Year |
Citation |
Score |
2013 |
Lee HK, Melamud R, Kim B, Chandorkar S, Salvia JC, Kenny TW. The effect of the temperature-dependent nonlinearities on the temperature stability of micromechanical resonators Journal of Applied Physics. 114. DOI: 10.1063/1.4825327 |
0.785 |
|
2011 |
Kyu Lee H, Kim B, Melamud R, Hopcroft MA, Salvia JC, Kenny TW. Influence of the temperature dependent nonlinearities on the performance of micromechanical resonators Applied Physics Letters. 99. DOI: 10.1063/1.3660235 |
0.82 |
|
2010 |
Bahl G, Melamud R, Kim B, Chandorkar SA, Salvia JC, Hopcroft MA, Elata D, Hennessy RG, Candler RN, Howe RT, Kenny TW. Model and observations of dielectric charge in thermally oxidized silicon resonators Journal of Microelectromechanical Systems. 19: 162-174. DOI: 10.1109/Jmems.2009.2036274 |
0.78 |
|
2010 |
Graham AB, Messana MW, Hartwell PG, Provine J, Yoneoka S, Melamud R, Kim B, Howe RT, Kenny TW. A method for wafer-scale encapsulation of large lateral deflection MEMS devices Journal of Microelectromechanical Systems. 19: 28-37. DOI: 10.1109/Jmems.2009.2035717 |
0.709 |
|
2009 |
Melamud R, Chandorkar SA, Kim B, Lee HK, Salvia JC, Bahl G, Hopcroft MA, Kenny TW. Temperature-insensitive composite micromechanical resonators Journal of Microelectromechanical Systems. 18: 1409-1419. DOI: 10.1109/Jmems.2009.2030074 |
0.815 |
|
2009 |
Kim B, Candler RN, Melamud R, Hopcroft MA, Yoneoka S, Lee HK, Agarwal M, Chandorkar SA, Yama G, Kenny TW. Hermeticity and diffusion investigation in polysilicon film encapsulation for microelectromechanical systems Journal of Applied Physics. 105. DOI: 10.1063/1.3054366 |
0.752 |
|
2008 |
Kim B, Hopcroft MA, Candler RN, Jha CM, Agarwal M, Melamud R, Chandorkar SA, Yama G, Kenny TW. Temperature dependence of quality factor in MEMS resonators Journal of Microelectromechanical Systems. 17: 755-766. DOI: 10.1109/Jmems.2008.924253 |
0.8 |
|
2008 |
Jha CM, Hopcroft MA, Chandorkar SA, Salvia JC, Agarwal M, Candler RN, Melamud R, Kim B, Kenny TW. Thermal isolation of encapsulated MEMS resonators Journal of Microelectromechanical Systems. 17: 175-184. DOI: 10.1109/Jmems.2007.904332 |
0.778 |
|
2008 |
Agarwal M, Chandorkar SA, Mehta H, Candler RN, Kim B, Hopcroft MA, Melamud R, Jha CM, Bahl G, Yama G, Kenny TW, Murmann B. A study of electrostatic force nonlinearities in resonant microstructures Applied Physics Letters. 92. DOI: 10.1063/1.2834707 |
0.757 |
|
2007 |
Agarwal M, Mehta H, Candler RN, Chandorkar SA, Kim B, Hopcroft MA, Melamud R, Bahl G, Yama G, Kenny TW, Murmann B. Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators Journal of Applied Physics. 102. DOI: 10.1063/1.2785018 |
0.779 |
|
2007 |
Hopcroft MA, Kim B, Chandorkar S, Melamud R, Agarwal M, Jha CM, Bahl G, Salvia J, Mehta H, Lee HK, Candler RN, Kenny TW. Using the temperature dependence of resonator quality factor as a thermometer Applied Physics Letters. 91. DOI: 10.1063/1.2753758 |
0.798 |
|
2007 |
Melamud R, Kim B, Chandorkar SA, Hopcroft MA, Agarwal M, Jha CM, Kenny TW. Temperature-compensated high-stability silicon resonators Applied Physics Letters. 90. DOI: 10.1063/1.2748092 |
0.817 |
|
2007 |
Agarwal M, Park KK, Chandorkar SA, Candler RN, Kim B, Hopcroft MA, Melamud R, Kenny TW, Murmann B. Acceleration sensitivity in beam-type electrostatic microresonators Applied Physics Letters. 90. DOI: 10.1063/1.2426884 |
0.788 |
|
2007 |
Kim B, Candler RN, Hopcroft MA, Agarwal M, Park WT, Kenny TW. Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators Sensors and Actuators, a: Physical. 136: 125-131. DOI: 10.1016/J.Sna.2006.10.040 |
0.813 |
|
2006 |
Candler RN, Hopcroft MA, Kim B, Park WT, Melamud R, Agarwal M, Yama G, Partridge A, Lutz M, Kenny TW. Long-term and accelerated life testing of a novel single-wafer vacuum encapsulation for MEMS resonators Journal of Microelectromechanical Systems. 15: 1446-1456. DOI: 10.1109/Jmems.2006.883586 |
0.767 |
|
2006 |
Candler RN, Duwel A, Varghese M, Chandorkar SA, Hopcroft MA, Park WT, Kim B, Yama G, Partridge A, Lutz M, Kenny TW. Impact of geometry on thermoelastic dissipation in micromechanical resonant beams Journal of Microelectromechanical Systems. 15: 927-934. DOI: 10.1109/Jmems.2006.879374 |
0.781 |
|
2006 |
Agarwal M, Chandorkar SA, Candler RN, Kim B, Hopcroft MA, Melamud R, Jha CM, Kenny TW, Murmann B. Optimal drive condition for nonlinearity reduction in electrostatic microresonators Applied Physics Letters. 89. DOI: 10.1063/1.2388886 |
0.776 |
|
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