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Steven McClellan George - Publications

Affiliations: 
University of Colorado, Boulder, Boulder, CO, United States 
Area:
surface chemistry, thin film growth and nanostructure engineering
Website:
http://www.colorado.edu/che/faculty/george.html

338 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2024 Welch BC, Antonio EN, Chaney TP, McIntee OM, Strzalka J, Bright VM, Greenberg AR, Segal-Peretz T, Toney M, George SM. Building Semipermeable Films One Monomer at a Time: Structural Advantages via Molecular Layer Deposition vs Interfacial Polymerization. Chemistry of Materials : a Publication of the American Chemical Society. 36: 1362-1374. PMID 38370278 DOI: 10.1021/acs.chemmater.3c02519  0.387
2023 Moeini B, Avval TG, Brongersma HH, Průša S, Bábík P, Vaníčková E, Strohmeier BR, Bell DS, Eggett D, George SM, Linford MR. Area-Selective Atomic Layer Deposition of ZnO on Si\SiO Modified with Tris(dimethylamino)methylsilane. Materials (Basel, Switzerland). 16. PMID 37445002 DOI: 10.3390/ma16134688  0.311
2020 George SM. Mechanisms of Thermal Atomic Layer Etching. Accounts of Chemical Research. 53: 1151-1160. PMID 32476413 DOI: 10.1021/Acs.Accounts.0C00084  0.409
2020 Young MJ, Yanguas-Gil A, Letourneau S, Coile M, Mandia D, Bedford NM, Aoun B, Cavanagh AS, George SM, Elam JW. Probing the atomic-scale structure of amorphous aluminum oxide grown by atomic layer deposition. Acs Applied Materials & Interfaces. PMID 32309922 DOI: 10.1021/Acsami.0C01905  0.796
2020 Welch BC, McIntee OM, Ode AB, McKenzie BB, Greenberg AR, Bright VM, George SM. Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition Journal of Vacuum Science and Technology. 38: 52409. DOI: 10.1116/6.0000271  0.538
2020 Parsons GN, Elam JW, George SM, Haukka S, Jeon H, (Erwin) Kessels WMM, Leskelä M, Poodt P, Ritala M, Rossnagel SM. Erratum: “History of atomic layer deposition and its relationship with the American Vacuum Society” [J. Vac. Sci. Technol. A 31, 050818 (2013)] Journal of Vacuum Science & Technology A. 38: 037001. DOI: 10.1116/6.0000143  0.596
2020 Abdulagatov AI, George SM. Thermal atomic layer etching of silicon nitride using an oxidation and “conversion etch” mechanism Journal of Vacuum Science & Technology A. 38: 022607. DOI: 10.1116/1.5140481  0.758
2020 Fischer A, Routzahn A, Lee Y, Lill T, George SM. Thermal etching of AlF3 and thermal atomic layer etching of Al2O3 Journal of Vacuum Science and Technology. 38: 22603. DOI: 10.1116/1.5135911  0.414
2020 Murdzek JA, George SM. Effect of crystallinity on thermal atomic layer etching of hafnium oxide, zirconium oxide, and hafnium zirconium oxide Journal of Vacuum Science & Technology A. 38: 022608. DOI: 10.1116/1.5135317@Jva.2020.Ale2020.Issue-1  0.489
2020 Mahuli N, Cavanagh AS, George SM. Atomic layer deposition of aluminum oxyfluoride thin films with tunable stoichiometry Journal of Vacuum Science & Technology A. 38: 022407. DOI: 10.1116/1.5135014  0.77
2020 Lee Y, Johnson NR, George SM. Thermal Atomic Layer Etching of Gallium Oxide Using Sequential Exposures of HF and Various Metal Precursors Chemistry of Materials. 32: 5937-5948. DOI: 10.1021/Acs.Chemmater.0C00131  0.339
2019 Lu W, Lee Y, Gertsch JC, Murdzek J, Cavanagh AS, Kong L, Del Alamo J, George SM. In situ Thermal Atomic Layer Etching for Sub-5 nm InGaAs Multi-gate MOSFETs. Nano Letters. PMID 31251069 DOI: 10.1021/Acs.Nanolett.9B01525  0.704
2019 Sobell ZC, Cavanagh AS, George SM. Growth of cobalt films at room temperature using sequential exposures of cobalt tricarbonyl nitrosyl and low energy electrons Journal of Vacuum Science & Technology A. 37: 060906. DOI: 10.1116/1.5113711  0.721
2019 Johnson NR, Hite JK, Mastro MA, Eddy CR, George SM. Thermal atomic layer etching of crystalline GaN using sequential exposures of XeF2 and BCl3 Applied Physics Letters. 114: 243103. DOI: 10.1063/1.5095938  0.396
2019 Hirschberg C, Jensen NS, Boetker J, Madsen AØ, Kääriäinen TO, Kääriäinen M, Hoppu P, George SM, Murtomaa M, Sun CC, Risbo J, Rantanen J. Improving Powder Characteristics by Surface Modification Using Atomic Layer Deposition Organic Process Research & Development. 23: 2362-2368. DOI: 10.1021/Acs.Oprd.9B00247  0.42
2019 Clancey JW, Cavanagh AS, Smith JET, Sharma S, George SM. Volatile Etch Species Produced during Thermal Al2O3 Atomic Layer Etching The Journal of Physical Chemistry C. 124: 287-299. DOI: 10.1021/Acs.Jpcc.9B06104  0.676
2019 Lee Y, George SM. Thermal Atomic Layer Etching of Al2O3, HfO2, and ZrO2 Using Sequential Hydrogen Fluoride and Dimethylaluminum Chloride Exposures Journal of Physical Chemistry C. 123: 18455-18466. DOI: 10.1021/Acs.Jpcc.9B04767  0.391
2019 Cano AM, Marquardt AE, DuMont JW, George SM. Effect of HF Pressure on Thermal Al2O3 Atomic Layer Etch Rates and Al2O3 Fluorination Journal of Physical Chemistry C. 123: 10346-10355. DOI: 10.1021/Acs.Jpcc.9B00124  0.374
2019 Gertsch JC, Cano AM, Bright VM, George SM. SF4 as the Fluorination Reactant for Al2O3 and VO2 Thermal Atomic Layer Etching Chemistry of Materials. 31: 3624-3635. DOI: 10.1021/Acs.Chemmater.8B05294  0.385
2018 Sprenger JK, Sun H, Cavanagh AS, Roshko A, Blanchard PT, George SM. Electron-Enhanced Atomic Layer Deposition of Boron Nitride Thin Films at Room Temperature and 100 °C. The Journal of Physical Chemistry. C, Nanomaterials and Interfaces. 122. PMID 33101567 DOI: 10.1021/Acs.Jpcc.8B00796  0.774
2018 Wallas JM, Young MJ, Sun H, George SM. Efficient Capacitive Deionization Using Thin Film Sodium Manganese Oxide Journal of the Electrochemical Society. 165: A2330-A2339. DOI: 10.1149/2.0751810Jes  0.406
2018 Lee Y, George SM. Thermal atomic layer etching of HfO2 using HF for fluorination and TiCl4 for ligand-exchange Journal of Vacuum Science and Technology. 36: 61504. DOI: 10.1116/1.5045130  0.41
2018 Zywotko DR, Faguet J, George SM. Rapid atomic layer etching of Al2O3 using sequential exposures of hydrogen fluoride and trimethylaluminum with no purging Journal of Vacuum Science and Technology. 36: 61508. DOI: 10.1116/1.5043488  0.415
2018 Sprenger JK, Sun H, Cavanagh AS, George SM. Electron-enhanced atomic layer deposition of silicon thin films at room temperature Journal of Vacuum Science & Technology a: Vacuum, Surfaces, and Films. 36: 01A118. DOI: 10.1116/1.5006696  0.761
2018 Yersak AS, Sharma K, Wallas JM, Dameron AA, Li X, Yang Y, Hurst KE, Ban C, Tenent RC, George SM. Spatial atomic layer deposition for coating flexible porous Li-ion battery electrodes Journal of Vacuum Science & Technology a: Vacuum, Surfaces, and Films. 36: 01A123. DOI: 10.1116/1.5006670  0.368
2018 Higgs DJ, DuMont JW, Sharma K, George SM. Spatial molecular layer deposition of polyamide thin films on flexible polymer substrates using a rotating cylinder reactor Journal of Vacuum Science and Technology. 36. DOI: 10.1116/1.5004041  0.788
2018 Abdulagatov AI, George SM. Thermal Atomic Layer Etching of Silicon Using O2, HF, and Al(CH3)3 as the Reactants Chemistry of Materials. 30: 8465-8475. DOI: 10.1021/Acs.Chemmater.8B02745  0.764
2017 Johnson N, George SM. WO3 and W Thermal Atomic Layer Etching Using "Conversion-Fluorination" and "Oxidation-Conversion-Fluorination" Mechanisms. Acs Applied Materials & Interfaces. PMID 28876892 DOI: 10.1021/Acsami.7B09161  0.459
2017 Hautala J, Kääriäinen T, Hoppu P, Kemell M, Heinämäki J, Cameron D, George S, Juppo AM. Atomic Layer Deposition - A Novel Method for the Ultrathin Coating of Minitablets. International Journal of Pharmaceutics. PMID 28802795 DOI: 10.1016/J.Ijpharm.2017.08.010  0.378
2017 Kääriäinen TO, Kemell M, Vehkamäki M, Kääriäinen ML, Correia A, Santos HA, Bimbo LM, Hirvonen J, Hoppu P, George SM, Cameron DC, Ritala M, Leskelä M. Surface Modification of Acetaminophen Particles by Atomic Layer Deposition. International Journal of Pharmaceutics. PMID 28432020 DOI: 10.1016/J.Ijpharm.2017.04.031  0.372
2017 Zhou Y, Lee Y, Sun H, Wallas JM, George SM, Xie M. Coating Solution for High-Voltage Cathode: AlF3 Atomic Layer Deposition for Free-standing LiCoO2 Electrodes with High Energy Density and Excellent Flexibility. Acs Applied Materials & Interfaces. PMID 28244725 DOI: 10.1021/Acsami.6B15628  0.328
2017 DuMont JW, Marquardt A, Cano A, George SM. Thermal Atomic Layer Etching of SiO2 by a "Conversion-Etch" Mechanism Using Sequential Reactions of Trimethylaluminum and Hydrogen Fluoride. Acs Applied Materials & Interfaces. PMID 28240864 DOI: 10.1021/Acsami.7B01259  0.389
2017 DuMont JW, George SM. Competition between Al2O3 atomic layer etching and AlF3 atomic layer deposition using sequential exposures of trimethylaluminum and hydrogen fluoride. The Journal of Chemical Physics. 146: 052819. PMID 28178819 DOI: 10.1063/1.4973310  0.381
2017 Lancaster DK, Sun H, George SM. Atomic Layer Deposition of Zn(O,S) Alloys Using Diethylzinc with H2O and H2S: Effect of Exchange Reactions The Journal of Physical Chemistry C. 121: 18643-18652. DOI: 10.1021/Acs.Jpcc.7B05361  0.434
2017 Lee Y, George SM. Thermal Atomic Layer Etching of Titanium Nitride Using Sequential, Self-Limiting Reactions: Oxidation to TiO2 and Fluorination to Volatile TiF4 Chemistry of Materials. 29: 8202-8210. DOI: 10.1021/Acs.Chemmater.7B02286  0.463
2017 Zywotko DR, George SM. Thermal Atomic Layer Etching of ZnO by a “Conversion-Etch” Mechanism Using Sequential Exposures of Hydrogen Fluoride and Trimethylaluminum Chemistry of Materials. 29: 1183-1191. DOI: 10.1021/Acs.Chemmater.6B04529  0.512
2016 Sprenger JK, Cavanagh AS, Sun H, Wahl KJ, Roshko A, George SM. Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100 °C Using Sequential Surface Reactions. Chemistry of Materials : a Publication of the American Chemical Society. 28. PMID 31092972 DOI: 10.1021/Acs.Chemmater.6B00676  0.759
2016 Young MJ, Hare CD, Cavanagh AS, Musgrave CB, George SM. Rapid Growth of Crystalline Mn5O8 by Self-Limited Multilayer Deposition using Mn(EtCp)2 and O3. Acs Applied Materials & Interfaces. PMID 27351207 DOI: 10.1021/Acsami.6B04529  0.753
2016 George SM, Lee Y. Prospects for Thermal Atomic Layer Etching Using Sequential, Self-Limiting Fluorination and Ligand-Exchange Reactions. Acs Nano. 10: 4889-94. PMID 27216115 DOI: 10.1021/Acsnano.6B02991  0.413
2016 Wang Y, Clancey J, Lu G, Liu J, Liu L, Chaudhuri J, George S, Xie M, Wei S, Guo Z. Enhanced methanol oxidation with annealed atomic layer deposited platinum nanoparticles on carbon nanotubes Journal of the Electrochemical Society. 163: F1-F10. DOI: 10.1149/2.1001514Jes  0.386
2016 Johnson NR, Sun H, Sharma K, George SM. Thermal atomic layer etching of crystalline aluminum nitride using sequential, self-limiting hydrogen fluoride and Sn(acac)2 reactions and enhancement by H2 and Ar plasmas Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 34. DOI: 10.1116/1.4959779  0.497
2016 Sharma K, Routkevitch D, Varaksa N, George SM. Spatial atomic layer deposition on flexible porous substrates: ZnO on anodic aluminum oxide films and Al2O3 on Li ion battery electrodes Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 34. DOI: 10.1116/1.4937728  0.516
2016 Lee Y, Huffman C, George SM. Selectivity in Thermal Atomic Layer Etching Using Sequential, Self-Limiting Fluorination and Ligand-Exchange Reactions Chemistry of Materials. 28: 7657-7665. DOI: 10.1021/Acs.Chemmater.6B02543  0.345
2016 Sprenger JK, Cavanagh AS, Sun H, Wahl KJ, Roshko A, George SM. Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100 °c Using Sequential Surface Reactions Chemistry of Materials. 28: 5282-5294. DOI: 10.1021/acs.chemmater.6b00676  0.74
2016 Lee Y, Dumont JW, George SM. Trimethylaluminum as the Metal Precursor for the Atomic Layer Etching of Al2O3 Using Sequential, Self-Limiting Thermal Reactions Chemistry of Materials. 28: 2994-3003. DOI: 10.1021/Acs.Chemmater.6B00111  0.424
2016 Lee Y, Sun H, Young MJ, George SM. Atomic Layer Deposition of Metal Fluorides Using HF-Pyridine as the Fluorine Precursor Chemistry of Materials. 28: 2022-2032. DOI: 10.1021/Acs.Chemmater.5B04360  0.455
2016 Molina Piper D, Lee Y, Son SB, Evans T, Lin F, Nordlund D, Xiao X, George SM, Lee SH, Ban C. Cross-linked aluminum dioxybenzene coating for stabilization of silicon electrodes Nano Energy. 22: 202-210. DOI: 10.1016/J.Nanoen.2016.02.021  0.387
2016 Ban C, George SM. Molecular Layer Deposition for Surface Modification of Lithium-Ion Battery Electrodes Advanced Materials Interfaces. 3: 1600762. DOI: 10.1002/Admi.201600762  0.318
2016 Young MJ, Schnabel H, Holder AM, George SM, Musgrave CB. Band Diagram and Rate Analysis of Thin Film Spinel LiMn2O4Formed by Electrochemical Conversion of ALD-Grown MnO Advanced Functional Materials. 26: 7895-7907. DOI: 10.1002/Adfm.201602773  0.396
2015 Xie M, Sun X, George SM, Zhou C, Lian J, Zhou Y. Amorphous Ultrathin SnO2 Films by Atomic Layer Deposition on Graphene Network as Highly Stable Anodes for Lithium Ion Batteries. Acs Applied Materials & Interfaces. PMID 26606590 DOI: 10.1021/Acsami.5B08719  0.429
2015 Eigenfeld NT, Gertsch JC, Skidmore GD, George SM, Bright VM. Electrical and thermal conduction in ultra-thin freestanding atomic layer deposited W nanobridges. Nanoscale. 7: 17923-8. PMID 26463738 DOI: 10.1039/C5Nr04885K  0.496
2015 Xie M, Piper DM, Tian M, Clancey J, George SM, Lee SH, Zhou Y. Doped Si nanoparticles with conformal carbon coating and cyclized-polyacrylonitrile network as high-capacity and high-rate lithium-ion battery anodes. Nanotechnology. 26: 365401. PMID 26289444 DOI: 10.1088/0957-4484/26/36/365401  0.364
2015 Ma Y, Martinez de la Hoz JM, Angarita I, Berrio-Sanchez JM, Benitez L, Seminario JM, Son SB, Lee SH, George SM, Ban C, Balbuena PB. Structure and Reactivity of Alucone-Coated Films on Si and LixSiy Surfaces. Acs Applied Materials & Interfaces. 7: 11948-55. PMID 25985821 DOI: 10.1021/Acsami.5B01917  0.508
2015 Young MJ, Musgrave CB, George SM. Growth and Characterization of Al2O3 Atomic Layer Deposition Films on sp(2)-Graphitic Carbon Substrates Using NO2/Trimethylaluminum Pretreatment. Acs Applied Materials & Interfaces. 7: 12030-7. PMID 25965097 DOI: 10.1021/Acsami.5B02167  0.554
2015 Luo L, Yang H, Yan P, Travis JJ, Lee Y, Liu N, Molina Piper D, Lee SH, Zhao P, George SM, Zhang JG, Cui Y, Zhang S, Ban C, Wang CM. Surface-coating regulated lithiation kinetics and degradation in silicon nanowires for lithium ion battery. Acs Nano. 9: 5559-66. PMID 25893684 DOI: 10.1021/Acsnano.5B01681  0.374
2015 Lee Y, George SM. Atomic layer etching of Al2O3 using sequential, self-limiting thermal reactions with Sn(acac)2 and hydrogen fluoride. Acs Nano. 9: 2061-70. PMID 25604976 DOI: 10.1021/Nn507277F  0.459
2015 Young MJ, Neuber M, Cavanagh AC, Sun H, Musgrave CB, George SM. Sodium charge storage in thin films of MnO2 derived by electrochemical oxidation of MnO atomic layer deposition films Journal of the Electrochemical Society. 162: A2753-A2761. DOI: 10.1149/2.0671514Jes  0.506
2015 Xie M, Sun X, Zhou C, Cavanagh AS, Sun H, Hu T, Wang G, Lian J, George SM. Amorphous ultrathin TiO2 atomic layer deposition films on carbon nanotubes as anodes for lithium ion batteries Journal of the Electrochemical Society. 162: A974-A981. DOI: 10.1149/2.0501506Jes  0.741
2015 Woo JH, Travis JJ, George SM, Lee SH. Utilization of Al2O3 atomic layer deposition for Li ion pathways in solid state Li batteries Journal of the Electrochemical Society. 162: A344-A349. DOI: 10.1149/2.0441503Jes  0.395
2015 Lee Y, Dumont JW, George SM. Atomic layer etching of HfO2 using sequential, self-limiting thermal reactions with Sn(acac)2 and HF Ecs Journal of Solid State Science and Technology. 4: N5013-N5022. DOI: 10.1149/2.0041506Jss  0.405
2015 Lee Y, DuMont JW, George SM. Atomic layer etching using thermal reactions: Atomic layer deposition in reverse Ecs Transactions. 69: 233-241. DOI: 10.1149/06907.0233ecst  0.308
2015 Sharma K, Hall RA, George SM. Spatial atomic layer deposition on flexible substrates using a modular rotating cylinder reactor Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 33. DOI: 10.1116/1.4902086  0.437
2015 Clancey JW, Cavanagh AS, Kukreja RS, Kongkanand A, George SM. Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 33. DOI: 10.1116/1.4901459  0.758
2015 Xie M, Sun X, Sun H, Porcelli T, George SM, Zhou Y, Lian J. Stabilizing an amorphous V2O5/carbon nanotube paper electrode with conformal TiO2 coating by atomic layer deposition for lithium ion batteries Journal of Materials Chemistry A. 4: 537-544. DOI: 10.1039/C5Ta01949D  0.433
2015 Dumont JW, George SM. Pyrolysis of Alucone Molecular Layer Deposition Films Studied Using in Situ Transmission Fourier Transform Infrared Spectroscopy Journal of Physical Chemistry C. 119: 14603-14612. DOI: 10.1021/Jp512074N  0.481
2015 Lee Y, Dumont JW, Cavanagh AS, George SM. Atomic layer deposition of AlF3 using trimethylaluminum and hydrogen fluoride Journal of Physical Chemistry C. 119: 14185-14194. DOI: 10.1021/Acs.Jpcc.5B02625  0.769
2015 Wise AM, Ban C, Weker JN, Misra S, Cavanagh AS, Wu Z, Li Z, Whittingham MS, Xu K, George SM, Toney MF. Effect of Al2O3 Coating on Stabilizing LiNi0.4Mn0.4Co0.2O2 Cathodes Chemistry of Materials. 27: 6146-6154. DOI: 10.1021/Acs.Chemmater.5B02952  0.706
2015 Lee W, Jeon W, An CH, Chung MJ, Kim HJ, Eom T, George SM, Park BK, Han JH, Kim CG, Chung TM, Lee SW, Hwang CS. Improved Initial Growth Behavior of SrO and SrTiO3 Films Grown by Atomic Layer Deposition Using {Sr(demamp)(tmhd)}2 as Sr-Precursor Chemistry of Materials. 27: 3881-3891. DOI: 10.1021/acs.chemmater.5b00843  0.416
2015 Lee Y, Dumont JW, George SM. Mechanism of thermal Al2O3 atomic layer etching using sequential reactions with Sn(acac)2 and HF Chemistry of Materials. 27: 3648-3657. DOI: 10.1021/Acs.Chemmater.5B00300  0.389
2015 Molina Piper D, Son SB, Travis JJ, Lee Y, Han SS, Kim SC, Oh KH, George SM, Lee SH, Ban C. Mitigating irreversible capacity losses from carbon agents via surface modification Journal of Power Sources. 275: 605-611. DOI: 10.1016/J.Jpowsour.2014.11.032  0.408
2015 Biserni E, Xie M, Brescia R, Scarpellini A, Hashempour M, Movahed P, George SM, Bestetti M, Li Bassi A, Bruno P. Silicon algae with carbon topping as thin-film anodes for lithium-ion microbatteries by a two-step facile method Journal of Power Sources. 274: 252-259. DOI: 10.1016/J.Jpowsour.2014.09.140  0.431
2014 He Y, Piper DM, Gu M, Travis JJ, George SM, Lee SH, Genc A, Pullan L, Liu J, Mao SX, Zhang JG, Ban C, Wang C. In situ transmission electron microscopy probing of native oxide and artificial layers on silicon nanoparticles for lithium ion batteries. Acs Nano. 8: 11816-23. PMID 25347792 DOI: 10.1021/Nn505523C  0.399
2014 Weber JC, Blanchard PT, Sanders AW, Gertsch JC, George SM, Berweger S, Imtiaz A, Coakley KJ, Wallis TM, Bertness KA, Kabos P, Sanford NA, Bright VM. GaN nanowire coated with atomic layer deposition of tungsten: a probe for near-field scanning microwave microscopy. Nanotechnology. 25: 415502. PMID 25258349 DOI: 10.1088/0957-4484/25/41/415502  0.414
2014 Lee BH, Anderson VR, George SM. Growth and properties of hafnicone and HfO(2)/hafnicone nanolaminate and alloy films using molecular layer deposition techniques. Acs Applied Materials & Interfaces. 6: 16880-7. PMID 25203487 DOI: 10.1021/Am504341R  0.553
2014 Sun X, Zhou C, Xie M, Hu T, Sun H, Xin G, Wang G, George SM, Lian J. Amorphous vanadium oxide coating on graphene by atomic layer deposition for stable high energy lithium ion anodes. Chemical Communications (Cambridge, England). 50: 10703-6. PMID 25079002 DOI: 10.1039/C4Cc04580G  0.427
2014 Eigenfeld NT, Gray JM, Brown JJ, Skidmore GD, George SM, Bright VM. Ultra-thin 3D nano-devices from atomic layer deposition on polyimide. Advanced Materials (Deerfield Beach, Fla.). 26: 3962-7. PMID 24692235 DOI: 10.1002/Adma.201400410  0.388
2014 Piper DM, Travis JJ, Young M, Son SB, Kim SC, Oh KH, George SM, Ban C, Lee SH. Reversible high-capacity Si nanocomposite anodes for lithium-ion batteries enabled by molecular layer deposition. Advanced Materials (Deerfield Beach, Fla.). 26: 1596-601. PMID 24353043 DOI: 10.1002/Adma.201304714  0.409
2014 Anderson VR, Cavanagh AS, Abdulagatov AI, Gibbs ZM, George SM. Waterless TiO2 atomic layer deposition using titanium tetrachloride and titanium tetraisopropoxide Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 32. DOI: 10.1116/1.4839015  0.825
2014 George SM. Atomic layer deposition of ultrathin and continuous metal films 2014 Ieee International Interconnect Technology Conference / Advanced Metallization Conference, Iitc/Amc 2014. 325-326. DOI: 10.1109/IITC.2014.6831898  0.396
2014 Gray JM, Houlton JP, Gertsch JC, Brown JJ, Rogers CT, George SM, Bright VM. Hemispherical micro-resonators from atomic layer deposition Journal of Micromechanics and Microengineering. 24. DOI: 10.1088/0960-1317/24/12/125028  0.378
2014 Sun X, Zhou C, Xie M, Sun H, Hu T, Lu F, Scott SM, George SM, Lian J. Synthesis of ZnO quantum dot/graphene nanocomposites by atomic layer deposition with high lithium storage capacity Journal of Materials Chemistry A. 2: 7319-7326. DOI: 10.1039/C4Ta00589A  0.341
2014 Higgs DJ, Young MJ, Bertrand JA, George SM. Oxidation kinetics of calcium films by water vapor and their effect on water vapor transmission rate measurements Journal of Physical Chemistry C. 118: 29322-29332. DOI: 10.1021/Jp505508C  0.802
2014 Anderson VR, Leick N, Clancey JW, Hurst KE, Jones KM, Dillon AC, George SM. Atomic layer deposition of platinum nanoparticles on titanium oxide and tungsten oxide using platinum(II) hexafluoroacetylacetonate and formalin as the reactants Journal of Physical Chemistry C. 118: 8960-8970. DOI: 10.1021/Jp412539Y  0.32
2014 Lee BH, Anderson VR, George SM. Growth and properties of hafnicone and HfO2/Hafnicone nanolaminate and alloy films using molecular layer deposition techniques Acs Applied Materials and Interfaces. 6: 16880-16887. DOI: 10.1021/am504341r  0.392
2014 Kim JW, Travis JJ, Hu E, Nam KW, Kim SC, Kang CS, Woo JH, Yang XQ, George SM, Oh KH, Cho SJ, Lee SH. Unexpected high power performance of atomic layer deposition coated Li[Ni1/3Mn1/3Co1/3]O2 cathodes Journal of Power Sources. 254: 190-197. DOI: 10.1016/J.Jpowsour.2013.12.119  0.42
2014 Hu T, Xie M, Zhong J, Sun HT, Sun X, Scott S, George SM, Liu CS, Lian J. Porous Fe2O3 nanorods anchored on nitrogen-doped graphenes and ultrathin Al2O3 coating by atomic layer deposition for long-lived lithium ion battery anode Carbon. 76: 141-147. DOI: 10.1016/J.Carbon.2014.04.060  0.362
2014 Hall RA, George SM, Kim Y, Hwang W, Samberg ME, Monteiro-Riviere NA, Narayan RJ. Growth of zircone on nanoporous alumina using molecular layer deposition Jom. 66: 649-653. DOI: 10.1007/S11837-014-0933-Z  0.483
2013 Liu J, Yoon B, Kuhlmann E, Tian M, Zhu J, George SM, Lee YC, Yang R. Ultralow thermal conductivity of atomic/molecular layer-deposited hybrid organic-inorganic zincone thin films. Nano Letters. 13: 5594-9. PMID 24164650 DOI: 10.1021/Nl403244S  0.476
2013 Ban C, Xie M, Sun X, Travis JJ, Wang G, Sun H, Dillon AC, Lian J, George SM. Atomic layer deposition of amorphous TiO2 on graphene as an anode for Li-ion batteries. Nanotechnology. 24: 424002. PMID 24067324 DOI: 10.1088/0957-4484/24/42/424002  0.457
2013 Brown JJ, Hall RA, Kladitis PE, George SM, Bright VM. Molecular layer deposition on carbon nanotubes. Acs Nano. 7: 7812-23. PMID 23941544 DOI: 10.1021/Nn402733G  0.451
2013 Bertrand JA, Higgs DJ, Young MJ, George SM. H2O vapor transmission rate through polyethylene naphthalate polymer using the electrical Ca test. The Journal of Physical Chemistry. A. 117: 12026-34. PMID 23898915 DOI: 10.1021/Jp4043057  0.807
2013 Periasamy P, Guthrey HL, Abdulagatov AI, Ndione PF, Berry JJ, Ginley DS, George SM, Parilla PA, O'Hayre RP. Metal-insulator-metal diodes: role of the insulator layer on the rectification performance. Advanced Materials (Deerfield Beach, Fla.). 25: 1301-8. PMID 23288580 DOI: 10.1002/Adma.201203075  0.684
2013 Jen SH, George SM, McLean RS, Carcia PF. Alucone interlayers to minimize stress caused by thermal expansion mismatch between Al₂O₃ films and Teflon substrates. Acs Applied Materials & Interfaces. 5: 1165-73. PMID 23272996 DOI: 10.1021/Am303077X  0.487
2013 Cavanagh AS, Baker L, Clancey JW, Yin J, Kongkanand A, Wagner FT, George SM. In situ characterization of plasma-assisted Pt ALD on W ALD adhesion layers with spectroscopic ellipsometry Ecs Transactions. 58: 19-26. DOI: 10.1149/05810.0019ecst  0.656
2013 Parsons GN, Elam JW, George SM, Haukka S, Jeon H, Kessels WMM, Leskelä M, Poodt P, Ritala M, Rossnagel SM. History of atomic layer deposition and its relationship with the American Vacuum Society Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 31. DOI: 10.1116/1.4816548  0.597
2013 Bertrand JA, George SM. Evaluating Al2O3 gas diffusion barriers grown directly on Ca films using atomic layer deposition techniques Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 31. DOI: 10.1116/1.4763360  0.826
2013 George SM, Lee BH, Yoon B, Jen SH. Hybrid organic-inorganic films fabricated using atomic and molecular layer deposition 2013 Transducers and Eurosensors Xxvii: the 17th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013. 9-13. DOI: 10.1109/Transducers.2013.6626688  0.413
2013 Dai X, Famouri M, Abdulagatov AI, Yang R, Lee YC, George SM, Li C. Capillary evaporation on micromembrane-enhanced microchannel wicks with atomic layer deposited silica Applied Physics Letters. 103. DOI: 10.1063/1.4824439  0.778
2013 Sun X, Xie M, Travis JJ, Wang G, Sun H, Lian J, George SM. Pseudocapacitance of amorphous TiO2 thin films anchored to graphene and carbon nanotubes using atomic layer deposition Journal of Physical Chemistry C. 117: 22497-22508. DOI: 10.1021/Jp4066955  0.476
2013 Abdulagatov AI, Terauds KE, Travis JJ, Cavanagh AS, Raj R, George SM. Pyrolysis of titanicone molecular layer deposition films as precursors for conducting TiO2/carbon composite films Journal of Physical Chemistry C. 117: 17442-17450. DOI: 10.1021/Jp4051947  0.839
2013 Bertrand JA, Higgs DJ, Young MJ, George SM. H2O vapor transmission rate through polyethylene naphthalate polymer using the electrical Ca test Journal of Physical Chemistry A. 117: 12026-12034. DOI: 10.1021/jp4043057  0.669
2013 Warburton WK, Hennig W, Bertrand JA, George SM, Biegalski S. Atomic layer deposition α-Al2O3 diffusion barriers to eliminate the memory effect in beta-gamma radioxenon detectors Journal of Radioanalytical and Nuclear Chemistry. 296: 541-549. DOI: 10.1007/S10967-012-2061-Y  0.816
2013 Lee BH, Anderson VR, George SM. Molecular layer deposition of zircone and ZrO2/zircone alloy films: Growth and properties Chemical Vapor Deposition. 19: 204-212. DOI: 10.1002/Cvde.201207045  0.544
2013 Jung YS, Lu P, Cavanagh AS, Ban C, Kim GH, Lee SH, George SM, Harris SJ, Dillon AC. Unexpected improved performance of ALD coated LiCoO2/graphite li-ion batteries Advanced Energy Materials. 3: 213-219. DOI: 10.1002/Aenm.201200370  0.676
2013 Lee BH, Yoon B, Abdulagatov AI, Hall RA, George SM. Growth and properties of hybrid organic-inorganic metalcone films using molecular layer deposition techniques Advanced Functional Materials. 23: 532-546. DOI: 10.1002/Adfm.201200370  0.74
2012 Wang L, Travis JJ, Cavanagh AS, Liu X, Koenig SP, Huang PY, George SM, Bunch JS. Ultrathin oxide films by atomic layer deposition on graphene. Nano Letters. 12: 3706-10. PMID 22716769 DOI: 10.1021/Nl3014956  0.755
2012 Wang W, Tian M, Abdulagatov A, George SM, Lee YC, Yang R. Three-dimensional Ni/TiO2 nanowire network for high areal capacity lithium ion microbattery applications. Nano Letters. 12: 655-60. PMID 22208851 DOI: 10.1021/Nl203434G  0.705
2012 Woo JH, Trevey JE, Cavanagh AS, Choi YS, Kim SC, George SM, Oh KH, Lee SH. Nanoscale interface Modification of LiCoO2 by Al 2O3 atomic layer deposition for solid-state Li batteries Journal of the Electrochemical Society. 159: A1120-A1124. DOI: 10.1149/2.085207Jes  0.72
2012 Sun X, Xie M, Wang G, Sun H, Cavanagh AS, Travis JJ, George SM, Lian J. Atomic layer deposition of TiO 2 on graphene for supercapacitors Journal of the Electrochemical Society. 159. DOI: 10.1149/2.025204Jes  0.685
2012 Poodt P, Cameron DC, Dickey E, George SM, Kuznetsov V, Parsons GN, Roozeboom F, Sundaram G, Vermeer A. Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 30. DOI: 10.1116/1.3670745  0.45
2012 Fitzpatrick PR, Gibbs ZM, George SM. Evaluating operating conditions for continuous atmospheric atomic layer deposition using a multiple slit gas source head Journal of Vacuum Science and Technology. 30. DOI: 10.1116/1.3664765  0.325
2012 Blanchard PT, Bertness KA, Harvey TE, Sanders AW, Sanford NA, George SM, Seghete D. MOSFETs made from GaN nanowires with fully conformal cylindrical gates Ieee Transactions On Nanotechnology. 11: 479-482. DOI: 10.1109/Tnano.2011.2177993  0.757
2012 Jen SH, Lee BH, George SM, McLean RS, Carcia PF. Critical tensile strain and water vapor transmission rate for nanolaminate films grown using Al2O3 atomic layer deposition and alucone molecular layer deposition Applied Physics Letters. 101. DOI: 10.1063/1.4766731  0.547
2012 Baker L, Cavanagh AS, Yin J, George SM, Kongkanand A, Wagner FT. Growth of continuous and ultrathin platinum films on tungsten adhesion layers using atomic layer deposition techniques Applied Physics Letters. 101. DOI: 10.1063/1.4749819  0.778
2012 Yoon B, Lee BH, George SM. Highly conductive and transparent hybrid organic-inorganic zincone thin films using atomic and molecular layer deposition Journal of Physical Chemistry C. 116: 24784-24791. DOI: 10.1021/Jp3057477  0.53
2012 Lee BH, Yoon B, Anderson VR, George SM. Alucone Alloys with Tunable Properties Using Alucone Molecular Layer Deposition and Al2O3 Atomic Layer Deposition Journal of Physical Chemistry C. 116: 3250-3257. DOI: 10.1021/Jp209003H  0.498
2012 Abdulagatov AI, Hall RA, Sutherland JL, Lee BH, Cavanagh AS, George SM. Molecular layer deposition of titanicone films using TiCl 4 and ethylene glycol or glycerol: Growth and properties Chemistry of Materials. 24: 2854-2863. DOI: 10.1021/Cm300162V  0.85
2012 Jung YS, Cavanagh AS, Gedvilas L, Widjonarko NE, Scott ID, Lee SH, Kim GH, George SM, Dillon AC. Improved functionality of lithium-ion batteries enabled by atomic layer deposition on the porous microstructure of polymer separators and coating electrodes Advanced Energy Materials. 2: 1022-1027. DOI: 10.1002/Aenm.201100750  0.715
2011 George SM, Lee BH, Yoon B, Abdulagatov AI, Hall RA. Metalcones: hybrid organic-inorganic films fabricated using atomic and molecular layer deposition techniques. Journal of Nanoscience and Nanotechnology. 11: 7948-55. PMID 22097511 DOI: 10.1166/Jnn.2011.5034  0.773
2011 Abdulagatov AI, Yan Y, Cooper JR, Zhang Y, Gibbs ZM, Cavanagh AS, Yang RG, Lee YC, George SM. Al2O3 and TiO2 atomic layer deposition on copper for water corrosion resistance. Acs Applied Materials & Interfaces. 3: 4593-601. PMID 22032254 DOI: 10.1021/Am2009579  0.825
2011 Lee Y, Yoon B, Cavanagh AS, George SM. Molecular layer deposition of aluminum alkoxide polymer films using trimethylaluminum and glycidol. Langmuir : the Acs Journal of Surfaces and Colloids. 27: 15155-64. PMID 22029704 DOI: 10.1021/La202391H  0.762
2011 Leung K, Qi Y, Zavadil KR, Jung YS, Dillon AC, Cavanagh AS, Lee SH, George SM. Using atomic layer deposition to hinder solvent decomposition in lithium ion batteries: first-principles modeling and experimental studies. Journal of the American Chemical Society. 133: 14741-54. PMID 21797223 DOI: 10.1021/Ja205119G  0.706
2011 Scott ID, Jung YS, Cavanagh AS, Yan Y, Dillon AC, George SM, Lee SH. Ultrathin coatings on nano-LiCoO2 for Li-ion vehicular applications. Nano Letters. 11: 414-8. PMID 21166425 DOI: 10.1021/Nl1030198  0.682
2011 Parsons GN, George SM, Knez M. Progress and future directions for atomic layer deposition and ALD-based chemistry Mrs Bulletin. 36: 865-871. DOI: 10.1557/Mrs.2011.238  0.434
2011 Seok Jung Y, Cavanagh AS, Yan Y, George SM, Manthiram A. Effects of atomic layer deposition of Al2O3 on the LiLi0.20Mn0.54Ni0.13Co0.13O 2 cathode for lithium-ion batteries Journal of the Electrochemical Society. 158. DOI: 10.1149/2.030112Jes  0.733
2011 Riley LA, Cavanagh AS, George SM, Lee SH, Dillon AC. Improved mechanical integrity of ALD-coated composite electrodes for Li-Ion batteries Electrochemical and Solid-State Letters. 14: A29-A31. DOI: 10.1149/1.3529367  0.692
2011 Jen S, Bertrand JA, George SM. Critical tensile and compressive strains for cracking of Al2O3 films grown by atomic layer deposition Journal of Applied Physics. 109: 84305. DOI: 10.1063/1.3567912  0.822
2011 Baker L, Cavanagh AS, Seghete D, George SM, MacKus AJM, Kessels WMM, Liu ZY, Wagner FT. Nucleation and growth of Pt atomic layer deposition on Al2O 3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma Journal of Applied Physics. 109. DOI: 10.1063/1.3555091  0.813
2011 Seghete D, Rayner GB, Cavanagh AS, Anderson VR, George SM. Molybdenum atomic layer deposition using MoF6 and Si 2H6 as the reactants Chemistry of Materials. 23: 1668-1678. DOI: 10.1021/Cm101673U  0.826
2011 Zhang Y, Yang R, George SM, Lee Y. In-situ inspection of cracking in atomic-layer-deposited barrier films on surface and in buried structures Thin Solid Films. 520: 251-257. DOI: 10.1016/J.Tsf.2011.07.056  0.468
2011 Dillon AC, Riley LA, Jung YS, Ban C, Molina D, Mahan AH, Cavanagh AS, George SM, Lee SH. HWCVD MoO3 nanoparticles and a-Si for next generation Li-ion anodes Thin Solid Films. 519: 4495-4497. DOI: 10.1016/J.Tsf.2011.01.337  0.698
2011 Seghete D, Fabreguette FH, George SM. Using a slit doser to probe gas dynamics during Al2O3 atomic layer deposition and to fabricate laterally graded Al2O3 layers Thin Solid Films. 519: 3612-3618. DOI: 10.1016/J.Tsf.2011.01.285  0.805
2011 Zhang Y, Seghete D, Abdulagatov A, Gibbs Z, Cavanagh A, Yang R, George S, Lee Y. Investigation of the defect density in ultra-thin Al2O3 films grown using atomic layer deposition Surface and Coatings Technology. 205: 3334-3339. DOI: 10.1016/J.Surfcoat.2010.12.001  0.834
2011 Montague JR, Dalberth M, Gray JM, Seghete D, Bertness KA, George SM, Bright VM, Rogers CT, Sanford NA. Analysis of high-Q, gallium nitride nanowire resonators in response to deposited thin films Sensors and Actuators, a: Physical. 165: 59-65. DOI: 10.1016/J.Sna.2010.03.014  0.799
2011 Davidson BD, Seghete D, George SM, Bright VM. ALD tungsten NEMS switches and tunneling devices Sensors and Actuators, a: Physical. 166: 269-276. DOI: 10.1016/J.Sna.2009.07.022  0.727
2011 Riley LA, Van Atta S, Cavanagh AS, Yan Y, George SM, Liu P, Dillon AC, Lee SH. Electrochemical effects of ALD surface modification on combustion synthesized LiNi1/3Mn1/3Co1/3O2 as a layered-cathode material Journal of Power Sources. 196: 3317-3324. DOI: 10.1016/J.Jpowsour.2010.11.124  0.725
2011 Kang E, Jung YS, Cavanagh AS, Kim GH, George SM, Dillon AC, Kim JK, Lee J. Fe3O4 nanoparticles confined in mesocellular carbon foam for high performance anode materials for lithium-ion batteries Advanced Functional Materials. 21: 2430-2438. DOI: 10.1002/Adfm.201002576  0.671
2010 Seghete D, Hall RA, Yoon B, George SM. Importance of trimethylaluminum diffusion in three-step ABC molecular layer deposition using trimethylaluminum, ethanolamine, and maleic anhydride. Langmuir : the Acs Journal of Surfaces and Colloids. 26: 19045-51. PMID 21117634 DOI: 10.1021/La102649X  0.81
2010 Guo DJ, Abdulagatov AI, Rourke DM, Bertness KA, George SM, Lee YC, Tan W. GaN nanowire functionalized with atomic layer deposition techniques for enhanced immobilization of biomolecules. Langmuir : the Acs Journal of Surfaces and Colloids. 26: 18382-91. PMID 21033757 DOI: 10.1021/La103337A  0.762
2010 Minton TK, Wu B, Zhang J, Lindholm NF, Abdulagatov AI, O'Patchen J, George SM, Groner MD. Protecting polymers in space with atomic layer deposition coatings Acs Applied Materials and Interfaces. 2: 2515-2520. PMID 20738090 DOI: 10.1021/Am100217M  0.764
2010 Riley LA, Cavanagh AS, George SM, Jung YS, Yan Y, Lee SH, Dillon AC. Conformal surface coatings to enable high volume expansion Li-ion anode materials. Chemphyschem : a European Journal of Chemical Physics and Physical Chemistry. 11: 2124-30. PMID 20449864 DOI: 10.1002/Cphc.201000158  0.695
2010 Jung YS, Cavanagh AS, Riley LA, Kang SH, Dillon AC, Groner MD, George SM, Lee SH. Ultrathin direct atomic layer deposition on composite electrodes for highly durable and safe Li-ion batteries. Advanced Materials (Deerfield Beach, Fla.). 22: 2172-6. PMID 20376820 DOI: 10.1002/Adma.200903951  0.701
2010 George SM. Atomic layer deposition: an overview. Chemical Reviews. 110: 111-31. PMID 19947596 DOI: 10.1021/Cr900056B  0.432
2010 Wind RA, George SM. Quartz crystal microbalance studies of Al2O3 atomic layer deposition using trimethylaluminum and water at 125 degrees C. The Journal of Physical Chemistry. A. 114: 1281-9. PMID 19757806 DOI: 10.1021/Jp9049268  0.304
2010 Jung YS, Cavanagh AS, Dillon AC, Groner MD, George SM, Lee S. Enhanced Stability of LiCoO 2 Cathodes in Lithium-ion Batteries Using Surface Modification by Atomic Layer Deposition Journal of the Korean Ceramic Society. 47: 61-65. DOI: 10.4191/Kcers.2010.47.1.061  0.759
2010 Jung YS, Cavanagh AS, Dillon AC, Groner MD, George SM, Lee SH. Enhanced stability of LiCoO2 cathodes in lithium-ion batteries using surface modification by atomic layer deposition Journal of the Electrochemical Society. 157. DOI: 10.1149/1.3258274  0.768
2010 Sanford NA, Blanchard PT, Bertness KA, Mansfield L, Schlager JB, Sanders AW, Roshko A, Burton BB, George SM. Steady-state and transient photoconductivity in c -axis GaN nanowires grown by nitrogen-plasma-assisted molecular beam epitaxy Journal of Applied Physics. 107. DOI: 10.1063/1.3275888  0.791
2010 Kim JY, George SM. Tin Monosulfide Thin Films Grown by Atomic Layer Deposition Using Tin 2,4-Pentanedionate and Hydrogen Sulfide Journal of Physical Chemistry C. 114: 17597-17603. DOI: 10.1021/Jp9120244  0.54
2010 Sarkar SK, Kim JY, Goldstein DN, Neale NR, Zhu K, Elliott CM, Frank AJ, George SM. In2S3 atomic layer deposition and its application as a sensitizer on TiO2 nanotube arrays for solar energy conversion Acs National Meeting Book of Abstracts. DOI: 10.1021/Jp9086943  0.459
2010 Miller DC, Foster RR, Jen SH, Bertrand JA, Cunningham SJ, Morris AS, Lee YC, George SM, Dunn ML. Thermo-mechanical properties of alumina films created using the atomic layer deposition technique Sensors and Actuators, a: Physical. 164: 58-67. DOI: 10.1016/J.Sna.2010.09.018  0.838
2009 Cavanagh AS, Wilson CA, Weimer AW, George SM. Atomic layer deposition on gram quantities of multi-walled carbon nanotubes. Nanotechnology. 20: 255602. PMID 19491468 DOI: 10.1088/0957-4484/20/25/255602  0.745
2009 George SM, Yoon B, Dameron AA. Surface chemistry for molecular layer deposition of organic and hybrid organic-inorganic polymers. Accounts of Chemical Research. 42: 498-508. PMID 19249861 DOI: 10.1021/Ar800105Q  0.474
2009 Lee M, Cheng JH, Bertness K, Sanford N, Seghete D, George S, Lee YC. Atomic layer deposition enabled interconnect technology for vertical nanowire array devices Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 2054-2057. DOI: 10.1109/Sensor.2009.5285638  0.78
2009 Goldstein DN, George SM. Enhancing the nucleation of palladium atomic layer deposition on Al2O3 using trimethylaluminum to prevent surface poisoning by reaction products Applied Physics Letters. 95: 143106. DOI: 10.1063/1.3238558  0.428
2009 Carcia PF, McLean RS, Groner MD, Dameron AA, George SM. Gas diffusion ultrabarriers on polymer substrates using Al2 O3 atomic layer deposition and SiN plasma-enhanced chemical vapor deposition Journal of Applied Physics. 106. DOI: 10.1063/1.3159639  0.536
2009 Miller DC, Foster RR, Zhang Y, Jen SH, Bertrand JA, Lu Z, Seghete D, O'Patchen JL, Yang R, Lee YC, George SM, Dunn ML. The mechanical robustness of atomic-layer- and molecular-layer-deposited coatings on polymer substrates Journal of Applied Physics. 105. DOI: 10.1063/1.3124642  0.83
2009 Wind RW, Fabreguette FH, Sechrist ZA, George SM. Nucleation period, surface roughness, and oscillations in mass gain per cycle during W atomic layer deposition on Al2O3 Journal of Applied Physics. 105: 074309. DOI: 10.1063/1.3103254  0.824
2009 Burton BB, Kang SW, Rhee SW, George SM. SiO2 Atomic Layer Deposition Using Tris(dimethylamino)silane and Hydrogen Peroxide Studied by in Situ Transmission FTIR Spectroscopy Journal of Physical Chemistry C. 113: 8249-8257. DOI: 10.1021/Jp806638E  0.81
2009 Burton BB, Goldstein DN, George SM. Atomic Layer Deposition of MgO Using Bis(ethylcyclopentadienyl)magnesium and H2O Journal of Physical Chemistry C. 113: 1939-1946. DOI: 10.1021/Jp806088M  0.858
2009 Yoon B, Seghete D, Cavanagh AS, George SM. Molecular layer deposition of hybrid organic - Inorganic alucone polymer films using a three-step abc reaction sequence Chemistry of Materials. 21: 5365-5374. DOI: 10.1021/Cm9013267  0.848
2009 Zhang Y, Zhang Y, Miller DC, Bertrand JA, Jen S, Yang R, Dunn ML, George SM, Lee Y. Fluorescent tags to visualize defects in Al2O3 thin films grown using atomic layer deposition Thin Solid Films. 517: 6794-6797. DOI: 10.1016/J.Tsf.2009.05.037  0.832
2009 Burton BB, Fabreguette FH, George SM. Atomic layer deposition of MnO using Bis(ethylcyclopentadienyl)manganese and H2O Thin Solid Films. 517: 5658-5665. DOI: 10.1016/J.Tsf.2009.02.050  0.853
2009 Ott A, Klaus J, Johnson J, George S. Erratum to “Al2O3 thin film growth on Si (100) using binary reaction sequence chemistry” [Thin Solid Films 292 (1997) 135–144] Thin Solid Films. 517: 5950. DOI: 10.1016/J.Tsf.2009.01.027  0.451
2009 Zhang Y, Bertrand JA, Yang R, George SM, Lee Y. Electroplating to visualize defects in Al2O3 thin films grown using atomic layer deposition Thin Solid Films. 517: 3269-3272. DOI: 10.1016/J.Tsf.2008.12.052  0.848
2009 Scheffe JR, Francés A, King DM, Liang X, Branch BA, Cavanagh AS, George SM, Weimer AW. Atomic layer deposition of iron(III) oxide on zirconia nanoparticles in a fluidized bed reactor using ferrocene and oxygen Thin Solid Films. 517: 1874-1879. DOI: 10.1016/J.Tsf.2008.09.086  0.761
2009 Seghete D, Davidson BD, Hall RA, Chang YJ, Bright VM, George SM. Sacrificial layers for air gaps in NEMS using alucone molecular layer deposition Sensors and Actuators, a: Physical. 155: 8-15. DOI: 10.1016/J.Sna.2008.12.016  0.815
2009 Chang YJ, Gray JM, Imtiaz A, Seghete D, Mitch Wallis T, George SM, Kabos P, Rogers CT, Bright VM. Micromachined resonators of high Q-factor based on atomic layer deposited alumina Sensors and Actuators, a: Physical. 154: 229-237. DOI: 10.1016/J.Sna.2008.11.015  0.764
2009 Miller DC, Foster RR, Jen SH, Bertrand JA, Seghete D, Yoon B, Lee YC, George SM, Dunn ML. Thermomechanical properties of aluminum alkoxide (alucone) films created using molecular layer deposition Acta Materialia. 57: 5083-5092. DOI: 10.1016/J.Actamat.2009.07.015  0.834
2009 Yoon B, O'Patchen JL, Seghete D, Cavanagh AS, George SM. Molecular layer deposition of hybrid organic-inorganic polymer films using diethylzinc and ethylene glycol Chemical Vapor Deposition. 15: 112-121. DOI: 10.1002/Cvde.200806756  0.844
2009 Liang X, King DM, Li P, George SM, Weimer AW. Nanocoating hybrid polymer films on large quantities of cohesive nanoparticles by molecular layer deposition Aiche Journal. 55: 1030-1039. DOI: 10.1002/Aic.11757  0.501
2008 Du X, Du Y, George SM. CO gas sensing by ultrathin tin oxide films grown by atomic layer deposition using transmission FTIR spectroscopy. Journal of Physical Chemistry A. 112: 9211-9219. PMID 18710189 DOI: 10.1021/Jp800518V  0.719
2008 Finch DS, Oreskovic T, Ramadurai K, Herrmann CF, George SM, Mahajan RL. Biocompatibility of atomic layer-deposited alumina thin films. Journal of Biomedical Materials Research. Part A. 87: 100-6. PMID 18085647 DOI: 10.1002/Jbm.A.31732  0.444
2008 Burton BB, Lavoie AR, George SM. Tantalum Nitride Atomic Layer Deposition Using (tert-Butylimido)tris(diethylamido)tantalum and Hydrazine Journal of the Electrochemical Society. 155. DOI: 10.1149/1.2908741  0.823
2008 Wilson CA, Goldstein DN, McCormick JA, Weimer AW, George SM. Tungsten atomic layer deposition on cobalt nanoparticles Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 26: 430-437. DOI: 10.1116/1.2902956  0.728
2008 Weimer MA, Hakim LF, King DM, Liang X, Weimer AW, George SM, Li P, Groner MD. Ultrafast metal-insulator varistors based on tunable Al2 O3 tunnel junctions Applied Physics Letters. 92. DOI: 10.1063/1.2913763  0.399
2008 Goldstein DN, McCormick JA, George SM. Al 2O 3 Atomic layer deposition with trimethylaluminum and ozone studied by in situ transmission FTIR spectroscopy and quadrupole mass spectrometry Journal of Physical Chemistry C. 112: 19530-19539. DOI: 10.1021/Jp804296A  0.692
2008 Dameron AA, Davidson SD, Burton BB, Carcia PF, Scott McLean R, George SM. Gas diffusion barriers on polymers using multilayers fabricated by Al 2O3 and rapid SiO2 atomic layer deposition Journal of Physical Chemistry C. 112: 4573-4580. DOI: 10.1021/Jp076866+  0.85
2008 Burton BB, Boleslawski MP, Desombre AT, George SM. Rapid SiO2 Atomic Layer Deposition Using Tris(tert-pentoxy)silanol Chemistry of Materials. 20: 7031-7043. DOI: 10.1021/Cm801738Z  0.854
2008 Dameron AA, Seghete D, Burton BB, Davidson SD, Cavanagh AS, Bertrand JA, George SM. Molecular layer deposition of alucone polymer films using trimethylaluminum and ethylene glycol Chemistry of Materials. 20: 3315-3326. DOI: 10.1021/Cm7032977  0.816
2008 Wilson CA, McCormick JA, Cavanagh AS, Goldstein DN, Weimer AW, George SM. Tungsten atomic layer deposition on polymers Thin Solid Films. 516: 6175-6185. DOI: 10.1016/J.Tsf.2007.11.086  0.817
2008 Cooper R, Upadhyaya HP, Minton TK, Berman MR, Du X, George SM. Protection of polymer from atomic-oxygen erosion using Al2O3 atomic layer deposition coatings Thin Solid Films. 516: 4036-4039. DOI: 10.1016/J.Tsf.2007.07.150  0.729
2008 Du X, George SM. Thickness dependence of sensor response for CO gas sensing by tin oxide films grown using atomic layer deposition Sensors and Actuators B-Chemical. 135: 152-160. DOI: 10.1016/J.Snb.2008.08.015  0.723
2008 Liang X, King DM, Groner MD, Blackson JH, Harris JD, George SM, Weimer AW. Barrier properties of polymer/alumina nanocomposite membranes fabricated by atomic layer deposition Journal of Membrane Science. 322: 105-112. DOI: 10.1016/J.Memsci.2008.05.037  0.398
2008 Liang X, Zhan GD, King DM, McCormick JA, Zhang J, George SM, Weimer AW. Alumina atomic layer deposition nanocoatings on primary diamond particles using a fluidized bed reactor Diamond and Related Materials. 17: 185-189. DOI: 10.1016/J.Diamond.2007.12.003  0.749
2007 Cavanagh AS, Wilson CA, Weimer AW, George SM. Atomic Layer Deposition on Quantities of Multiwalled Carbon Nanotubes Mrs Proceedings. 1054. DOI: 10.1557/Proc-1054-Ff03-10  0.698
2007 McCormick JA, Cloutier BL, Weimer AW, George SM. Rotary reactor for atomic layer deposition on large quantities of nanoparticles Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 25: 67-74. DOI: 10.1116/1.2393299  0.687
2007 Liang X, Hakim LF, Zhan GD, McCormick JA, George SM, Weimer AW, Spencer JA, Buechler KJ, Blackson J, Wood CJ, Dorgan JR. Novel processing to produce polymer/ceramic nanocomposites by atomic layer deposition Journal of the American Ceramic Society. 90: 57-63. DOI: 10.1111/J.1551-2916.2006.01359.X  0.681
2007 and YD, George SM. Molecular Layer Deposition of Nylon 66 Films Examined Using in Situ FTIR Spectroscopy Journal of Physical Chemistry C. 111: 8509-8517. DOI: 10.1021/Jp067041N  0.525
2007 Du Y, Du aX, George SM. Mechanism of Pyridine-Catalyzed SiO2 Atomic Layer Deposition Studied by Fourier Transform Infrared Spectroscopy Journal of Physical Chemistry C. 111: 219-226. DOI: 10.1021/Jp0638484  0.409
2007 Fabreguette FH, George SM. X-ray mirrors on flexible polymer substrates fabricated by atomic layer deposition Thin Solid Films. 515: 7177-7180. DOI: 10.1016/J.Tsf.2007.03.044  0.441
2007 Miller DC, Herrmann CF, Maier HJ, George SM, Stoldt CR, Gall K. Thermo-mechanical evolution of multilayer thin films: Part I. Mechanical behavior of Au/Cr/Si microcantilevers Thin Solid Films. 515: 3208-3223. DOI: 10.1016/J.Tsf.2006.01.046  0.413
2007 Miller DC, Herrmann CF, Maier HJ, George SM, Stoldt CR, Gall K. Thermo-mechanical evolution of multilayer thin films: Part II. Microstructure evolution in Au/Cr/Si microcantilevers Thin Solid Films. 515: 3224-3240. DOI: 10.1016/J.Tsf.2006.01.045  0.45
2007 Herrmann CF, DelRio FW, Miller DC, George SM, Bright VM, Ebel JL, Strawser RE, Cortez R, Leedy KD. Alternative dielectric films for rf MEMS capacitive switches deposited using atomic layer deposited Al2O3/ZnO alloys Sensors and Actuators, a: Physical. 135: 262-272. DOI: 10.1016/J.Sna.2006.07.002  0.536
2007 McCormick JA, Rice KP, Paul DF, Weimer AW, George SM. Analysis of Al2O3 atomic layer deposition on ZrO 2 nanoparticles in a rotary reactor Chemical Vapor Deposition. 13: 491-498. DOI: 10.1002/Cvde.200606563  0.688
2007 Hakim LF, King DM, Zhou Y, Gump CJ, George SM, Weimer AW. Nanoparticle coating for advanced optical, mechanical and rheological properties Advanced Functional Materials. 17: 3175-3181. DOI: 10.1002/Adfm.200600877  0.468
2006 Hakim LF, McCormick JA, Zhan GD, Weimer AW, Li P, George SM. Surface modification of titania nanoparticles using ultrathin ceramic films Journal of the American Ceramic Society. 89: 3070-3075. DOI: 10.1111/J.1551-2916.2006.01216.X  0.74
2006 Carcia PF, McLean RS, Reilly MH, Groner MD, George SM. Ca test of Al 2O 3 gas diffusion barriers grown by atomic layer deposition on polymers Applied Physics Letters. 89. DOI: 10.1063/1.2221912  0.404
2006 Groner MD, George SM, McLean RS, Carcia PF. Gas diffusion barriers on polymers using Al 2 O 3 atomic layer deposition Applied Physics Letters. 88: 1-3. DOI: 10.1063/1.2168489  0.467
2006 Fabreguette FH, Wind RA, George SM. Ultrahigh x-ray reflectivity from W/Al 2O 3 multilayers fabricated using atomic layer deposition Applied Physics Letters. 88. DOI: 10.1063/1.2161117  0.455
2006 Sechrist ZA, Schwartz BT, Lee JH, McCormick JA, Piestun R, Park W, George SM. Modification of opal photonic crystals using Al 2O 3 atomic layer deposition Chemistry of Materials. 18: 3562-3570. DOI: 10.1021/Cm060263D  0.832
2005 Hakim LF, George SM, Weimer AW. Conformal nanocoating of zirconia nanoparticles by atomic layer deposition in a fluidized bed reactor. Nanotechnology. 16: S375-81. PMID 21727455 DOI: 10.1088/0957-4484/16/7/010  0.371
2005 Du X, Du Y, George SM. In situ examination of tin oxide atomic layer deposition using quartz crystal microbalance and Fourier transform infrared techniques Journal of Vacuum Science and Technology. 23: 581-588. DOI: 10.1116/1.1914810  0.733
2005 Ferguson JD, Weimer AW, George SM. Surface chemistry and infrared absorbance changes during ZnO atomic layer deposition on ZrO 2 and BaTiO 3 particles Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 23: 118-125. DOI: 10.1116/1.1821585  0.489
2005 Herrmann CF, DelRio FW, Bright VM, George SM. Conformal hydrophobic coatings prepared using atomic layer deposition seed layers and non-chlorinated hydrophobic precursors Journal of Micromechanics and Microengineering. 15: 984-992. DOI: 10.1088/0960-1317/15/5/013  0.529
2005 Herrmann CF, Fabreguette FH, Finch DS, Geiss R, George SM. Multilayer and Functional Coatings on Carbon Nanotubes using Atomic Layer Deposition Applied Physics Letters. 87: 123110. DOI: 10.1063/1.2053358  0.43
2005 Wilson CA, Grubbs RK, George SM. Nucleation and Growth during Al2O3 Atomic Layer Deposition on Polymers Chemistry of Materials. 17: 5625-5634. DOI: 10.1021/Cm050704D  0.481
2005 Sechrist ZA, Fabreguette FH, Heintz O, Phung TM, Johnson DC, George SM. Optimization and structural characterization of W/Al 2O 3 nanolaminates grown using atomic layer deposition techniques Chemistry of Materials. 17: 3475-3485. DOI: 10.1021/Cm050470Y  0.829
2005 Du Y, Du X, George SM. SiO2 film growth at low temperatures by catalyzed atomic layer deposition in a viscous flow reactor Thin Solid Films. 491: 43-53. DOI: 10.1016/J.Tsf.2005.05.051  0.752
2005 Fabreguette F, Sechrist Z, Elam J, George S. Quartz crystal microbalance study of tungsten atomic layer deposition using WF6 and Si2H6 Thin Solid Films. 488: 103-110. DOI: 10.1016/J.Tsf.2005.04.114  0.832
2005 Ferguson JD, Buechler KJ, Weimer AW, George SM. SnO2 atomic layer deposition on ZrO2 and Al nanoparticles: Pathway to enhanced thermite materials Powder Technology. 156: 154-163. DOI: 10.1016/J.Powtec.2005.04.009  0.359
2005 Pellin MJ, Stair PC, Xiong G, Elam JW, Birrell J, Curtiss L, George SM, Han CY, Iton L, Kung H, Kung M, Wang HH. Mesoporous catalytic membranes: Synthetic control of pore size and wall composition Catalysis Letters. 102: 127-130. DOI: 10.1007/S10562-005-5843-9  0.535
2005 Hakim LF, Blackson J, George SM, Weimer AW. Nanocoating individual silica nanoparticles by atomic layer deposition in a fluidized bed reactor Chemical Vapor Deposition. 11: 420-425. DOI: 10.1002/Cvde.200506392  0.514
2004 Costescu RM, Cahill DG, Fabreguette FH, Sechrist ZA, George SM. Ultra-low thermal conductivity in W/Al2O3 nanolaminates. Science (New York, N.Y.). 303: 989-90. PMID 14963323 DOI: 10.1126/Science.1093711  0.824
2004 Ferguson JD, Smith ER, Weimer AW, George SM. ALD of SiO2 at room temperature using TEOS and H2O with NH3 as the catalyst Journal of the Electrochemical Society. 151. DOI: 10.1149/1.1768548  0.484
2004 Kang S, Rhee S, George SM. Infrared spectroscopic study of atomic layer deposition mechanism for hafnium silicate thin films using HfCl2[N(SiMe3)(2)](2) and H2O Journal of Vacuum Science and Technology. 22: 2392-2397. DOI: 10.1116/1.1806442  0.548
2004 Grubbs RK, Steinmetz NJ, George SM. Gas phase reaction products during tungsten atomic layer deposition using WF 6 and Si 2H 6 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22: 1811-1821. DOI: 10.1116/1.1767105  0.337
2004 Wank JR, George SM, Weimer AW. Coating Fine Nickel Particles with Al2O3Utilizing an Atomic Layer Deposition-Fluidized Bed Reactor (ALD-FBR) Journal of the American Ceramic Society. 87: 762-765. DOI: 10.1111/J.1551-2916.2004.00762.X  0.439
2004 Zhang Y, Dunn ML, Gall K, Elam JW, George SM. Suppression of inelastic deformation of nanocoated thin film microstructures Journal of Applied Physics. 95: 8216-8225. DOI: 10.1063/1.1736329  0.544
2004 Ferguson JD, Weimer AW, George SM. Atomic layer deposition of Al2O3 films on polyethylene particles Chemistry of Materials. 16: 5602-5609. DOI: 10.1021/Cm040008Y  0.436
2004 Groner MD, Fabreguette FH, Elam JW, George SM. Low-Temperature Al2O3 Atomic Layer Deposition Chemistry of Materials. 16: 639-645. DOI: 10.1021/Cm0304546  0.542
2004 Grubbs RK, Nelson CE, Steinmetz NJ, George SM. Nucleation and growth during the atomic layer deposition of W on Al 2O3 and Al2O3 on W Thin Solid Films. 467: 16-27. DOI: 10.1016/J.Tsf.2004.02.099  0.512
2004 Wank JR, George SM, Weimer AW. Nanocoating individual cohesive boron nitride particles in a fluidized bed by ALD Powder Technology. 142: 59-69. DOI: 10.1016/J.Powtec.2004.03.010  0.375
2004 Ferguson JD, Yoder AR, Weimer AW, George SM. TiO2 atomic layer deposition on ZrO2 particles using alternating exposures of TiCl4 and H2O Applied Surface Science. 226: 393-404. DOI: 10.1016/J.Apsusc.2003.10.053  0.452
2003 Gall K, Hulse M, Dunn ML, Finch D, George SM, Corff BA. Thermomechanical response of bare and Al2O3-nanocoated Au/Si bilayer beams for microelectromechanical systems Journal of Materials Research. 18: 1575-1587. DOI: 10.1557/Jmr.2003.0217  0.328
2003 Elam JW, Routkevitch D, George SM. Properties of ZnO/Al[sub 2]O[sub 3] Alloy Films Grown Using Atomic Layer Deposition Techniques Journal of the Electrochemical Society. 150: G339. DOI: 10.1149/1.1569481  0.439
2003 Elam JW, Wilson CA, Schuisky M, Sechrist ZA, George SM. Improved nucleation of TiN atomic layer deposition films on SiLK low-k polymer dielectric using an Al[sub 2]O[sub 3] atomic layer deposition adhesion layer Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 21: 1099. DOI: 10.1116/1.1577568  0.847
2003 Mayer TM, Elam JW, George SM, Kotula PG, Goeke RS. Atomic-layer deposition of wear-resistant coatings for microelectromechanical devices Applied Physics Letters. 82: 2883-2885. DOI: 10.1063/1.1570926  0.438
2003 Smith JA, Livingston aFE, George SM. Isothermal desorption kinetics of crystalline H2O, H218O, and D2O ice multilayers Journal of Physical Chemistry B. 107: 3871-3877. DOI: 10.1021/Jp022503S  0.589
2003 Elam JW, Routkevitch D, Mardilovich PP, George SM. Conformal coating on ultrahigh-aspect-ratio nanopores of anodic alumina by atomic layer deposition Chemistry of Materials. 15: 3507-3517. DOI: 10.1021/Cm0303080  0.506
2003 Elam JW, George SM. Growth of ZnO/Al2O3 Alloy Films Using Atomic Layer Deposition Techniques Chemistry of Materials. 15: 1020-1028. DOI: 10.1021/Cm020607+  0.528
2003 Rocklein MN, George SM. Temperature-induced apparent mass changes observed during quartz crystal microbalance measurements of atomic layer deposition Analytical Chemistry. 75: 4975-4982. DOI: 10.1021/Ac030141U  0.389
2003 Hoivik ND, Elam JW, Linderman RJ, Bright VM, George SM, Lee YC. Atomic layer deposited protective coatings for micro-electromechanical systems Sensors and Actuators, a: Physical. 103: 100-108. DOI: 10.1016/S0924-4247(02)00319-9  0.496
2003 Elam JW, Schuisky M, Ferguson JD, George SM. Surface chemistry and film growth during TiN atomic layer deposition using TDMAT and NH3 Thin Solid Films. 436: 145-156. DOI: 10.1016/S0040-6090(03)00533-9  0.548
2002 Schuisky M, Elam JW, George SM. In situ resistivity measurements during the atomic layer deposition of ZnO and W thin films Applied Physics Letters. 81: 180-182. DOI: 10.1063/1.1490413  0.591
2002 Elam JW, Groner MD, George SM. Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition Review of Scientific Instruments. 73: 2981. DOI: 10.1063/1.1490410  0.498
2002 Livingston FE, Smith JA, George SM. General Trends for Bulk Diffusion in Ice and Surface Diffusion on Ice Journal of Physical Chemistry A. 106: 6309-6318. DOI: 10.1021/Jp014438C  0.573
2002 Jensen JM, Oelkers AB, Toivola R, Johnson DC, Elam JW, George SM. X-ray reflectivity characterization of ZnO/Al2O3 multilayers prepared by atomic layer deposition Chemistry of Materials. 14: 2276-2282. DOI: 10.1021/cm011587z  0.308
2002 Groner MD, Elam JW, Fabreguette FH, George SM. Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates Thin Solid Films. 413: 186-197. DOI: 10.1016/S0040-6090(02)00438-8  0.547
2002 Ferguson JD, Weimer AW, George SM. Atomic layer deposition of boron nitride using sequential exposures of BCl3 and NH3 Thin Solid Films. 413: 16-25. DOI: 10.1016/S0040-6090(02)00431-5  0.42
2002 Elam J, Sechrist Z, George S. ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition: growth and surface roughness measurements Thin Solid Films. 414: 43-55. DOI: 10.1016/S0040-6090(02)00427-3  0.855
2001 George SM, Elam JW, Grubbs RK, Nelson CE. Nucleation and Growth During Tungsten Atomic Layer Deposition on Oxide Surfaces Mrs Proceedings. 672. DOI: 10.1557/Proc-672-O7.7  0.451
2001 Hudson PK, Foster KL, Tolbert aMA, George SM, and SRC, Grassian VH. HBr Uptake on Ice: Uptake Coefficient, H2O/HBr Hydrate Formation, and H2O Desorption Kinetics Journal of Physical Chemistry A. 105: 694-702. DOI: 10.1021/Jp002700W  0.336
2001 Elam JW, Nelson CE, Grubbs RK, George SM. Nucleation and growth during tungsten atomic layer deposition on SiO2 surfaces Thin Solid Films. 386: 41-52. DOI: 10.1016/S0040-6090(01)00762-3  0.496
2001 Elam JW, Nelson CE, Grubbs RK, George SM. Kinetics of the WF6 and Si2H6 surface reactions during tungsten atomic layer deposition Surface Science. 479: 121-135. DOI: 10.1016/S0039-6028(01)00969-4  0.377
2000 Livingston FE, Smith JA, George SM. Depth-profiling and diffusion measurements in ice films using infrared laser resonant desorption. Analytical Chemistry. 72: 5590-5599. PMID 11101236 DOI: 10.1021/Ac000724T  0.613
2000 George SM, Ferguson JD, Klaus JW. Atomic Layer Deposition of thin Films Using Sequential Surface Reactions Mrs Proceedings. 616: 93. DOI: 10.1557/Proc-616-93  0.526
2000 Klaus JW, Ferro SJ, George SM. Atomic Layer Deposition of Tungsten Nitride Films Using Sequential Surface Reactions Journal of the Electrochemical Society. 147: 1175-1181. DOI: 10.1149/1.1393332  0.558
2000 Cameron MA, Gartland IP, Smith JA, Diaz aSF, George SM. Atomic Layer Deposition of SiO2 and TiO2 in Alumina Tubular Membranes: Pore Reduction and Effect of Surface Species on Gas Transport Langmuir. 16: 7435-7444. DOI: 10.1021/La9916981  0.668
2000 Ferguson JD, Weimer AW, George SM. Atomic layer deposition of SiO2 films on BN particles using sequential surface reactions Chemistry of Materials. 12: 3472-3480. DOI: 10.1021/Cm000313T  0.447
2000 Klaus JW, Ferro SJ, George SM. Atomically controlled growth of tungsten and tungsten nitride using sequential surface reactions Applied Surface Science. 479-491. DOI: 10.1016/S0169-4332(00)00237-3  0.529
2000 Ferguson JD, Weimer AW, George SM. Atomic layer deposition of Al2O3 and SiO2 on BN particles using sequential surface reactions Applied Surface Science. 162: 280-292. DOI: 10.1016/S0169-4332(00)00205-1  0.408
2000 Klaus JW, Ferro SJ, George SM. Atomic layer deposition of tungsten using sequential surface chemistry with a sacrificial stripping reaction Thin Solid Films. 360: 145-153. DOI: 10.1016/S0040-6090(99)01076-7  0.546
2000 Ferguson JD, Weimer AW, George SM. Atomic layer deposition of ultrathin and conformal Al2O3 films on BN particles Thin Solid Films. 371: 95-104. DOI: 10.1016/S0040-6090(00)00973-1  0.442
2000 Elam J, Nelson C, Tolbert M, George S. Adsorption and desorption of HCl on a single-crystal α-Al2O3(0001) surface Surface Science. 450: 64-77. DOI: 10.1016/S0039-6028(99)01247-9  0.305
2000 Klaus JW, George SM. Atomic layer deposition of SiO2 at room temperature using NH3-catalyzed sequential surface reactions Surface Science. 447: 81-90. DOI: 10.1016/S0039-6028(99)01119-X  0.501
1999 Klaus JW, Sneh O, Ott AW, George SM. ATOMIC LAYER DEPOSITION OF SiO2 USING CATALYZED AND UNCATALYZED SELF-LIMITING SURFACE REACTIONS Surface Review and Letters. 6: 435-448. DOI: 10.1142/S0218625X99000433  0.482
1999 Okada LA, George SM. Adsorption and desorption kinetics of tetrakis(dimethylamino)titanium and dimethylamine on TiN surfaces Applied Surface Science. 137: 113-124. DOI: 10.1016/S0169-4332(98)00375-4  0.404
1999 Cameron MA, George SM. ZrO2 film growth by chemical vapor deposition using zirconium tetra-tert-butoxide Thin Solid Films. 348: 90-98. DOI: 10.1016/S0040-6090(99)00022-X  0.479
1999 Livingston FE, Smith JA, George SM. Origin of non-zero-order H2O desorption kinetics from crystalline ice multilayers on Ru(001) Surface Science. 423: 145-159. DOI: 10.1016/S0039-6028(98)00842-5  0.624
1998 Livingston FE, George SM. Effect Of Hno3 And Hcl On D2O Desorption Kinetics From Crystalline D2O Ice Journal of Physical Chemistry A. 102: 10280-10288. DOI: 10.1021/Jp982627Y  0.311
1998 Elam JW, Nelson CE, Cameron MA, Tolbert MA, George SM. Adsorption of H2O on a Single-Crystal α-Al2O3(0001) Surface The Journal of Physical Chemistry B. 102: 7008-7015. DOI: 10.1021/Jp981070J  0.306
1998 Krasnopoler aA, George SM. Infrared Resonant Desorption Of H2O From Ice Multilayers Journal of Physical Chemistry B. 102: 788-794. DOI: 10.1021/Jp972016Q  0.322
1998 Berland BS, Gartland IP, Ott AW, George SM. In situ monitoring of atomic layer controlled pore reduction in alumina tubular membranes using sequential surface reactions Chemistry of Materials. 10: 3941-3950. DOI: 10.1021/Cm980384G  0.39
1998 Klaus JW, Ott AW, Dillon AC, George SM. Atomic layer controlled growth of Si3N4 films using sequential surface reactions Surface Science. 418. DOI: 10.1016/S0039-6028(98)00705-5  0.461
1998 Okada L, Dillon A, Ott A, George S. Adsorption and decomposition of 1,4-disilabutane (SiH3CH2CH2SiH3) on Si(100) 2×1 and porous silicon surfaces Surface Science. 418: 353-366. DOI: 10.1016/S0039-6028(98)00653-0  0.343
1997 Klaus JW, Sneh O, George SM. Growth of SiO2 at room temperature with the use of catalyzed sequential half-reactions Science. 278: 1934-1936. PMID 9395393 DOI: 10.1126/Science.278.5345.1934  0.39
1997 Klaus JW, Ott AW, Johnson JM, George SM. Atomic Layer Controlled Growth Of Sio2 Films Using Binary Reaction Sequence Chemistry Applied Physics Letters. 70: 1092-1094. DOI: 10.1063/1.118494  0.496
1997 Foster KL, Tolbert MA, George SM. Interaction of HCl with Ice: Investigation of the Predicted Trihydrate, Hexahydrate, and Monolayer Regimes Journal of Physical Chemistry A. 101: 4979-4986. DOI: 10.1021/Jp970772Q  0.342
1997 Ott AW, Klaus JW, Johnson JM, George SM, McCarley KC, Way JD. Modification of Porous Alumina Membranes Using Al2O3 Atomic Layer Controlled Deposition Chemistry of Materials. 9: 707-714. DOI: 10.1021/Cm960377X  0.428
1997 Ott AW, Johnson JM, Klaus JW, George SM. Surface chemistry of In2O3 deposition using In(CH3)3 and H2O in a binary reaction sequence Applied Surface Science. 112: 205-215. DOI: 10.1016/S0169-4332(96)00977-4  0.373
1997 Ott AW, Klaus JW, Johnson JM, George SM. Al3O3 thin film growth on Si(100) using binary reaction sequence chemistry Thin Solid Films. 292: 135-144. DOI: 10.1016/S0040-6090(96)08934-1  0.476
1996 Berland BS, Foster KL, Tolbert MA, George SM. UV absorption spectra of H2O/HNO3 films Geophysical Research Letters. 23: 2757-2760. DOI: 10.1029/96Gl02610  0.407
1996 George SM, Ott aAW, Klaus JW. Surface Chemistry for Atomic Layer Growth The Journal of Physical Chemistry. 100: 13121-13131. DOI: 10.1021/Jp9536763  0.512
1996 and DEB, George SM, Huang C, Wong EKL, Rider KB, Smith aRS, Kay BD. H2O Condensation Coefficient and Refractive Index for Vapor-Deposited Ice from Molecular Beam and Optical Interference Measurements The Journal of Physical Chemistry. 100: 4988-4995. DOI: 10.1021/Jp952547J  0.322
1996 Ott AW, McCarley KC, Klaus JW, Way JD, George SM. Atomic layer controlled deposition of Al2O3 films using binary reaction sequence chemistry Applied Surface Science. 107: 128-136. DOI: 10.1016/S0169-4332(96)00503-X  0.487
1996 Wise ML, Sneh O, Okada LA, George SM. Reaction kinetics of H2O with chlorinated Si(111)-(7 × 7) and porous silicon surfaces Surface Science. 364: 367-379. DOI: 10.1016/0039-6028(96)00595-X  0.38
1996 Sneh O, Cameron MA, George SM. Adsorption and desorption kinetics of H2O on a fully hydroxylated SiO2 surface Surface Science. 364: 61-78. DOI: 10.1016/0039-6028(96)00592-4  0.347
1995 Wise ML, Sneh O, Okada LA, George SM. Adsorption and decomposition of diethyldiethoxysilane on silicon surfaces: new possibilities for SiO2 deposition Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 13: 865-875. DOI: 10.1116/1.588198  0.387
1995 Wise ML, Okada LA, Sneh O, George SM. H2O adsorption kinetics on Si(111)7×7 and Si(111)7×7 modified by laser annealing Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 13: 1853-1860. DOI: 10.1116/1.579670  0.327
1995 Robinson MB, Dillon AC, George SM. Adsorption and decomposition of dichlorosilane on porous silicon surfaces Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 13: 35-41. DOI: 10.1116/1.579440  0.358
1995 Dillon AC, Wise ML, Robinson MB, George SM. Adsorption and decomposition of trichlorosilane and trichlorogermane on porous silicon and Si(100)2 × 1 surfaces Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 13: 1-10. DOI: 10.1116/1.579436  0.341
1995 Berland BS, Brown DE, Tolbert MA, George SM. Refractive index and density of vapor-deposited ice Geophysical Research Letters. 22: 3493-3496. DOI: 10.1029/95Gl03504  0.39
1995 Dillon AC, Ott AW, Way JD, George SM. Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence Surface Science. 322: 230-242. DOI: 10.1016/0039-6028(95)90033-0  0.357
1995 Sneh O, Wise ML, Ott AW, Okada LA, George SM. Atomic layer growth of SiO2 on Si(100) using SiCl4 and H2O in a binary reaction sequence Surface Science. 334: 135-152. DOI: 10.1016/0039-6028(95)00471-8  0.492
1994 Middlebrook AM, Berland BS, George SM, Tolbert MA, Toon OB. Real refractive indices of infrared-characterized nitric-acid/ice films: Implications for optical measurements of polar stratospheric clouds Journal of Geophysical Research. 99: 25655-25666. DOI: 10.1029/94Jd02391  0.402
1994 Berland BS, Haynes DR, Foster KL, Tolbert MA, George SM, Toon OB. Refractive Indices of Amorphous and Crystalline HNO3/H2O Films Representative of Polar Stratospheric Clouds The Journal of Physical Chemistry. 98: 4358-4364. DOI: 10.1021/J100067A024  0.462
1994 George SM, Sneh O, Dillon AC, Wise ML, Ott AW, Okada LA, Way JD. Atomic layer controlled deposition of SiO2 and Al2O3 using ABAB... binary reaction sequence chemistry Applied Surface Science. 82: 460-467. DOI: 10.1016/0169-4332(94)90259-3  0.436
1994 Okada LA, Wise ML, George SM. Isothermal H2 desorption kinetics from Si(100) 2 × 1: dependence on disilane and atomic hydrogen precursors Applied Surface Science. 82: 410-416. DOI: 10.1016/0169-4332(94)90250-X  0.367
1993 Dillon AC, Ott AW, George SM, Way JD. Atomic layer controlled deposition of Al2O3 films employing trimethylaluminum (TMA) and H2O vapor Mrs Proceedings. 335: 335-340. DOI: 10.1557/Proc-335-335  0.528
1993 Wise ML, Sneh O, Okada LA, Dillon AC, George SM. Diethyldiethoxysilane as a New Precursor for SiO2 Growth on Silicon Mrs Proceedings. 334. DOI: 10.1557/Proc-334-37  0.451
1993 Sneh O, Wise ML, Okada LA, Ott AW, George SM. Atomic layer growth of SiO 2 on Si(100) using the sequential deposition of SiCl 4 and H 2 O Mrs Proceedings. 334: 25-30. DOI: 10.1557/Proc-334-25  0.514
1993 Meixner DL, George SM. Surface diffusion of xenon on Pt(111) Journal of Chemical Physics. 98: 9115-9125. DOI: 10.1063/1.464419  0.322
1993 Robinson MB, Dillon AC, George SM. Porous silicon photoluminescence versus HF etching: No correlation with surface hydrogen species Applied Physics Letters. 62: 1493-1495. DOI: 10.1063/1.108669  0.331
1993 Dillon AC, Robinson MB, George SM. Decomposition of silicon hydrides following disilane adsorption on porous silicon surfaces Surface Science. 295. DOI: 10.1016/0167-2584(93)91010-L  0.349
1993 Dillon AC, Robinson MB, George SM, Roberts DA. Adsorption and decomposition of diethylgermane on porous silicon surfaces Surface Science. 286. DOI: 10.1016/0167-2584(93)90605-I  0.329
1993 Dillon AC, Robinson MB, George SM, Roberts DA. Surface science lettersAdsorption and decomposition of diethylgermane on porous silicon surfaces Surface Science. 286. DOI: 10.1016/0039-6028(93)90545-U  0.326
1993 Meixner DL, George SM. Coverage dependent surface diffusion of noble gases and methane on Pt(111) Surface Science. 297: 27-39. DOI: 10.1016/0039-6028(93)90012-9  0.311
1993 Coon PA, Wise ML, George SM. Modeling silicon epitaxial growth with SiH2Cl2 Journal of Crystal Growth. 130: 162-172. DOI: 10.1016/0022-0248(93)90848-Q  0.364
1992 Robinson MB, Dillon AC, George SM. Porous Silicon Photoluminescence Versus HF Etching: No Correlation with Surface Hydrogen Species Mrs Proceedings. 283. DOI: 10.1557/Proc-283-191  0.3
1992 Wise ML, Okada LA, Coon PA, George SM. Growth of SiO 2 on Si(111)7×7 Using SiCl 4 and H 2 O Mrs Proceedings. 282: 499. DOI: 10.1557/Proc-282-499  0.375
1992 Coon PA, Wise ML, Dillon AC, George SM. Germanium Deposition on Silicon: Surface Chemistry of (CH3CH2)2GeH2 and GeC14 Mrs Proceedings. 282. DOI: 10.1557/Proc-282-413  0.338
1992 Dillon AC, Robinson MB, George SM. Comparison of Trichlorosilane and Trichlorogermane Decomposition on Silicon Surfaces Using FTIR Spectroscopy Mrs Proceedings. 282. DOI: 10.1557/Proc-282-405  0.382
1992 Dillon A, Robinson M, George S, Gupta P. Effects of Hydrogen Coverage on Silicon Surface Reactivity Mrs Proceedings. 259. DOI: 10.1557/Proc-259-99  0.352
1992 Coon PA, Wise ML, Dillon AC, Robinson MB, George SM. Diethylsilane on silicon surfaces: Adsorption and decomposition kinetics Journal of Vacuum Science & Technology B. 10: 221-227. DOI: 10.1116/1.586305  0.324
1992 Robinson MB, Dillon AC, Haynes DR, George SM. Effect of thermal annealing and surface coverage on porous silicon photoluminescence Applied Physics Letters. 61: 1414-1416. DOI: 10.1063/1.107555  0.341
1992 Coon PA, Wise ML, Walker ZH, George SM, Roberts DA. Adsorption and decomposition of diethylgermane on Si(111) 7×7 Applied Physics Letters. 60: 2002-2004. DOI: 10.1063/1.107124  0.386
1992 Coon PA, Wise ML, George SM. Reaction kinetics of GeCl4 on Si(111)7 × 7 Surface Science. 278: 383-396. DOI: 10.1016/0039-6028(92)90674-U  0.384
1992 Arena MV, Westre ED, George SM. Coverage dependence of n-butane surface diffusion on a stepped Ru(001) surface Surface Science. 261: 129-140. DOI: 10.1016/0039-6028(92)90225-U  0.31
1991 Robinson MB, Dillon AC, Haynes DR, George SM. Effect of Surface Coverage on Porous Silicon Photoluminescence: Transmission FTIR Studies Mrs Proceedings. 256. DOI: 10.1557/Proc-256-17  0.314
1991 Dillon AC, Robinson MB, Han MY, George SM. Decomposition of Alkylsilanes on Silicon Surfaces Using Transmission Ftir Spectroscopy Mrs Proceedings. 222. DOI: 10.1557/Proc-222-213  0.329
1991 Dillon AC, Gupta P, Robinson MBR, Bracker AS, George SM. Ammonia decomposition on silicon surfaces studied using transmission Fourier transform infrared spectroscopy Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 9: 2222-2230. DOI: 10.1116/1.577299  0.329
1991 Wise ML, Koehler BG, Gupta P, Coon PA, George SM. Comparison of hydrogen desorption kinetics from Si(111)7 × 7 and Si(100)2 × 1 Surface Science. 258: 166-176. DOI: 10.1016/0167-2584(91)90683-I  0.304
1991 Koehler BG, George SM. Laser-induced desorption of H2 from Si(111) 7 × 7 Surface Science. 248: 158-172. DOI: 10.1016/0167-2584(91)90351-Q  0.306
1991 Gupta P, Coon PA, Koehler BG, George SM. Desorption product yields following Cl2 adsorption on Si(111)7 × 7: Coverage and temperature dependence Surface Science. 249: 92-104. DOI: 10.1016/0039-6028(91)90835-G  0.303
1991 Gupta P, Dillon AC, Bracker AS, George SM. FTIR studies of H2O and D2O decomposition on porous silicon surfaces Surface Science. 245: 360-372. DOI: 10.1016/0039-6028(91)90038-T  0.345
1991 Gupta P, Dillon AC, Coon PA, George SM. FTIR studies reveal that silicon-containing laser-induced desorption products are surface reaction intermediates Chemical Physics Letters. 176: 128-134. DOI: 10.1016/0009-2614(91)90022-2  0.328
1990 Dillon AC, Gupta P, Robinson MB, Bracker AS, George SM. Ftir Studies of Water and Ammonia Decomposition on Silicon Surfaces Mrs Proceedings. 204: 339. DOI: 10.1557/Proc-204-339  0.307
1990 Coon P, Wise M, Dillon A, Robinson M, George S. Adsorption and Decomposition of Diethylsilane on Silicon Surfaces Mrs Proceedings. 204. DOI: 10.1557/Proc-204-303  0.331
1990 Gupta P, Coon PA, Koehler BG, George SM. Adsorption and desorption kinetics for SiCl4 on Si(111)7×7 Journal of Chemical Physics. 93: 2827-2835. DOI: 10.1063/1.458868  0.317
1990 Brand JL, Arena MV, Deckert AA, George SM. CO desorption kinetics from clean and sulfur‐covered Ru(001) surfaces Journal of Chemical Physics. 92: 4483-4490. DOI: 10.1063/1.457759  0.311
1990 Dillon AC, Gupta P, Robinson MB, Bracker AS, George SM. FTIR studies of water and ammonia decomposition on silicon surfaces Journal of Electron Spectroscopy and Related Phenomena. 54: 1085-1095. DOI: 10.1016/0368-2048(90)80298-O  0.301
1990 Deckert AA, Arena MV, Brand JL, George SM. Effect of sulfur on the decomposition kinetics of methanol on Ru(001) Surface Science. 226: 42-50. DOI: 10.1016/0039-6028(90)90152-X  0.313
1989 Koehler BG, Coon PA, George SM. Decomposition of NH3 on Si(111) 7×7 studied using laser‐induced thermal desorption Journal of Vacuum Science & Technology B. 7: 1303-1310. DOI: 10.1116/1.584476  0.326
1989 Mak CH, Koehler BG, George SM. Laser-induced thermal desorption of silicon-containing surface reaction intermediates from Si(111)7×7 Surface Science. 208. DOI: 10.1016/0167-2584(89)91026-8  0.335
1988 George SM, Gupta P, Mak CH, Coon PA. Oxidation Kinetics of Silicon Surfaces: Reactive Sticking Coefficient, Apparent Saturation Coverage and Effect of Surface Hydrogen Mrs Proceedings. 131: 169. DOI: 10.1557/Proc-131-169  0.304
1988 Koehler BG, Mak CH, Arthur DA, Coon PA, George SM. Desorption kinetics of hydrogen and deuterium from Si(111) 7×7 studied using laser‐induced thermal desorption Journal of Chemical Physics. 89: 1709-1718. DOI: 10.1063/1.455117  0.308
1988 Brand JL, Deckert AA, George SM. Surface diffusion of hydrogen on sulfur-covered Ru(001) surfaces studied using laser-induced thermal desorption Surface Science. 194: 457-474. DOI: 10.1016/0039-6028(88)90864-3  0.307
1987 Deckert AA, Brand JL, Mak CH, Koehler BG, George SM. The decomposition of methanol on Ru(001) studied using laser induced thermal desorption Journal of Chemical Physics. 87: 1936-1947. DOI: 10.1063/1.453166  0.327
1987 Mak CH, Koehler BG, Brand JL, George SM. Surface diffusion of hydrogen on carbon‐covered Ru(001) surfaces studied using laser‐induced thermal desorption Journal of Chemical Physics. 87: 2340-2345. DOI: 10.1063/1.453114  0.305
1987 Mak CH, Brand JL, Koehler BG, George SM. Coverage dependence of the surface diffusion coefficient for hydrogen on Ru(001) Surface Science. 191: 108-120. DOI: 10.1016/S0039-6028(87)81051-8  0.303
1986 Mak CH, Brand JL, Deckert AA, George SM. Surface diffusion of hydrogen on Ru(001) studied using laser-induced thermal desorption Journal of Chemical Physics. 85: 1676-1680. DOI: 10.1063/1.451209  0.302
1984 George SM, Harris AL, Berg M, Harris CB. Picosecond studies of the temperature dependence of homogeneous and inhomogeneous vibrational linewidth broadening in liquid acetonitrile The Journal of Chemical Physics. 80: 83-94. DOI: 10.1063/1.446410  0.606
1983 George SM, Harris CB. Theory for selective-vibrational-dephasing experiments with the use of transient stimulated Raman scattering in high laser depletion Physical Review A. 28: 863-878. DOI: 10.1103/Physreva.28.863  0.452
1983 Ben-Amotz D, George SM, Harris CB. Transient stimulated raman scattering in high laser depletion and its effects on vibrational dynamics experiments Chemical Physics Letters. 97: 533-537. DOI: 10.1016/0009-2614(83)80466-7  0.609
1982 George SM, Harris CB. Dependence of inhomogeneous vibrational linewidth broadening on attractive forces from local liquid number densities The Journal of Chemical Physics. 77: 4781-4783. DOI: 10.1063/1.444385  0.464
1981 George SM, Harris CB. Passively mode-locked Nd:glass laser oscillator optimized for TEM 00 selectivity and long term stability and reliability Review of Scientific Instruments. 52: 852-857. DOI: 10.1063/1.1136681  0.449
1980 Harris CB, Auweter H, George SM. Critical test of vibrational dephasing theories in liquids by use of selective, coherent, picosecond stokes scattering Physical Review Letters. 44: 737-740. DOI: 10.1103/Physrevlett.44.737  0.454
1980 George SM, Auweter H, Harris CB. Inhomogeneous broadening of vibrational linewidths in polyatomic liquids The Journal of Chemical Physics. 73: 5573-5583. DOI: 10.1002/Chin.198115050  0.434
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