Year |
Citation |
Score |
2005 |
Zheng L, Ling L, Hua X, Oehrlein GS, Hudson EA. Studies of film deposition in fluorocarbon plasmas employing a small gap structure Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 23: 634-642. DOI: 10.1116/1.1931680 |
0.624 |
|
2004 |
Li X, Ling L, Hua X, Oehrlein GS, Wang Y, Vasenkov AV, Kushner MJ. Properties of C 4F 8 inductively coupled plasmas. I. Studies of Ar/c-C 4F 8 magnetically confined plasmas for etching of SiO 2 Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 22: 500-510. DOI: 10.1116/1.1697482 |
0.635 |
|
2004 |
Ling L, Hua X, Li X, Oehrlein GS, Celii FG, Kirmse KHR, Jiang P, Wang Y, Anderson HM. Study of C 4F 8/CO and C 4F 8/Ar/ CO plasmas for highly selective etching of organosilicate glass over Si 3N 4 and SiC Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 22: 236-244. DOI: 10.1116/1.1638780 |
0.637 |
|
2004 |
Li X, Hua X, Ling L, Oehrlein GS, Karwacki E, Ji B. Surface chemical changes of aluminum during NF 3-based plasma processing used for in situ chamber cleaning Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 22: 158-164. DOI: 10.1116/1.1633566 |
0.62 |
|
2004 |
Ling L, Hua X, Li X, Oehrlein GS, Hudson EA, Lazzeri P, Anderle M. Investigation of surface modifications of 193 nm and 248 nm photoresist materials during low-pressure plasma etching Ieee International Conference On Plasma Science. 168. |
0.531 |
|
2003 |
Li X, Ling L, Hua X, Fukasawa M, Oehrlein GS, Barela M, Anderson HM. Effects of Ar and O2 additives on SiO2 etching in C4F8-based plasmas Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 21: 284-293. DOI: 10.1116/1.1531140 |
0.593 |
|
2002 |
Li X, Hua X, Ling L, Oehrlein GS, Barela M, Anderson HM. Fluorocarbon-based plasma etching of Sio2: Comparison of C4F6/Ar and C4F8/Ar discharges Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 20: 2052-2061. DOI: 10.1116/1.1517256 |
0.634 |
|
Show low-probability matches. |