M. Time dependence of energy dissipation in resonating silicon cantilevers in ultrahigh vacuum Applied Physics Letters. 83: 1950-1952. DOI: 10.1063/1.1608485  0.553
2003 Bae JH, Ono T, Esashi M. Scanning probe with an integrated diamond heater element for nanolithography Applied Physics Letters. 82: 814-816. DOI: 10.1063/1.1541949  0.542
2003 Ono T, Li X, Miyashita H, Esashi M. Mass sensing of adsorbed molecules in sub-picogram sample with ultrathin silicon resonator Review of Scientific Instruments. 74: 1240-1243. DOI: 10.1063/1.1536262  0.538
2003 Bae J, Ono T, Esashi M. Boron-doped diamond scanning probe for thermo-mechanical nanolithography Diamond and Related Materials. 12: 2128-2135. DOI: 10.1016/S0925-9635(03)00252-8  0.555
2003 Zhang D, Chang C, Ono T, Esashi M. A piezodriven XY-microstage for multiprobe nanorecording Sensors and Actuators a: Physical. 108: 230-233. DOI: 10.1016/S0924-4247(03)00373-X  0.498
2003 Li X, Ono T, Lin R, Esashi M. Resonance enhancement of micromachined resonators with strong mechanical-coupling between two degrees of freedom Microelectronic Engineering. 65: 1-12. DOI: 10.1016/S0167-9317(02)00595-6  0.51
2003 Minh PN, Ono T, Haga Y, Inoue K, Sasaki M, Hane K, Esashi M. Bach Fabrication of Microlens at the end of Optical Fiber using Self-photolithgraphy and Etching Techniques Optical Review. 10: 150-154. DOI: 10.1007/S10043-003-0150-4  0.465
2002 Minh PN, Tuyen LTT, Ono T, Mimura H, Esashi M. Electron Field Emission with Carbon Nanotube on a Si Tip The Japan Society of Applied Physics. DOI: 10.7567/Ssdm.2002.F-1-5  0.478
2002 Minh PN, Tuyen LTT, Ono T, Mimura H, Yokoo K, Esashi M. Carbon Nanotube on a Si Tip for Electron Field Emitter Japanese Journal of Applied Physics. 41: L1409-L1411. DOI: 10.1143/Jjap.41.L1409  0.514
2002 Yang J, Ono T, Esashi M. Energy dissipation in submicrometer thick single-crystal silicon cantilevers Ieee\/Asme Journal of Microelectromechanical Systems. 11: 775-783. DOI: 10.1109/Jmems.2002.805208  0.494
2002 Lee D, Ono T, Abe T, Esashi M. Microprobe array with electrical interconnection for thermal imaging and data storage Ieee\/Asme Journal of Microelectromechanical Systems. 11: 215-221. DOI: 10.1109/Jmems.2002.1007400  0.539
2002 Lee DW, Ono T, Esashi M. Electrical and thermal recording techniques using a heater integrated microprobe Journal of Micromechanics and Microengineering. 12: 841-848. DOI: 10.1088/0960-1317/12/6/315  0.508
2002 Ono T, Oesterschulze E, Georgiev G, Georgieva A, Kassing R. Field-assisted assembly and alignment of carbon nanofibres Nanotechnology. 14: 37-41. DOI: 10.1088/0957-4484/14/1/309  0.331
2002 Ono T, Miyashita H, Esashi M. Electric-field-enhanced growth of carbon nanotubes for scanning probe microscopy Nanotechnology. 13: 62-64. DOI: 10.1088/0957-4484/13/1/314  0.528
2002 Minh PN, Ono T, Tanaka S, Goto K, Esashi M. Near-field recording with high optical throughput aperture array Sensors and Actuators a: Physical. 95: 168-174. DOI: 10.1016/S0924-4247(01)00727-0  0.395
2001 Ono T, Esashi M. Nano-Probe Sensing and Multi-Probe Data Storage The Japan Society of Applied Physics. 2001: 464-465. DOI: 10.7567/Ssdm.2001.A-8-2  0.457
2001 Ono T, Minh PN, Lee D, Esashi M. Micromachined Probe for High Density Data Storage The Review of Laser Engineering. 29: S11-S12. DOI: 10.2184/Lsj.29.Supplement_S11  0.432
2001 ONO T, MINH PN, LEE DW, ESASHI M. Information Technology Industry and Laser Technology. Multi-Probe Aimed for High Density Data Storage. The Review of Laser Engineering. 29: 516-521. DOI: 10.2184/Lsj.29.516  0.562
2001 Ono T, Wada A, Esashi M. Silicon Micromachined Tunable Infrared Polarizer Ieej Transactions On Sensors and Micromachines. 121: 119-123. DOI: 10.1541/Ieejsmas.121.119  0.511
2001 Lee D, Ono T, Esashi M. Magnetically actuated cantilever with small resonator for scanning probe microscopy Ieej Transactions On Sensors and Micromachines. 121: 113-118. DOI: 10.1541/Ieejsmas.121.113  0.573
2001 Yang J, Ono T, Esashi M. Investigating surface stress: Surface loss in ultrathin single-crystal silicon cantilevers Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 19: 551. DOI: 10.1116/1.1347040  0.508
2001 Lee DW, Ono T, Esashi M. Fabrication of thermal microprobes with a sub-100 nm metal-to-metal junction Nanotechnology. 13: 29-32. DOI: 10.1088/0957-4484/13/1/306  0.539
2001 Minh PN, Ono T, Watanabe H, Lee SS, Haga Y, Esashi M. Hybrid optical fiber-apertured cantilever near-field probe Applied Physics Letters. 79: 3020-3022. DOI: 10.1063/1.1416475  0.511
2000 ESASHI M, ONO T, TANAKA S. Journal of the Surface Finishing Society of Japan. 51: 874-879. DOI: 10.4139/Sfj.51.874  0.457
2000 Lee D, Ono T, Esashi M. High-speed imaging by electromagnetic alloy actuated probe with dual spring Ieee\/Asme Journal of Microelectromechanical Systems. 9: 419-424. DOI: 10.1109/84.896762  0.556
2000 Ono T, Sim DY, Esashi M. Micro-discharge and electric breakdown in a micro-gap Journal of Micromechanics and Microengineering. 10: 445-451. DOI: 10.1088/0960-1317/10/3/321  0.506
2000 Yang J, Ono T, Esashi M. Surface effects and high quality factors in ultrathin single-crystal silicon cantilevers Applied Physics Letters. 77: 3860-3862. DOI: 10.1063/1.1330225  0.527
2000 Minh PN, Ono T, Esashi M. High throughput aperture near-field scanning optical microscopy Review of Scientific Instruments. 71: 3111-3117. DOI: 10.1063/1.1304867  0.553
2000 Lee D, Ono T, Esashi M. Cantilever with integrated resonator for application of scanning probe microscope Sensors and Actuators a: Physical. 83: 11-16. DOI: 10.1016/S0924-4247(99)00378-7  0.555
2000 Yang J, Ono T, Esashi M. Mechanical behavior of ultrathin microcantilever Sensors and Actuators a: Physical. 82: 102-107. DOI: 10.1016/S0924-4247(99)00319-2  0.54
2000 Minh PN, Ono T, Esashi M. Microfabrication of miniature aperture at the apex of SiO2 tip on silicon cantilever for near-field scanning optical microscopy Sensors and Actuators a: Physical. 80: 163-169. DOI: 10.1016/S0924-4247(99)00262-9  0.576
1999 Esashi M, Toda R, Minami K, Ono T. Precise Micro-Nanomachining of Silicon Ieej Transactions On Sensors and Micromachines. 119: 489-497. DOI: 10.1541/Ieejsmas.119.489  0.553
1999 Minh PN, Ono T, Esashi M. Nonuniform silicon oxidation and application for the fabrication of aperture for near-field scanning optical microscopy Applied Physics Letters. 75: 4076-4078. DOI: 10.1063/1.125541  0.557
1999 Ono T, Esashi M. Silicon—based Nanomachining Sensors Update. 6: 163-188. DOI: 10.1002/1616-8984(199911)6:1<163::Aid-Seup163>3.0.Co;2-2  0.377
1998 Shiba Y, Ono T, Minami K, Esashi M. Capacitive AFM Probe for High Speed Imaging Ieej Transactions On Sensors and Micromachines. 118: 647-651. DOI: 10.1541/Ieejsmas.118.647  0.564
1997 ONO T, HAMANAKA H, ESASHI M. Application and Progress in the Scanning Probe Microscopy. Micromachining and Scanning Probe Microscope. Hyomen Kagaku. 18: 198-205. DOI: 10.1380/Jsssj.18.198  0.485
1997 Esashi M, Ono T, Minami K. Precise micronanomachining for advanced sensors Proceedings of Spie. 3223: 44-55. DOI: 10.1117/12.284499  0.532
1997 Ono T. Fabrication of a Si scanning probe microscopy tip with an ultrahigh vacuum-scanning tunneling microscope/atomic force microscope Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 15: 1531. DOI: 10.1116/1.589489  0.379
1997 Ono T, Saitoh H, Esashi M. Si nanowire growth with ultrahigh vacuum scanning tunneling microscopy Applied Physics Letters. 70: 1852-1854. DOI: 10.1063/1.118711  0.539
1996 Ono T, Hamanaka H, Kurabayashi T, Minami K, Esashi M. Nanoscale Al patterning on an STM-manipulated Si surface Thin Solid Films. 640-643. DOI: 10.1016/0040-6090(96)08705-6  0.473
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