Year |
Citation |
Score |
2003 |
Rangan S, Horn M, Ashok S, Mohapatra YN. Influence of hydrogen plasma treatment on boron implanted junctions in silicon Journal of Vacuum Science & Technology B. 21: 781-784. DOI: 10.1116/1.1560331 |
0.556 |
|
2003 |
Rangan S, Ashok S, Chen G, Theodore D. Multi-layered nanocavities in silicon with sequential helium implantation/anneal Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions With Materials and Atoms. 206: 417-421. DOI: 10.1016/S0168-583X(03)00780-8 |
0.537 |
|
2003 |
Rangan S, Horn M, Ashok S, Mohapatra YN. Influence of hydrogen plasma treatment on boron implanted junctions in silicon Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21: 781-784. |
0.367 |
|
2002 |
Sopori B, Zhang Y, Reedy R, Jones K, Ravindra NM, Rangan S, Ashok S. Trapping and Detrapping of H in Si: Impact on Diffusion Properties and Solar Cell Processing Mrs Proceedings. 719. DOI: 10.1557/Proc-719-F5.3 |
0.465 |
|
2002 |
Singh SP, Rao V, Mohapatra YN, Rangan S, Ashok S. Electrical Signature of Ion-Implantation Induced Defects in n-Silicon in the Defect Cluster Regime Studied using DLTS and Isothermal Transient Spectroscopies Mrs Proceedings. 719. DOI: 10.1557/Proc-719-F11.1 |
0.488 |
|
2002 |
Rangan S, Ashok S, Chen G, Theodore D. Helium-induced nanocavities in silicon: Formation and properties Proceedings of Spie - the International Society For Optical Engineering. 4746: 255-261. |
0.404 |
|
2002 |
Singh SP, Rao V, Mohapatra YN, Rangan S, Ashok S. Electrical signature of ion-implantation induced defects in n-silicon in the defect cluster regime studied using DLTS and isothermal transient spectroscopies Materials Research Society Symposium - Proceedings. 719: 303-309. |
0.343 |
|
2001 |
Rangan S, Ashok S, Chen G, Theodore D. Formation and characterization of multi-layered nanocavities in silicon with cascade helium implantation/anneal 2001 6th International Conference On Solid-State and Integrated Circuit Technology, Icsict 2001 - Proceedings. 2: 1360-1365. DOI: 10.1109/ICSICT.2001.982155 |
0.401 |
|
2000 |
Rangan S, Horn M, Ashok S. Boron implantation into silicon subject to hydrogen plasma Materials Research Society Symposium - Proceedings. 610. DOI: 10.1557/Proc-610-B5.7 |
0.554 |
|
1998 |
Rangan S, Ashok S, Krishnan S. A comparative study of anneal efficiencies of deuterium and hydrogen in plasma-processed transistors European Solid-State Device Research Conference. 564-567. |
0.47 |
|
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