Year |
Citation |
Score |
2014 |
Otaki K, Kohara N, Sugisaki K, Ichikawa Y, Zhu Y, Murakami K, Ouchi C, Kato S, Hasegawa M, Honda T, Takeda M. Ultra high-precision wavefront metrology using EUV low brightness source Fringe 2013 - 7th International Workshop On Advanced Optical Imaging and Metrology. 385-392. DOI: 10.1007/978-3-642-36359-7_70 |
0.508 |
|
2011 |
Odate S, Koike C, Toba H, Koike T, Sugaya A, Sugisaki K, Otaki K, Uchikawa K. Angular spectrum calculations for arbitrary focal length with a scaled convolution. Optics Express. 19: 14268-76. PMID 21934791 DOI: 10.1364/OE.19.014268 |
0.52 |
|
2011 |
Zhu Y, Odate S, Sugaya A, Otaki K, Sugisaki K, Koike C, Koike T, Uchikawa K. Method for designing phase-calculation algorithms for two-dimensional grating phase-shifting interferometry. Applied Optics. 50: 2815-22. PMID 21691343 DOI: 10.1364/AO.50.002815 |
0.533 |
|
2008 |
Sugisaki K, Okada M, Otaki K, Zhu Y, Kawakami J, Murakami K, Ouchi C, Hasegawa M, Kato S, Hasegawa T, Yokota H, Honda T, Niibe M. EUV wavefront measurement of six-mirror optic using EWMS Proceedings of Spie - the International Society For Optical Engineering. 6921. DOI: 10.1117/12.772624 |
0.519 |
|
2007 |
Zhu Y, Sugisaki K, Okada M, Otaki K, Liu Z, Kawakami J, Ishii M, Saito J, Murakami K, Hasegawa M, Ouchi C, Kato S, Hasegawa T, Suzuki A, Yokota H, et al. Wavefront measurement interferometry at the operational wavelength of extreme-ultraviolet lithography. Applied Optics. 46: 6783-92. PMID 17882300 DOI: 10.1364/AO.46.006783 |
0.564 |
|
2005 |
Sugisaki K, Snyder W. The parameter of preposition stranding: A view from child English Language Acquisition. 13: 349-361. DOI: 10.1207/S15327817La1304_4 |
0.463 |
|
2005 |
Sugisaki K, Okada M, Zhu Y, Otaki K, Liu Z, Kawakami J, Ishii M, Saito J, Murakami K, Hasegawa M, Ouchi C, Kato S, Hasegawa T, Suzuki A, Yokota H, et al. Comparisons between EUV at-wavelength metrological methods Proceedings of Spie - the International Society For Optical Engineering. 5921: 1-8. DOI: 10.1117/12.616676 |
0.528 |
|
2005 |
Zhu Y, Sugisaki K, Okada M, Otaki K, Liu Z, Ishii M, Kawakami J, Saito J, Murakami K, Ouchi C, Hasegawa M, Kato S, Hasegawa T, Suzuki A, Niibe M. Experimental comparison of absolute PDI and lateral shearing interferometer Progress in Biomedical Optics and Imaging - Proceedings of Spie. 5752: 1192-1199. DOI: 10.1117/12.600274 |
0.524 |
|
2004 |
Hasegawa M, Ouchi C, Hasegawa T, Kato S, Ohkubo A, Suzuki A, Sugisaki K, Okada M, Otaki K, Murakami K, Saito J, Niibe M, Takeda M. Recent progress of EUV wavefront metrology in EUVA Proceedings of Spie - the International Society For Optical Engineering. 5533: 27-36. DOI: 10.1117/12.562431 |
0.498 |
|
2004 |
Sekine Y, Suzuki A, Hasegawa M, Ouchi C, Hara S, Hasegawa T, Kuramoto Y, Kato S, Murakami K, Saito J, Ota K, Kondo H, Ishii M, Kawakami J, Oshino T, ... Sugisaki K, et al. Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22: 104-108. |
0.509 |
|
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