Seungchoun Choi, Ph.D. - Publications
Affiliations: | 2013 | Mechanical Engineering | University of California, Berkeley, Berkeley, CA, United States |
Area:
Mechanical Engineering, Electronics and Electrical Engineering, General EngineeringYear | Citation | Score | |||
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2010 | Choi S, Tripathi S, Dornfeld DA, Doyle FM. Copper CMP Modeling: Millisecond Scale Adsorption Kinetics of BTA in Glycine-Containing Solutions at pH 4 Journal of the Electrochemical Society. 157. DOI: 10.1149/1.3499217 | 0.504 | |||
2009 | Tripathi S, Choi S, Doyle FM, Dornfeld DA. Integrated Tribo-Chemical Modeling of Copper CMP Mrs Proceedings. 1157. DOI: 10.1557/Proc-1157-E02-03 | 0.506 | |||
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