☰

Lei Yuan, Ph.D. - Publications

Affiliations: 
2005 University of California, Berkeley, Berkeley, CA, United States 
Area:
Integrated Circuits (INC); Solid-State Devices
Tree Info Similar researchers PubMed Report error

4 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2006 Neureuther AR, Pease RFW, Yuan L, Parizi KB, Esfandyarpour H, Poppe WJ, Liddle JA, Anderson EH. Shot noise models for sequential processes and the role of lateral mixing Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24: 1902-1908. DOI: 10.1116/1.2218875  0.66
2002 Cheng M, Yuan L, Croffie E, Neureuther A. Improving resist resolution and sensitivity via electric-field enhanced postexposure baking Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 20: 734-740. DOI: 10.1116/1.1464835  0.703
2000 Cheng M, Croffie E, Yuan L, Neureuther A. Enhancement of resist resolution and sensitivity via applied electric field Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 18: 3318-3322. DOI: 10.1116/1.1324646  0.69
2000 Croffie E, Yuan L, Cheng M, Neureuther A, Houlihan F, Cirelli R, Watson P, Nalamasu O, Gabor A. Modeling influence of structural changes in photoacid generators on 193 nm single layer resist imaging Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 18: 3340-3344. DOI: 10.1116/1.1324636  0.684
Show low-probability matches.