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Yiheng Xu, Ph.D. - Publications

Affiliations: 
2000 University of Maryland, College Park, College Park, MD 
Area:
Biomedical
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3 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2002 Xu Y, Gougousi T, Henn-Lecordier L, Liu Y, Cho S, Rubloff GW. Thickness metrology and end point control in W chemical vapor deposition process from SiH4/WF6 using in situ mass spectrometry Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 20: 2351-2360. DOI: 10.1116/1.1520555  0.488
2001 Sreenivasan R, Gougousi T, Xu Y, Kidder J, Zafiriou E, Rubloff GW. Run to run control in tungsten chemical vapor deposition using H2/WF6 at low pressures Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 19: 1931-1941. DOI: 10.1116/1.1406159  0.521
2000 Gougousi T, Xu Y, Kidder JN, Rubloff GW, Tilford CR. Process diagnostics and thickness metrology using in situ mass spectrometry for the chemical vapor deposition of W from H2/WF6 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 18: 1352-1363. DOI: 10.1116/1.591478  0.486
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