| Year |
Citation |
Score |
| 2020 |
Wu Z, Tengstrand O, Bakhit B, Lu J, Greene JE, Hultman L, Petrov I, Greczynski G. Growth of dense, hard yet low-stress Ti0.40Al0.27W0.33N nanocomposite films with rotating substrate and no external substrate heating Journal of Vacuum Science and Technology. 38: 23006. DOI: 10.1116/1.5140357 |
0.505 |
|
| 2020 |
Nedfors N, Primetzhofer D, Zhirkov I, Palisaitis J, Persson POÅ, Greene JE, Petrov I, Rosen J. The influence of pressure and magnetic field on the deposition of epitaxial TiBx thin films from DC magnetron sputtering Vacuum. 177: 109355. DOI: 10.1016/J.Vacuum.2020.109355 |
0.483 |
|
| 2020 |
Bakhit B, Palisaitis J, Persson POÅ, Alling B, Rosen J, Hultman L, Petrov I, Greene JE, Greczynski G. Self-organized columnar Zr0.7Ta0.3B1.5 core/shell-nanostructure thin films Surface & Coatings Technology. 401: 126237. DOI: 10.1016/J.Surfcoat.2020.126237 |
0.463 |
|
| 2020 |
Wu Z, Wang Q, Petrov I, Greene JE, Hultman L, Greczynski G. Cubic-structure Al-rich TiAlSiN thin films grown by hybrid high-power impulse magnetron co-sputtering with synchronized Al+ irradiation Surface & Coatings Technology. 385: 125364. DOI: 10.1016/J.Surfcoat.2020.125364 |
0.431 |
|
| 2020 |
Bakhit B, Palisaitis J, Thörnberg J, Rosen J, Persson POÅ, Hultman L, Petrov I, Greene JE, Greczynski G. Improving the high-temperature oxidation resistance of TiB2 thin films by alloying with Al Acta Materialia. 196: 677-689. DOI: 10.1016/J.Actamat.2020.07.025 |
0.414 |
|
| 2020 |
Mei AB, Kindlund H, Broitman E, Hultman L, Petrov I, Greene JE, Sangiovanni D. Adaptive hard and tough mechanical response in single-crystal B1 VNx ceramics via control of anion vacancies Acta Materialia. 192: 78-88. DOI: 10.1016/J.Actamat.2020.03.037 |
0.331 |
|
| 2019 |
Godoy YC, Tengstrand O, Florez JO, Petrov I, Bustos E, Hultman L, Herrera-Gomez A, Greene JE, Greczynski G. Corrosion Resistant TiTaN and TiTaAlN Thin Films Grown by Hybrid HiPIMS/DCMS Using Synchronized Pulsed Substrate Bias with No External Substrate Heating The Coatings. 9: 841. DOI: 10.3390/Coatings9120841 |
0.439 |
|
| 2019 |
Edström D, Sangiovanni D, Landälv L, Eklund P, Greene JE, Petrov I, Hultman L, Chirita V. Mechanical properties of VMoNO as a function of oxygen concentration: Toward development of hard and tough refractory oxynitrides Journal of Vacuum Science and Technology. 37: 61508. DOI: 10.1116/1.5125302 |
0.33 |
|
| 2019 |
Greczynski G, Petrov I, Greene JE, Hultman L. Paradigm shift in thin-film growth by magnetron sputtering: From gas-ion to metal-ion irradiation of the growing film Journal of Vacuum Science and Technology. 37: 60801. DOI: 10.1116/1.5121226 |
0.419 |
|
| 2019 |
Bakhit B, Engberg D, Lu J, Rosén J, Högberg H, Hultman L, Petrov I, Greene JE, Greczynski G. Strategy for simultaneously increasing both hardness and toughness in ZrB2-rich Zr1-xTaxBy thin films Journal of Vacuum Science and Technology. 37: 31506. DOI: 10.1116/1.5093170 |
0.502 |
|
| 2019 |
Hellgren N, Thörnberg J, Zhirkov I, Sortica MA, Petrov I, Greene JE, Hultman L, Rosén J. High-power impulse magnetron sputter deposition of TiBx thin films: Effects of pressure and growth temperature Vacuum. 169: 108884. DOI: 10.1016/J.Vacuum.2019.108884 |
0.419 |
|
| 2019 |
Petrov I, Hultman L, Stueber M, Chen L, Desjardins P. Preface of the special issue “Thin Films Advances” dedicated to the 75th birthday of Professor Joe Greene Thin Solid Films. 688: 137494. DOI: 10.1016/J.Tsf.2019.137494 |
0.364 |
|
| 2019 |
Kindlund H, Sangiovanni D, Petrov I, Greene JE, Hultman L. A review of the intrinsic ductility and toughness of hard transition-metal nitride alloy thin films Thin Solid Films. 688: 137479. DOI: 10.1016/J.Tsf.2019.137479 |
0.423 |
|
| 2019 |
Edström D, Sangiovanni D, Hultman L, Petrov I, Greene JE, Chirita V. TiN film growth on misoriented TiN grains with simultaneous low-energy bombardment: Restructuring leading to epitaxy Thin Solid Films. 688: 137380. DOI: 10.1016/J.Tsf.2019.06.030 |
0.464 |
|
| 2018 |
Ghafoor N, Petrov I, Holec D, Greczynski G, Palisaitis J, Persson POA, Hultman L, Birch J. Self-structuring in ZrAlN films as a function of composition and growth temperature. Scientific Reports. 8: 16327. PMID 30397271 DOI: 10.1038/S41598-018-34279-W |
0.476 |
|
| 2018 |
Mühlbacher M, Greczynski G, Sartory B, Schalk N, Lu J, Petrov I, Greene JE, Hultman L, Mitterer C. Enhanced TiTaN diffusion barriers, grown by a hybrid sputtering technique with no substrate heating, between Si(001) wafers and Cu overlayers. Scientific Reports. 8: 5360. PMID 29599468 DOI: 10.1038/S41598-018-23782-9 |
0.473 |
|
| 2018 |
Villamayor MMS, Keraudy J, Shimizu T, Viloan RPB, Boyd R, Lundin D, Greene JE, Petrov I, Helmersson U. Low temperature (Ts/Tm < 0.1) epitaxial growth of HfN/MgO(001) via reactive HiPIMS with metal-ion synchronized substrate bias Journal of Vacuum Science and Technology. 36: 61511. DOI: 10.1116/1.5052702 |
0.502 |
|
| 2018 |
Kindlund H, Lu J, Broitman E, Petrov I, Greene JE, Birch J, Hultman L. Growth and mechanical properties of 111-oriented V0.5Mo0.5Nx/Al2O3(0001) thin films Journal of Vacuum Science and Technology. 36: 51512. DOI: 10.1116/1.5045048 |
0.407 |
|
| 2018 |
Bakhit B, Petrov I, Greene JE, Hultman L, Rosén J, Greczynski G. Controlling the B/Ti ratio of TiBx thin films grown by high-power impulse magnetron sputtering Journal of Vacuum Science and Technology. 36: 30604. DOI: 10.1116/1.5026445 |
0.489 |
|
| 2018 |
Greczynski G, Zhirkov I, Petrov I, Greene JE, Rosén J. Time evolution of ion fluxes incident at the substrate plane during reactive high-power impulse magnetron sputtering of groups IVb and VIb transition metals in Ar/N2 Journal of Vacuum Science and Technology. 36: 20602. DOI: 10.1116/1.5016241 |
0.432 |
|
| 2018 |
Sangiovanni D, Mei AB, Edström D, Hultman L, Chirita V, Petrov I, Greene JE. Effects of surface vibrations on interlayer mass transport: Ab initio molecular dynamics investigation of Ti adatom descent pathways and rates from TiN/TiN(001) islands Physical Review B. 97: 35406. DOI: 10.1103/Physrevb.97.035406 |
0.313 |
|
| 2018 |
Mozetič M, Vesel A, Primc G, Eisenmenger-Sittner C, Bauer J, Eder A, Schmid G, Ruzic D, Ahmed Z, Barker D, Douglass K, Eckel S, Fedchak J, Hendricks J, Klimov N, ... ... Petrov I, et al. Recent developments in surface science and engineering, thin films, nanoscience, biomaterials, plasma science, and vacuum technology Thin Solid Films. 660: 120-160. DOI: 10.1016/J.Tsf.2018.05.046 |
0.405 |
|
| 2017 |
Greczynski G, Zhirkov I, Petrov I, Greene JE, Rosén J. Gas rarefaction effects during high power pulsed magnetron sputtering of groups IVb and VIb transition metals in Ar Journal of Vacuum Science and Technology. 35: 60601. DOI: 10.1116/1.4989674 |
0.339 |
|
| 2017 |
Petrov I, Hall A, Mei AB, Nedfors N, Zhirkov I, Rosen J, Reed A, Howe B, Greczynski G, Birch J, Hultman L, Greene JE. Controlling the boron-to-titanium ratio in magnetron-sputter-deposited TiBx thin films Journal of Vacuum Science and Technology. 35: 50601. DOI: 10.1116/1.4982649 |
0.785 |
|
| 2017 |
Zheng Q, Mei AB, Tuteja M, Sangiovanni DG, Hultman L, Petrov I, Greene JE, Cahill DG. Phonon and electron contributions to the thermal conductivity of
VNx
epitaxial layers Physical Review Materials. 1. DOI: 10.1103/Physrevmaterials.1.065002 |
0.375 |
|
| 2017 |
Fager H, Tengstrand O, Lu J, Bolz S, Mesic B, Kölker W, Schiffers C, Lemmer O, Greene JE, Hultman L, Petrov I, Greczynski G. Low-temperature growth of dense and hard Ti0.41Al0.51Ta0.08N films via hybrid HIPIMS/DC magnetron co-sputtering with synchronized metal-ion irradiation Journal of Applied Physics. 121: 171902. DOI: 10.1063/1.4977818 |
0.489 |
|
| 2017 |
Edström D, Sangiovanni D, Hultman L, Petrov I, Greene JE, Chirita V. Effects of incident N atom kinetic energy on TiN/TiN(001) film growth dynamics: A molecular dynamics investigation Journal of Applied Physics. 121: 25302. DOI: 10.1063/1.4972963 |
0.474 |
|
| 2017 |
Greczynski G, Zhirkov I, Petrov I, Greene JE, Rosén J. Control of the metal/gas ion ratio incident at the substrate plane during high-power impulse magnetron sputtering of transition metals in Ar Thin Solid Films. 642: 36-40. DOI: 10.1016/J.Tsf.2017.09.027 |
0.312 |
|
| 2017 |
Kindlund H, Greczynski G, Broitman E, Martínez-de-Olcoz L, Lu J, Jensen J, Petrov I, Greene JE, Birch J, Hultman L. V0.5Mo0.5Nx/MgO(001): Composition, nanostructure, and mechanical properties as a function of film growth temperature Acta Materialia. 126: 194-201. DOI: 10.1016/J.Actamat.2016.12.048 |
0.432 |
|
| 2016 |
Edström D, Sangiovanni D, Hultman L, Petrov I, Greene JE, Chirita V. Large-scale molecular dynamics simulations of TiN/TiN(001) epitaxial film growth Journal of Vacuum Science and Technology. 34: 41509. DOI: 10.1116/1.4953404 |
0.406 |
|
| 2016 |
Mei AB, Tuteja M, Sangiovanni D, Haasch RT, Rockett A, Hultman L, Petrov I, Greene JE. Growth, nanostructure, and optical properties of epitaxial VNx/MgO(001) (0.80 ≤ x ≤ 1.00) layers deposited by reactive magnetron sputtering Journal of Materials Chemistry C. 4: 7924-7938. DOI: 10.1039/C6Tc02289H |
0.451 |
|
| 2016 |
Sangiovanni D, Mei AB, Hultman L, Chirita V, Petrov I, Greene JE. Ab Initio Molecular Dynamics Simulations of Nitrogen/VN(001) Surface Reactions: Vacancy-Catalyzed N2 Dissociative Chemisorption, N Adatom Migration, and N2 Desorption Journal of Physical Chemistry C. 120: 12503-12516. DOI: 10.1021/Acs.Jpcc.6B02652 |
0.303 |
|
| 2016 |
Greczynski G, Lu J, Tengstrand O, Petrov I, Greene JE, Hultman L. Nitrogen-doped bcc-Cr films: Combining ceramic hardness with metallic toughness and conductivity Scripta Materialia. 122: 40-44. DOI: 10.1016/J.Scriptamat.2016.05.011 |
0.394 |
|
| 2016 |
Hellgren N, Haasch RT, Schmidt S, Hultman L, Petrov I. Interpretation of X-ray photoelectron spectra of carbon-nitride thin films: New insights from in situ XPS Carbon. 108: 242-252. DOI: 10.1016/J.Carbon.2016.07.017 |
0.485 |
|
| 2016 |
Sangiovanni DG, Hultman L, Chirita V, Petrov I, Greene JE. Effects of phase stability, lattice ordering, and electron density on plastic deformation in cubic TiWN pseudobinary transition-metal nitride alloys Acta Materialia. 103: 823-835. DOI: 10.1016/J.Actamat.2015.10.039 |
0.377 |
|
| 2015 |
Fager H, Howe BM, Greczynski G, Jensen J, Mei AB, Lu J, Hultman L, Greene JE, Petrov I. Novel hard, tough HfAlSiN multilayers, defined by alternating Si bond structure, deposited using modulated high-flux, low-energy ion irradiation of the growing film Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 33. DOI: 10.1116/1.4920980 |
0.759 |
|
| 2015 |
Greczynski G, Petrov I, Greene JE, Hultman L. Al capping layers for nondestructive x-ray photoelectron spectroscopy analyses of transition-metal nitride thin films Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 33. DOI: 10.1116/1.4916239 |
0.487 |
|
| 2015 |
Mei AB, Hellman O, Schlepütz CM, Rockett A, Chiang TC, Hultman L, Petrov I, Greene JE. Reflection thermal diffuse x-ray scattering for quantitative determination of phonon dispersion relations Physical Review B - Condensed Matter and Materials Physics. 92. DOI: 10.1103/Physrevb.92.174301 |
0.336 |
|
| 2015 |
Mei AB, Hellman O, Wireklint N, Schlepütz CM, Sangiovanni DG, Alling B, Rockett A, Hultman L, Petrov I, Greene JE. Dynamic and structural stability of cubic vanadium nitride Physical Review B - Condensed Matter and Materials Physics. 91. DOI: 10.1103/Physrevb.91.054101 |
0.363 |
|
| 2015 |
Greczynski G, Petrov I, Greene JE, Hultman L. Strategy for tuning the average charge state of metal ions incident at the growing film during HIPIMS deposition Vacuum. 116: 36-41. DOI: 10.1016/J.Vacuum.2015.02.027 |
0.373 |
|
| 2015 |
Edström D, Sangiovanni DG, Hultman L, Petrov I, Greene JE, Chirita V. The dynamics of TiNx (x = 1-3) admolecule interlayer and intralayer transport on TiN/TiN(001) islands Thin Solid Films. 589: 133-144. DOI: 10.1016/J.Tsf.2015.05.013 |
0.326 |
|
| 2015 |
Greczynski G, Patscheider J, Lu J, Alling B, Ektarawong A, Jensen J, Petrov I, Greene JE, Hultman L. Control of Ti1-xSixN nanostructure via tunable metal-ion momentum transfer during HIPIMS/DCMS co-deposition Surface and Coatings Technology. 280: 174-184. DOI: 10.1016/J.Surfcoat.2015.09.001 |
0.336 |
|
| 2015 |
Ghafoor N, Petrov I, Klenov DO, Freitag B, Jensen J, Greene JE, Hultman L, Odén M. Self-organized anisotropic (Zr1-xSix)Ny nanocomposites grown by reactive sputter deposition Acta Materialia. 82: 179-189. DOI: 10.1016/J.Actamat.2014.09.029 |
0.508 |
|
| 2014 |
Cho J, Losego MD, Zhang HG, Kim H, Zuo J, Petrov I, Cahill DG, Braun PV. Electrochemically tunable thermal conductivity of lithium cobalt oxide. Nature Communications. 5: 4035. PMID 24892640 DOI: 10.1038/Ncomms5035 |
0.314 |
|
| 2014 |
Greczynski G, Jensen J, Greene JE, Petrov I, Hultman L. X-ray Photoelectron Spectroscopy Analyses of the Electronic Structure of Polycrystalline Ti1-xAlxN Thin Films with 0 ≤ x ≤ 0.96 Surface Science Spectra. 21: 35-49. DOI: 10.1116/11.20140506 |
0.502 |
|
| 2014 |
Greczynski G, Lu J, Bolz S, Kölker W, Schiffers C, Lemmer O, Petrov I, Greene JE, Hultman L. Novel strategy for low-temperature, high-rate growth of dense, hard, and stress-free refractory ceramic thin films Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 32. DOI: 10.1116/1.4884575 |
0.529 |
|
| 2014 |
Kindlund H, Sangiovanni DG, Lu J, Jensen J, Chirita V, Petrov I, Greene JE, Hultman L. Effect of WN content on toughness enhancement in V1-xW xN/MgO(001) thin films Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 32. DOI: 10.1116/1.4867610 |
0.388 |
|
| 2014 |
Mei AB, Wilson RB, Li D, Cahill DG, Rockett A, Birch J, Hultman L, Greene JE, Petrov I. Elastic constants, Poisson ratios, and the elastic anisotropy of VN(001), (011), and (111) epitaxial layers grown by reactive magnetron sputter deposition Journal of Applied Physics. 115. DOI: 10.1063/1.4881817 |
0.361 |
|
| 2014 |
Edström D, Sangiovanni DG, Hultman L, Chirita V, Petrov I, Greene JE. Ti and N adatom descent pathways to the terrace from atop two-dimensional TiN/TiN(001) islands Thin Solid Films. 558: 37-46. DOI: 10.1016/J.Tsf.2014.02.053 |
0.345 |
|
| 2014 |
Greczynski G, Lu J, Jensen J, Petrov I, Greene JE, Bolz S, Kölker W, Schiffers C, Lemmer O, Hultman L. Strain-free, single-phase metastable Ti0.38Al0.62N alloys with high hardness: Metal-ion energy vs. momentum effects during film growth by hybrid high-power pulsed/dc magnetron cosputtering Thin Solid Films. 556: 87-98. DOI: 10.1016/J.Tsf.2014.01.017 |
0.46 |
|
| 2014 |
Sangiovanni DG, Edströma D, Hultmana L, Petrov I, Greene JE, Chirita V. Ti adatom diffusion on TiN(001): Ab initio and classical molecular dynamics simulations Surface Science. 627: 34-41. DOI: 10.1016/J.Susc.2014.04.007 |
0.325 |
|
| 2014 |
Sangiovanni DG, Edström D, Hultman L, Petrov I, Greene JE, Chirita V. Ab initio and classical molecular dynamics simulations of N2 desorption from TiN(001) surfaces Surface Science. 624: 25-31. DOI: 10.1016/J.Susc.2014.01.007 |
0.308 |
|
| 2014 |
Hovsepian PE, Ehiasarian AP, Petrov I. Structure evolution and properties of TiAlCN/VCN coatings deposited by reactive HIPIMS Surface and Coatings Technology. 257: 38-47. DOI: 10.1016/J.Surfcoat.2014.07.065 |
0.382 |
|
| 2014 |
Eriksson AO, Tengstrand O, Lu J, Jensen J, Eklund P, Rosén J, Petrov I, Greene JE, Hultman L. Si incorporation in Ti1-xSixN films grown on TiN(001) and (001)-faceted TiN(111) columns Surface and Coatings Technology. 257: 121-128. DOI: 10.1016/J.Surfcoat.2014.05.043 |
0.516 |
|
| 2014 |
Kindlund H, Sangiovanni DG, Lu J, Jensen J, Chirita V, Birch J, Petrov I, Greene JE, Hultman L. Vacancy-induced toughening in hard single-crystal V0.5Mo 0.5Nx/MgO(0 0 1) thin films Acta Materialia. 77: 394-400. DOI: 10.1016/J.Actamat.2014.06.025 |
0.405 |
|
| 2013 |
Xu S, Zhang Y, Cho J, Lee J, Huang X, Jia L, Fan JA, Su Y, Su J, Zhang H, Cheng H, Lu B, Yu C, Chuang C, Kim TI, ... ... Petrov I, et al. Stretchable batteries with self-similar serpentine interconnects and integrated wireless recharging systems. Nature Communications. 4: 1543. PMID 23443571 DOI: 10.1038/Ncomms2553 |
0.331 |
|
| 2013 |
Greczynski G, Kindlund H, Petrov I, Greene JE, Hultman L. Sputter-cleaned Epitaxial VxMo(1-x)Ny/MgO(001) Thin Films Analyzed by X-ray Photoelectron Spectroscopy: 3. Polycrystalline V0.49Mo0.51N1.02 Surface Science Spectra. 20: 80-85. DOI: 10.1116/11.20130602 |
0.504 |
|
| 2013 |
Greczynski G, Kindlund H, Petrov I, Greene JE, Hultman L. Sputter-cleaned Epitaxial VxMo(1-x)Ny/MgO(001) Thin Films Analyzed by X-ray Photoelectron Spectroscopy: 2. Single-crystal V0.47Mo0.53N0.92 Surface Science Spectra. 20: 74-79. DOI: 10.1116/11.20130601 |
0.511 |
|
| 2013 |
Mei AB, Howe BM, Zhang C, Sardela M, Eckstein JN, Hultman L, Rockett A, Petrov I, Greene JE. Physical properties of epitaxial ZrN/MgO(001) layers grown by reactive magnetron sputtering Journal of Vacuum Science & Technology a: Vacuum, Surfaces, and Films. 31: 061516. DOI: 10.1116/1.4825349 |
0.736 |
|
| 2013 |
Kindlund H, Lu J, Jensen J, Petrov I, Greene JE, Hultman L. Epitaxial V0.6W0.4N/MgO(001): Evidence for ordering on the cation sublattice Journal of Vacuum Science and Technology. 31: 40602. DOI: 10.1116/1.4807654 |
0.344 |
|
| 2013 |
Kindlund H, Sangiovanni D, Martínez-de-Olcoz L, Lu J, Jensen J, Birch J, Petrov I, Greene J, Chirita V, Hultman L. Toughness enhancement in hard ceramic thin films by alloy design Apl Materials. 1: 42104. DOI: 10.1063/1.4822440 |
0.409 |
|
| 2013 |
Ghafoor N, Johnson LJS, Klenov DO, Demeulemeester J, Desjardins P, Petrov I, Hultman L, Odén M. Nanolabyrinthine ZrAlN thin films by self-organization of interwoven single-crystal cubic and hexagonal phases Apl Materials. 1. DOI: 10.1063/1.4818170 |
0.371 |
|
| 2013 |
Bettge M, Li Y, Sankaran B, Rago ND, Spila T, Haasch RT, Petrov I, Abraham DP. Improving high-capacity Li1.2Ni0.15Mn 0.55Co0.1O2-based lithium-ion cells by modifiying the positive electrode with alumina Journal of Power Sources. 233: 346-357. DOI: 10.1016/J.Jpowsour.2013.01.082 |
0.319 |
|
| 2012 |
Bettge M, MacLaren S, Burdin S, Haasch RT, Abraham D, Petrov I, Yu MF, Sammann E. Ion-induced surface relaxation: controlled bending and alignment of nanowire arrays. Nanotechnology. 23: 175302. PMID 22481483 DOI: 10.1088/0957-4484/23/17/175302 |
0.338 |
|
| 2012 |
Haasch RT, Patscheider J, Hellgren N, Petrov I, Greene JE. The Si3N4/TiN Interface: An Introduction to a Series of Ultrathin Films Grown and Analyzed In situ using X-ray Photoelectron Spectroscopy Surface Science Spectra. 19: 30-32. DOI: 10.1116/11.20121108 |
0.435 |
|
| 2012 |
Haasch RT, Patscheider J, Hellgren N, Petrov I, Greene JE. The Si3N4/TiN Interface: 7. Ti/TiN(001) Grown and Analyzed In situ using X-ray Photoelectron Spectroscopy Surface Science Spectra. 19: 92-97. DOI: 10.1116/11.20121007 |
0.468 |
|
| 2012 |
Haasch RT, Patscheider J, Hellgren N, Petrov I, Greene JE. The Si3N4/TiN Interface: 6. Si/TiN(001) Grown and Analyzed In situ using Angle-resolved X-ray Photoelectron Spectroscopy Surface Science Spectra. 19: 82-91. DOI: 10.1116/11.20121006 |
0.456 |
|
| 2012 |
Haasch RT, Patscheider J, Hellgren N, Petrov I, Greene JE. The Si3N4/TiN Interface: 4. Si3N4/TiN(001) Grown with a −250 V Substrate Bias and Analyzed In situ using Angle-resolved X-ray Photoelectron Spectroscopy Surface Science Spectra. 19: 62-71. DOI: 10.1116/11.20121004 |
0.461 |
|
| 2012 |
Haasch RT, Patscheider J, Hellgren N, Petrov I, Greene JE. The Si3N4/TiN Interface: 1. TiN(001) Grown and Analyzed In situ using Angle-resolved X-ray Photoelectron Spectroscopy Surface Science Spectra. 19: 33-41. DOI: 10.1116/11.20121001 |
0.457 |
|
| 2012 |
Greczynski G, Lu J, Jensen J, Petrov I, Greene JE, Bolz S, Kölker W, Schiffers C, Lemmer O, Hultman L. Metal versus rare-gas ion irradiation during Ti1−xAlxN film growth by hybrid high power pulsed magnetron/dc magnetron co-sputtering using synchronized pulsed substrate bias Journal of Vacuum Science and Technology. 30: 61504. DOI: 10.1116/1.4750485 |
0.399 |
|
| 2012 |
Murata Y, Petrova V, Petrov I, Ciobanu CV, Kodambaka S. Role of ethylene on surface oxidation of TiO2(110) Applied Physics Letters. 101. DOI: 10.1063/1.4767954 |
0.306 |
|
| 2012 |
Greczynski G, Lu J, Johansson M, Jensen J, Petrov I, Greene JE, Hultman L. Selection of metal ion irradiation for controlling Ti1-xAlxN alloy growth via hybrid HIPIMS/magnetron co-sputtering Vacuum. 86: 1036-1040. DOI: 10.1016/J.Vacuum.2011.10.027 |
0.367 |
|
| 2012 |
Greczynski G, Lu J, Johansson MP, Jensen J, Petrov I, Greene JE, Hultman L. Role of Ti n+ and Al n+ ion irradiation (n=1, 2) during Ti 1-xAl xN alloy film growth in a hybrid HIPIMS/magnetron mode Surface and Coatings Technology. 206: 4202-4211. DOI: 10.1016/J.Surfcoat.2012.04.024 |
0.497 |
|
| 2012 |
Bettge M, Ryu SY, MacLaren S, Burdin S, Petrov I, Yu MF, Sammann E, Abraham DP. Hierarchically textured Li xMn 2-yO 4 thin films as positive electrodes for lithium-ion batteries Journal of Power Sources. 206: 288-294. DOI: 10.1016/J.Jpowsour.2012.01.128 |
0.394 |
|
| 2011 |
Patscheider J, Hellgren N, Haasch RT, Petrov I, Greene JE. Electronic structure of the SiN x /TiN interface: A model system for superhard nanocomposites Physical Review B. 83: 125124. DOI: 10.1103/Physrevb.83.125124 |
0.391 |
|
| 2011 |
Stoehr M, Shin C-, Petrov I, Greene JE. Raman scattering from TiNx (0.67 ≤ x ≤ 1.00) single crystals grown on MgO(001) Journal of Applied Physics. 110: 83503. DOI: 10.1063/1.3651381 |
0.362 |
|
| 2011 |
Cho B, Bareño J, Petrov I, Greene JE. Enhanced Ge/Si(001) island areal density and self-organization due to P predeposition Journal of Applied Physics. 109: 93526. DOI: 10.1063/1.3587226 |
0.348 |
|
| 2011 |
Bareño J, Balasubramanian M, Kang SH, Wen JG, Lei CH, Pol SV, Petrov I, Abraham DP. Long-Range and Local Structure in the Layered Oxide Li1.2Co0.4Mn0.4O2 Chemistry of Materials. 23: 2039-2050. DOI: 10.1021/Cm200250A |
0.325 |
|
| 2011 |
Wen JG, Bareño J, Lei CH, Kang SH, Balasubramanian M, Petrov I, Abraham DP. Analytical electron microscopy of Li1.2Co0.4Mn0.4O2 for lithium-ion batteries Solid State Ionics. 182: 98-107. DOI: 10.1016/J.Ssi.2010.11.030 |
0.332 |
|
| 2011 |
Howe BM, Sammann E, Wen JG, Spila T, Greene JE, Hultman L, Petrov I. Real-time control of AlN incorporation in epitaxial Hf1 − xAlxN using high-flux, low-energy (10–40 eV) ion bombardment during reactive magnetron sputter deposition from a Hf0.7Al0.3 alloy target Acta Materialia. 59: 421-428. DOI: 10.1016/J.Actamat.2010.08.023 |
0.511 |
|
| 2010 |
Murata Y, Petrova V, Kappes BB, Ebnonnasir A, Petrov I, Xie YH, Ciobanu CV, Kodambaka S. Moiré superstructures of graphene on faceted nickel islands. Acs Nano. 4: 6509-14. PMID 20945924 DOI: 10.1021/Nn102446Y |
0.303 |
|
| 2010 |
Unarunotai S, Koepke JC, Tsai CL, Du F, Chialvo CE, Murata Y, Haasch R, Petrov I, Mason N, Shim M, Lyding J, Rogers JA. Layer-by-layer transfer of multiple, large area sheets of graphene grown in multilayer stacks on a single SiC wafer. Acs Nano. 4: 5591-8. PMID 20843091 DOI: 10.1021/Nn101896A |
0.387 |
|
| 2010 |
Shah AB, Ramasse QM, Zhai X, Wen JG, May SJ, Petrov I, Bhattacharya A, Abbamonte P, Eckstein JN, Zuo JM. Probing interfacial electronic structures in atomic layer LaMnO(3) and SrTiO(3) superlattices. Advanced Materials (Deerfield Beach, Fla.). 22: 1156-60. PMID 20401940 DOI: 10.1002/Adma.200904198 |
0.336 |
|
| 2010 |
Bareño J, Lei CH, Wen JG, Kang S‐, Petrov I, Abraham DP. Local Structure of Layered Oxide Electrode Materials for Lithium‐Ion Batteries Advanced Materials. 22: 1122-1127. PMID 20401936 DOI: 10.1002/Adma.200904247 |
0.336 |
|
| 2010 |
Curiel M, Petrov I, Nedev N, Nesheva D, Sardela MR, Murata Y, Valdez B, Manolov E, Bineva I. Formation of Si Nanocrystals in Thin SiO2 Films for Memory Device Applications Materials Science Forum. 644: 101-104. DOI: 10.4028/Www.Scientific.Net/Msf.644.101 |
0.444 |
|
| 2010 |
Hovsepian P, Ehiasarian A, Petrov I. TiAlCN/VCN nanolayer coatings suitable for machining of Al and Ti alloys deposited by combined high power impulse magnetron sputtering/unbalanced magnetron sputtering Surface Engineering. 26: 610-614. DOI: 10.1179/026708408X336337 |
0.411 |
|
| 2010 |
Lee T, Seo H, Hwang H, Howe B, Kodambaka S, Greene J, Petrov I. Fully strained low-temperature epitaxy of TiN/MgO(001) layers using high-flux, low-energy ion irradiation during reactive magnetron sputter deposition Thin Solid Films. 518: 5169-5172. DOI: 10.1016/J.Tsf.2010.04.028 |
0.506 |
|
| 2010 |
Curiel MA, Nedev N, Nesheva D, Soares J, Haasch R, Sardela M, Valdez B, Sankaran B, Manolov E, Bineva I, Petrov I. Microstructural characterization of thin SiOx films obtained by physical vapor deposition Materials Science and Engineering B-Advanced Functional Solid-State Materials. 174: 132-136. DOI: 10.1016/J.Mseb.2010.03.007 |
0.508 |
|
| 2010 |
Seo HC, Petrov I, Kim K. Structural Properties of AlN Grown on Sapphire at Plasma Self-Heating Conditions Using Reactive Magnetron Sputter Deposition Journal of Electronic Materials. 39: 1146-1151. DOI: 10.1007/S11664-010-1275-4 |
0.521 |
|
| 2010 |
Terrazas JM, Nedev N, Manolov E, Valdez B, Nesheva D, Curiel MA, Haasch R, Petrov I. Effect of oxygen to argon ratio on the properties of thin SiO x films deposited by r.f. sputtering Journal of Materials Science: Materials in Electronics. 21: 481-485. DOI: 10.1007/S10854-009-9942-Z |
0.451 |
|
| 2009 |
Bettge M, MacLaren S, Burdin S, Wen JG, Abraham D, Petrov I, Sammann E. Low-temperature vapour-liquid-solid (VLS) growth of vertically aligned silicon oxide nanowires using concurrent ion bombardment. Nanotechnology. 20: 115607. PMID 19420447 DOI: 10.1088/0957-4484/20/11/115607 |
0.454 |
|
| 2009 |
Ondrejcek M, Swiech W, Petrov I, Rajappan M, Flynn CP. LEEM investigations of surfaces using a beam of energetic self-ions. Microscopy Research and Technique. 72: 197-207. PMID 19170160 DOI: 10.1002/Jemt.20672 |
0.334 |
|
| 2009 |
Unarunotai S, Murata Y, Chialvo CE, Kim HS, MacLaren S, Mason N, Petrov I, Rogers JA. Transfer of graphene layers grown on SiC wafers to other substrates and their integration into field effect transistors Applied Physics Letters. 95. DOI: 10.1063/1.3263942 |
0.349 |
|
| 2009 |
Seo HC, Petrov I, Jeong H, Chapman P, Kim K. Elastic buckling of AlN ribbons on elastomeric substrate Applied Physics Letters. 94: 92104. DOI: 10.1063/1.3081632 |
0.451 |
|
| 2009 |
Lei CH, Wen JG, Sardela M, Bareño J, Petrov I, Kang S-, Abraham DP. Structural study of Li2MnO3 by electron microscopy Journal of Materials Science. 44: 5579-5587. DOI: 10.1007/S10853-009-3784-1 |
0.341 |
|
| 2008 |
Schultz MJ, Zhang X, Unarunotai S, Khang DY, Cao Q, Wang C, Lei C, MacLaren S, Soares JA, Petrov I, Moore JS, Rogers JA. Synthesis of linked carbon monolayers: films, balloons, tubes, and pleated sheets. Proceedings of the National Academy of Sciences of the United States of America. 105: 7353-8. PMID 18508969 DOI: 10.1073/Pnas.0710081105 |
0.357 |
|
| 2008 |
Swiech W, Rajappan M, Ondrejcek M, Sammann E, Burdin S, Petrov I, Flynn CP. Real-time imaging of surface evolution driven by variable-energy ion irradiation. Ultramicroscopy. 108: 646-55. PMID 18063481 DOI: 10.1016/J.Ultramic.2007.10.005 |
0.328 |
|
| 2008 |
Stoehr M, Seo H-, Petrov I, Greene JE. Effect of off stoichiometry on Raman scattering from epitaxial and polycrystalline HfNx (0.85≤x≤ 1.50) grown on MgO(001) Journal of Applied Physics. 104: 33507. DOI: 10.1063/1.2961332 |
0.342 |
|
| 2008 |
Cho B, Bareño J, Foo YL, Hong S, Spila T, Petrov I, Greene JE. Phosphorus incorporation during Si(001):P gas-source molecular beam epitaxy: Effects on growth kinetics and surface morphology Journal of Applied Physics. 103: 123530. DOI: 10.1063/1.2925798 |
0.398 |
|
| 2008 |
Lei CH, Bareño J, Wen JG, Petrov I, Kang S-, Abraham DP. Local structure and composition studies of Li1.2Ni0.2Mn0.6O2 by analytical electron microscopy Journal of Power Sources. 178: 422-433. DOI: 10.1016/J.Jpowsour.2007.11.077 |
0.363 |
|
| 2008 |
Audronis M, Leyland A, Matthews A, Wen JG, Petrov I. Characterization studies of pulse magnetron sputtered hard ceramic titanium diboride coatings alloyed with silicon Acta Materialia. 56: 4172-4182. DOI: 10.1016/J.Actamat.2008.04.047 |
0.465 |
|
| 2007 |
Park YM, Ko DS, Yi KW, Petrov I, Kim YW. Measurement and estimation of temperature rise in TEM sample during ion milling. Ultramicroscopy. 107: 663-8. PMID 17307292 DOI: 10.1016/J.Ultramic.2007.01.002 |
0.339 |
|
| 2007 |
Ehiasarian AP, Anders A, Petrov I. Combined filtered cathodic arc etching pretreatment–magnetron sputter deposition of highly adherent CrN films Journal of Vacuum Science and Technology. 25: 543-550. DOI: 10.1116/1.2730512 |
0.472 |
|
| 2007 |
Hultman L, Bareño J, Flink A, Söderberg H, Larsson K, Petrova V, Odén M, Greene JE, Petrov I. Interface structure in superhard TiN-SiN nanolaminates and nanocomposites : film growth experiments and ab initio calculations Physical Review B. 75: 155437. DOI: 10.1103/Physrevb.75.155437 |
0.373 |
|
| 2007 |
Stoehr M, Shin C-, Petrov I, Greene JE. Raman scattering from epitaxial TaNx (0.94 ≤x≤ 1.37) layers grown on MgO(001) Journal of Applied Physics. 101: 123509. DOI: 10.1063/1.2748354 |
0.302 |
|
| 2007 |
Ehiasarian AP, Wen JG, Petrov I. Interface microstructure engineering by high power impulse magnetron sputtering for the enhancement of adhesion Journal of Applied Physics. 101: 54301. DOI: 10.1063/1.2697052 |
0.338 |
|
| 2007 |
Howe B, Bareño J, Sardela M, Wen JG, Greene JE, Hultman L, Voevodin AA, Petrov I. Growth and physical properties of epitaxial metastable Hf1 − xAlxN alloys deposited on MgO(001) by ultrahigh vacuum reactive magnetron sputtering Surface & Coatings Technology. 202: 809-814. DOI: 10.1016/J.Surfcoat.2007.05.079 |
0.726 |
|
| 2007 |
Persson P, Kodambaka S, Petrov I, Hultman L. Epitaxial Ti2AlN(0 0 0 1) thin film deposition by dual-target reactive magnetron sputtering Acta Materialia. 55: 4401-4407. DOI: 10.1016/J.Actamat.2007.04.006 |
0.507 |
|
| 2006 |
Tang SJ, Kodambaka S, Swiech W, Petrov I, Flynn CP, Chiang TC. Sublimation of atomic layers from a chromium surface. Physical Review Letters. 96: 126106. PMID 16605934 DOI: 10.1103/Physrevlett.96.126106 |
0.361 |
|
| 2006 |
Kok YN, Wen JG, Petrov I, Hovsepian PE. Influence of ion bombardment on structure and tribological performance of nanoscale multilayer C/Cr PVD coatings Surface Engineering. 22: 92-98. DOI: 10.1179/174329406X98377 |
0.331 |
|
| 2006 |
Faraci G, Pennisi AR, Zontone F, Li B, Petrov I. Expansion and melting of Xe nanocrystals in Si Physical Review B. 74: 235436. DOI: 10.1103/Physrevb.74.235436 |
0.363 |
|
| 2006 |
Mayrhofer PH, Mitterer C, Wen JG, Petrov I, Greene JE. Thermally induced self-hardening of nanocrystalline Ti-B-N thin films Journal of Applied Physics. 100: 44301. DOI: 10.1063/1.2222406 |
0.487 |
|
| 2006 |
Lim CW, Greene JE, Petrov I. CoSi2 growth on Si(001) by reactive deposition epitaxy: Effects of high-flux, low-energy ion irradiation Journal of Applied Physics. 100: 13510. DOI: 10.1063/1.2213351 |
0.482 |
|
| 2006 |
Wen J, Mayrhofer P, Mitterer C, Greene J, Petrov I. Self-hardening of Nanocrystalline Ti-B-N Thin Films Microscopy and Microanalysis. 12: 720-721. DOI: 10.1017/S1431927606067559 |
0.381 |
|
| 2006 |
Lim CW, Petrov I, Greene JE. Epitaxial growth of CoSi2 on Si(001) by reactive deposition epitaxy: Island growth and coalescence Thin Solid Films. 515: 1340-1348. DOI: 10.1016/J.Tsf.2006.03.043 |
0.386 |
|
| 2006 |
Bareño J, Kodambaka S, Khare SV, Świech W, Petrov I, Greene JE. Orientation-dependent mobilities from analyses of two-dimensional TiN(111) island decay kinetics Thin Solid Films. 510: 339-345. DOI: 10.1016/J.Tsf.2005.12.164 |
0.31 |
|
| 2006 |
Kodambaka S, Khare SV, Petrov I, Greene JE. Two-dimensional island dynamics: Role of step energy anisotropy Surface Science Reports. 60: 55-77. DOI: 10.1016/J.Surfrep.2005.10.002 |
0.302 |
|
| 2006 |
Vitanov P, Harizanova A, Petrov I, Alexieva Z, Dimitrova T. Deposition and Properties of Thin (ZrO2)x(Al2O3)1-x Films on Silicon Plasma Processes and Polymers. 3: 179-183. DOI: 10.1002/Ppap.200500132 |
0.421 |
|
| 2005 |
Ohmori K, Foo YL, Hong S, Wen JG, Greene JE, Petrov I. Directed self-assembly of Ge nanostructures on very high index, highly anisotropic Si(hkl) surfaces. Nano Letters. 5: 369-72. PMID 15794627 DOI: 10.1021/Nl048340W |
0.328 |
|
| 2005 |
Kodambaka S, Barẽo J, Khare SV, Świȩch W, Petrov I, Greene JE. Nucleation and growth kinetics of spiral steps on TiN(111): An in situ low-energy electron microscopy study Journal of Applied Physics. 98. DOI: 10.1063/1.1977193 |
0.369 |
|
| 2005 |
Mayrhofer PH, Mitterer C, Wen JG, Greene JE, Petrov I. Self-organized nanocolumnar structure in superhard TiB2 thin films Applied Physics Letters. 86: 131909. DOI: 10.1063/1.1887824 |
0.431 |
|
| 2005 |
Seo H, Lee T, Petrov I, Greene JE, Gall D. Epitaxial and polycrystalline HfNx (0.8⩽x⩽1.5) layers on MgO(001): Film growth and physical properties Journal of Applied Physics. 97: 083521. DOI: 10.1063/1.1870097 |
0.481 |
|
| 2005 |
Lim CW, Shin C-, Gall D, Zuo JM, Petrov I, Greene JE. Growth of CoSi2 on Si(001) by reactive deposition epitaxy Journal of Applied Physics. 97: 44909. DOI: 10.1063/1.1774263 |
0.46 |
|
| 2005 |
Kok YN, Hovsepian PE, Luo Q, Lewis DB, Wen JG, Petrov I. Influence of the bias voltage on the structure and the tribological performance of nanoscale multilayer C/Cr PVD coatings Thin Solid Films. 475: 219-226. DOI: 10.1016/J.Tsf.2004.08.042 |
0.308 |
|
| 2005 |
Lee GR, Lee JJ, Shin CS, Petrov I, Greene JE. Self-organized lamellar structured tantalum–nitride by UHV unbalanced-magnetron sputtering Thin Solid Films. 475: 45-48. DOI: 10.1016/J.Tsf.2004.07.070 |
0.481 |
|
| 2005 |
Wall MA, Cahill DG, Petrov I, Gall D, Greene JE. Nucleation kinetics versus nitrogen partial pressure during homoepitaxial growth of stoichiometric TiN(0 0 1): A scanning tunneling microscopy study Surface Science. 581: L122-L127. DOI: 10.1016/J.Susc.2005.03.007 |
0.412 |
|
| 2005 |
Hovsepian PE, Kok YN, Ehiasarian AP, Haasch R, Wen J-, Petrov I. Phase separation and formation of the self-organised layered nanostructure in C/Cr coatings in conditions of high ion irradiation Surface & Coatings Technology. 200: 1572-1579. DOI: 10.1016/J.Surfcoat.2005.08.095 |
0.445 |
|
| 2005 |
Kok YN, Hovsepian PE, Haasch R, Petrov I. Raman spectroscopy study of C/Cr coatings deposited by the combined steered cathodic ARC/unbalanced magnetron sputtering technique Surface & Coatings Technology. 200: 1117-1122. DOI: 10.1016/J.Surfcoat.2005.02.023 |
0.367 |
|
| 2004 |
Kodambaka S, Khare SV, Swiech W, Ohmori K, Petrov I, Greene JE. Dislocation-driven surface dynamics on solids. Nature. 429: 49-52. PMID 15129275 DOI: 10.1038/Nature02495 |
0.32 |
|
| 2004 |
Bjurstrom J, Rosen D, Katardjiev I, Yanchev VM, Petrov I. Dependence of the electromechanical coupling on the degree of orientation of c-textured thin AlN films Ieee Transactions On Ultrasonics Ferroelectrics and Frequency Control. 51: 1347-1353. DOI: 10.1109/Tuffc.2004.1350963 |
0.41 |
|
| 2004 |
Wall MA, Cahill DG, Petrov I, Gall D, Greene JE. Nucleation kinetics during homoepitaxial growth of TiN(001) by reactive magnetron sputtering Physical Review B - Condensed Matter and Materials Physics. 70: 035413-1-035413-8. DOI: 10.1103/Physrevb.70.035413 |
0.399 |
|
| 2004 |
Seo H, Lee T, Wen JG, Petrov I, Greene JE, Gall D. Growth and physical properties of epitaxial HfN layers on MgO(001) Journal of Applied Physics. 96: 878-884. DOI: 10.1063/1.1759783 |
0.444 |
|
| 2004 |
Lee T-, Kodambaka S, Wen JG, Twesten RD, Greene JE, Petrov I. Directed nanostructural evolution in Ti0.8Ce0.2N layers grown as a function of low-energy, high-flux ion irradiation Applied Physics Letters. 84: 2796-2798. DOI: 10.1063/1.1699468 |
0.525 |
|
| 2004 |
Shin C-, Rudenja S, Gall D, Hellgren N, Lee T-, Petrov I, Greene JE. Growth, surface morphology, and electrical resistivity of fully strained substoichiometric epitaxial TiNx (0.67⩽x<1.0) layers on MgO(001) Journal of Applied Physics. 95: 356-362. DOI: 10.1063/1.1629155 |
0.42 |
|
| 2004 |
Donchev T, Tsaneva V, Barber ZH, Nurgaliev T, Gravier L, Ansermet JP, Petrov I, Petrova V. Magnetic and electric properties of magnetron-sputtered YBCO/LSMO and LSMO/YBCO double layers Vacuum. 76: 261-264. DOI: 10.1016/J.Vacuum.2004.07.028 |
0.441 |
|
| 2004 |
Vitanov P, Harizanova A, Angelov C, Petrov I, Alexieva Z, Stefanov P. Structure and optical properties of (Al2O3) x(Tio)1-x thin films prepared by a sol-gel processing Vacuum. 76: 215-218. DOI: 10.1016/J.Vacuum.2004.07.017 |
0.42 |
|
| 2004 |
Kodambaka S, Khare SV, Petrova V, Vailionis A, Petrov I, Greene JE. Determination of absolute orientation-dependent TiN(0 0 1) and TiN(1 1 1) step energies Vacuum. 74: 345-351. DOI: 10.1016/J.Vacuum.2004.01.015 |
0.338 |
|
| 2004 |
Kodambaka S, Israeli N, Bareño J, Święch W, Ohmori K, Petrov I, Greene JE. Low-energy electron microscopy studies of interlayer mass transport kinetics on TiN(111) Surface Science. 560: 53-62. DOI: 10.1016/J.Susc.2004.05.005 |
0.348 |
|
| 2003 |
Abraham DP, Twesten RD, Balasubramanian M, Kropf J, Fischer D, McBreen J, Petrov I, Amine K. Microscopy and Spectroscopy of Lithium Nickel Oxide-Based Particles Used in High Power Lithium-Ion Cells Journal of the Electrochemical Society. 150: A1450. DOI: 10.1149/1.1613291 |
0.371 |
|
| 2003 |
Khabari A, Urban FK, Griffiths P, Petrov I, Kim YW, Bungay C. Nanoparticle beam formation and investigation of gold nanostructured films Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21: 2313-2318. DOI: 10.1116/1.1615985 |
0.444 |
|
| 2003 |
Petrov I, Barna PB, Hultman L, Greene JE. Microstructural evolution during film growth Journal of Vacuum Science and Technology. 21: 117. DOI: 10.1116/1.1601610 |
0.461 |
|
| 2003 |
Broitman E, Hellgren N, Czigány Z, Twesten RD, Luning J, Petrov I, Hultman L, Holloway BC. Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 21: 851-859. DOI: 10.1116/1.1575231 |
0.475 |
|
| 2003 |
Tian F, D’Arcy-Gall J, Lee T-, Sardela M, Gall D, Petrov I, Greene JE. Epitaxial Ti1-xWxN alloys grown on MgO(001) by ultrahigh vacuum reactive magnetron sputtering: Electronic properties and long-range cation ordering Journal of Vacuum Science and Technology. 21: 140-146. DOI: 10.1116/1.1525818 |
0.421 |
|
| 2003 |
Kodambaka S, Khare SV, Petrova V, Johnson DD, Petrov I, Greene JE. Absolute orientation-dependent anisotropic TiN(111) island step energies and stiffnesses from shape fluctuation analyses Physical Review B - Condensed Matter and Materials Physics. 67: 354091-354098. DOI: 10.1103/Physrevb.67.035409 |
0.303 |
|
| 2003 |
Lee T, Gall D, Shin C, Hellgren N, Petrov I, Greene JE. Growth and physical properties of epitaxial CeN layers on MgO(001) Journal of Applied Physics. 94: 921-927. DOI: 10.1063/1.1579113 |
0.483 |
|
| 2003 |
Shin C-, Gall D, Hellgren N, Patscheider J, Petrov I, Greene JE. Vacancy hardening in single-crystal TiNx(001) layers Journal of Applied Physics. 93: 6025-6028. DOI: 10.1063/1.1568521 |
0.372 |
|
| 2003 |
Gall D, Kodambaka S, Wall MA, Petrov I, Greene JE. Pathways of atomistic processes on TiN(001) and (111) surfaces during film growth: An ab initio study Journal of Applied Physics. 93: 9086-9094. DOI: 10.1063/1.1567797 |
0.405 |
|
| 2003 |
Åbom AE, Comini E, Sberveglieri G, Finnegan N, Petrov I, Hultman L, Eriksson M. Experimental evidence for a dissociation mechanism in NH3 detection with MIS field-effect devices Sensors and Actuators B-Chemical. 89: 1-8. DOI: 10.1016/S0925-4005(02)00400-8 |
0.406 |
|
| 2003 |
Ehiasarian AP, Munz W-, Hultman L, Helmersson U, Petrov I. High power pulsed magnetron sputtered CrNX films Surface & Coatings Technology. 163: 267-272. DOI: 10.1016/S0257-8972(02)00479-6 |
0.497 |
|
| 2003 |
Kodambaka S, Chopp DL, Petrov I, Greene JE. Coalescence kinetics of two-dimensional TiN islands on atomically smooth TiN(0 0 1) and TiN(1 1 1) terraces Surface Science. 540: L611-L616. DOI: 10.1016/S0039-6028(03)00846-X |
0.337 |
|
| 2003 |
Kodambaka S, Petrova V, Vailionis A, Petrov I, Greene JE. In situ high-temperature scanning tunneling microscopy studies of two-dimensional TiN island coarsening kinetics on TiN (0 0 1) Surface Science. 526: 85-96. DOI: 10.1016/S0039-6028(02)02570-0 |
0.339 |
|
| 2003 |
Kodambaka S, Khare S, Petrova V, Vailionis A, Petrov I, Greene J. Erratum to: “Absolute orientation-dependent TiN(001) step energies from two-dimensional equilibrium island shape and coarsening measurements on epitaxial TiN(001) layers” [Surf. Sci. 513 (2002) 468–474] Surface Science. 523: 316. DOI: 10.1016/S0039-6028(02)02457-3 |
0.312 |
|
| 2003 |
Hovsepian PE, Kok YN, Ehiasarian AP, Erdemir A, Wen J-, Petrov I. Structure and tribological behaviour of nanoscale multilayer C/Cr coatings deposited by the combined steered cathodic arc/unbalanced magnetron sputtering technique Thin Solid Films. 447: 7-13. DOI: 10.1016/J.Tsf.2003.09.009 |
0.41 |
|
| 2003 |
Minor AM, Stach EA, Morris JW, Petrov I. In-situ nanoindentation of epitaxial TiN/MgO (001) in a transmission electron microscope Journal of Electronic Materials. 32: 1023-1027. DOI: 10.1007/S11664-003-0084-4 |
0.445 |
|
| 2002 |
Kodambaka S, Petrova V, Khare SV, Gall D, Rockett A, Petrov I, Greene JE. Size-dependent detachment-limited decay kinetics of two-dimensional TiN islands on TiN(111). Physical Review Letters. 89: 176102. PMID 12398688 DOI: 10.1103/Physrevlett.89.176102 |
0.318 |
|
| 2002 |
Kodambaka S, Petrova V, Khare SV, Johnson DD, Petrov I, Greene JE. Absolute TiN(111) step energies from analysis of anisotropic island shape fluctuations. Physical Review Letters. 88: 146101. PMID 11955162 DOI: 10.1103/Physrevlett.88.146101 |
0.301 |
|
| 2002 |
Shin C-, Kim Y-, Hellgren N, Gall D, Petrov I, Greene JE. Epitaxial growth of metastable δ-TaN layers on MgO(001) using low-energy, high-flux ion irradiation during ultrahigh vacuum reactive magnetron sputtering Journal of Vacuum Science and Technology. 20: 2007-2017. DOI: 10.1116/1.1513639 |
0.517 |
|
| 2002 |
Urban FK, Hosseini-Tehrani A, Griffiths P, Khabari A, Kim YW, Petrov I. Nanophase films deposited from a high-rate, nanoparticle beam Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 20: 995-999. DOI: 10.1116/1.1481749 |
0.451 |
|
| 2002 |
Shin C-, Gall D, Kim Y-, Hellgren N, Petrov I, Greene JE. Development of preferred orientation in polycrystalline NaCl-structure δ-TaN layers grown by reactive magnetron sputtering: Role of low-energy ion surface interactions Journal of Applied Physics. 92: 5084-5093. DOI: 10.1063/1.1510558 |
0.459 |
|
| 2002 |
O'Sullivan PL, Baumann FH, Gilmer GH, Torre JD, Shin CS, Petrov I, Lee T. Continuum model of thin film deposition incorporating finite atomic length scales Journal of Applied Physics. 92: 3487-3494. DOI: 10.1063/1.1497465 |
0.382 |
|
| 2002 |
Gall D, Shin C-, Haasch RT, Petrov I, Greene JE. Band gap in epitaxial NaCl-structure CrN(001) layers Journal of Applied Physics. 91: 5882-5886. DOI: 10.1063/1.1466528 |
0.408 |
|
| 2002 |
Gall D, Shin C-, Spila T, Odén M, Senna MJH, Greene JE, Petrov I. Growth of single-crystal CrN on MgO(001): Effects of low-energy ion-irradiation on surface morphological evolution and physical properties Journal of Applied Physics. 91: 3589-3597. DOI: 10.1063/1.1446239 |
0.425 |
|
| 2002 |
Abraham D, Twesten R, Balasubramanian M, Petrov I, McBreen J, Amine K. Surface changes on LiNi0.8Co0.2O2 particles during testing of high-power lithium-ion cells Electrochemistry Communications. 4: 620-625. DOI: 10.1016/S1388-2481(02)00388-0 |
0.3 |
|
| 2002 |
Donchev T, Tsaneva V, Nurgaliev T, Gravier L, Ansermet JP, Petrov I, Petrova V, Matz VW, Groetzschel R, Pignard S, Vincent H. YBCO/LSMO and LSMO/YBCO double-layer deposition by off-axis magnetron sputtering and strain effects Vacuum. 69: 243-247. DOI: 10.1016/S0042-207X(02)00339-1 |
0.487 |
|
| 2002 |
Urban FK, Hosseini-Tehrani A, Khabari A, Griffiths P, Bungay C, Petrov I, Kim Y. Optical properties of nanophase films measured by variable-angle spectroscopic ellipsometry Thin Solid Films. 408: 211-217. DOI: 10.1016/S0040-6090(02)00082-2 |
0.442 |
|
| 2002 |
Shin C-, Kim Y-, Gall D, Greene JE, Petrov I. Phase composition and microstructure of polycrystalline and epitaxial TaNx layers grown on oxidized Si(001) and MgO(001) by reactive magnetron sputter deposition Thin Solid Films. 402: 172-182. DOI: 10.1016/S0040-6090(01)01618-2 |
0.462 |
|
| 2002 |
Kodambaka S, Khare SV, Petrova V, Vailionis A, Petrov I, Greene JE. Absolute orientation-dependent TiN(0 0 1) step energies from two-dimensional equilibrium island shape and coarsening measurements on epitaxial TiN(0 0 1) layers Surface Science. 513: 468-474. DOI: 10.1016/S0039-6028(02)01845-9 |
0.333 |
|
| 2001 |
Baumann FH, Chopp DL, Rubia TDdl, Gilmer GH, Greene JE, Huang H, Kodambaka S, O'Sullivan P, Petrov I. Multiscale Modeling of Thin-Film Deposition: Applications to Si Device Processing Mrs Bulletin. 26: 182-189. DOI: 10.1557/Mrs2001.40 |
0.372 |
|
| 2001 |
Hellgren N, Lin N, Broitman E, Serin V, Grillo SE, Twesten R, Petrov I, Colliex C, Hultman L, Sundgren J. Thermal stability of carbon nitride thin films Journal of Materials Research. 16: 3188-3201. DOI: 10.1557/Jmr.2001.0440 |
0.46 |
|
| 2001 |
Chun J, Desjardins P, Lavoie C, Petrov I, Cabral C, Greene JE. Interfacial reaction pathways and kinetics during annealing of 111-textured Al/TiN bilayers: A synchrotron x-ray diffraction and transmission electron microscopy study Journal of Vacuum Science & Technology a: Vacuum, Surfaces, and Films. 19: 2207-2216. DOI: 10.1116/1.1379800 |
0.474 |
|
| 2001 |
Schönjahn C, Paritong H, Münz W-, Twesten RD, Petrov I. Influence of the interface composition on the corrosion behavior of unbalanced magnetron grown niobium coatings on steel Journal of Vacuum Science and Technology. 19: 1392-1398. DOI: 10.1116/1.1379319 |
0.378 |
|
| 2001 |
Schonjahn C, Ehiasarian A, Lewis DB, New R, Munz WD, Twesten RD, Petrov I. Optimization of in situ substrate surface treatment in a cathodic arc plasma: A study by TEM and plasma diagnostics Journal of Vacuum Science and Technology. 19: 1415-1420. DOI: 10.1116/1.1349726 |
0.392 |
|
| 2001 |
Chun J, Carlsson J, Desjardins P, Bergstrom D, Petrov I, Greene J, Lavoie C, Cabral C, Hultman L. Synchrotron x-ray diffraction and transmission electron microscopy studies of interfacial reaction paths and kinetics during annealing of fully-002-textured Al/TiN bilayers Journal of Vacuum Science and Technology. 19: 182-191. DOI: 10.1116/1.1322648 |
0.491 |
|
| 2001 |
Gall D, Städele M, Järrendahl K, Petrov I, Desjardins P, Haasch RT, Lee T, Greene JE. Electronic structure of ScN determined using optical spectroscopy, photoemission, andab initiocalculations Physical Review B. 63. DOI: 10.1103/Physrevb.63.125119 |
0.325 |
|
| 2001 |
D’Arcy-Gall J, Gall D, Petrov I, Desjardins P, Greene JE. Quantitative C lattice site distributions in epitaxial Ge1−yCy/Ge(001) layers Journal of Applied Physics. 90: 3910-3918. DOI: 10.1063/1.1402137 |
0.334 |
|
| 2001 |
Shin C-, Gall D, Kim Y-, Desjardins P, Petrov I, Greene JE, Odén M, Hultman L. Epitaxial NaCl structure d-TaNx(001): Electronic transport properties, elastic modulus, and hardness versus N/Ta ratio Journal of Applied Physics. 90: 2879-2885. DOI: 10.1063/1.1391214 |
0.394 |
|
| 2001 |
Chun J, Desjardins P, Lavoie C, Shin C, Cabral C, Petrov I, Greene JE. Interfacial reactions in epitaxial Al/TiN(111) model diffusion barriers: Formation of an impervious self-limited wurtzite-structure AIN(0001) blocking layer Journal of Applied Physics. 89: 7841-7845. DOI: 10.1063/1.1372162 |
0.442 |
|
| 2001 |
Williamson MJ, Dunn DN, Hull R, Kodambaka S, Petrov I, Greene JE. Evolution of nanoscale texture in ultrathin TiN films Applied Physics Letters. 78: 2223-2225. DOI: 10.1063/1.1360235 |
0.447 |
|
| 2001 |
Gall D, Petrov I, Greene JE. Epitaxial Sc1−xTixN(001): Optical and electronic transport properties Journal of Applied Physics. 89: 401-409. DOI: 10.1063/1.1329348 |
0.382 |
|
| 2001 |
Kodambaka S, Petrova V, Vailionis A, Desjardins P, Cahill D, Petrov I, Greene J. TiN(001) and TiN(111) island coarsening kinetics: in-situ scanning tunneling microscopy studies Thin Solid Films. 392: 164-168. DOI: 10.1016/S0040-6090(01)01022-7 |
0.337 |
|
| 2001 |
Chun J, Desjardins P, Petrov I, Greene J, Lavoie C, Cabral C. Interfacial reaction pathways and kinetics during annealing of epitaxial Al/TiN(001) model diffusion barrier systems Thin Solid Films. 391: 69-80. DOI: 10.1016/S0040-6090(01)00938-5 |
0.408 |
|
| 2000 |
Goindi HS, Shin CS, Frederick M, Shusterman Y, Kim H, Petrov I, Ramanath G. Electromigration in Epitaxial Copper Lines Mrs Proceedings. 648. DOI: 10.1557/Proc-648-P11.37 |
0.326 |
|
| 2000 |
Schönjahn C, Lewis DB, MW-, Petrov I. Shortlisted substrate ion etching in combined steered cathodic arc–ubm deposition system: effects on interface architecture, adhesion, and tool performance Surface Engineering. 16: 176-180. DOI: 10.1179/026708400101516973 |
0.435 |
|
| 2000 |
Ramanath G, Greene JE, Petrov I, Baker JE, Allen LH, Gillen G. Channeling-induced asymmetric distortion of depth profiles from polycrystalline-TiN/Ti/TiN(001) trilayers during secondary ion mass spectrometry Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 18: 1369-1374. DOI: 10.1116/1.591387 |
0.336 |
|
| 2000 |
Schönjahn C, Donohue LA, Lewis DB, Münz W-, Twesten RD, Petrov I. Enhanced adhesion through local epitaxy of transition-metal nitride coatings on ferritic steel promoted by metal ion etching in a combined cathodic arc/unbalanced magnetron deposition system Journal of Vacuum Science and Technology. 18: 1718-1723. DOI: 10.1116/1.582414 |
0.469 |
|
| 2000 |
Macák K, Kouznetsov V, Schneider J, Helmersson U, Petrov I. Ionized sputter deposition using an extremely high plasma density pulsed magnetron discharge Journal of Vacuum Science and Technology. 18: 1533-1537. DOI: 10.1116/1.582380 |
0.317 |
|
| 2000 |
Finnegan N, Lee T-, Haasch RT, Greene JE, Petrov I. Epitaxial VN(001) Grown and Analyzed In situ by AES After (1) Deposition and (2) Ar+ Sputter Etching Surface Science Spectra. 7: 213-220. DOI: 10.1116/1.1367616 |
0.497 |
|
| 2000 |
Haasch RT, Lee TY, Gall D, Greene JE, Petrov I. Epitaxial VN(001) Grown and Analyzed In situ by XPS and UPS. II. Analysis of Ar+ Sputter Etched Layers Surface Science Spectra. 7: 178-184. DOI: 10.1116/1.1367599 |
0.498 |
|
| 2000 |
Haasch RT, Lee TY, Gall D, Greene JE, Petrov I. Epitaxial CrN(001) Grown and Analyzed In situ by XPS and UPS. I. Analysis of As-deposited Layers Surface Science Spectra. 7: 221-232. DOI: 10.1116/1.1367598 |
0.478 |
|
| 2000 |
Gall D, Haasch RT, Finnegan N, Lee T-, Shin C-, Sammann E, Greene JE, Petrov I. In situ X-ray Photoelectron, Ultraviolet Photoelectron, and Auger Electron Spectroscopy Spectra from First-Row Transition-Metal Nitrides: ScN, TiN, VN, and CrN Surface Science Spectra. 7: 167-168. DOI: 10.1116/1.1360984 |
0.432 |
|
| 2000 |
Finnegan N, Haasch RT, Gall D, Kodambaka S, Greene JE, Petrov I. A Comparison of Auger Electron Spectra from Stoichiometric Epitaxial TiN(001) After (1) UHV Cleaving and (2) Ar+ Sputter Etching Surface Science Spectra. 7: 93-100. DOI: 10.1116/1.1288178 |
0.42 |
|
| 2000 |
D’Arcy-Gall J, Gall D, Desjardins P, Petrov I, Greene JE. Role of fast sputtered particles during sputter deposition: Growth of epitaxialGe0.99C0.01/Ge(001) Physical Review B. 62: 11203-11208. DOI: 10.1103/Physrevb.62.11203 |
0.386 |
|
| 2000 |
Karr BW, Cahill DG, Petrov I, Greene JE. Effects of high-flux low-energy ion bombardment on the low-temperature growth morphology of TiN(001) epitaxial layers Physical Review B - Condensed Matter and Materials Physics. 61: 16137-16143. DOI: 10.1103/Physrevb.61.16137 |
0.435 |
|
| 2000 |
D’Arcy-Gall J, Desjardins P, Petrov I, Greene JE, Paultre J, Masut RA, Gujrathi SC, Roorda S. Epitaxial metastable Ge1−yCy (y⩽0.02) alloys grown on Ge(001) from hyperthermal beams: C incorporation and lattice sites Journal of Applied Physics. 88: 96-104. DOI: 10.1063/1.373629 |
0.408 |
|
| 2000 |
Madsen LD, Svedberg EB, Bergstrom DB, Petrov I, Greene JE. Texture of Al thin films deposited by magnetron sputtering onto epitaxial W(001) Journal of Applied Physics. 87: 168-171. DOI: 10.1063/1.371839 |
0.447 |
|
| 2000 |
Kodambaka S, Petrova V, Vailionis A, Desjardins P, Cahill DG, Petrov I, Greene JE. In-situ high-temperature scanning-tunneling-microscopy studies of two-dimensional island-decay kinetics on atomically smooth TiN(001) Surface Review and Letters. 7: 589-593. DOI: 10.1016/S0218-625X(00)00081-6 |
0.345 |
|
| 1999 |
Gall D, Petrov I, Desjardins P, Greene JE. Microstructural evolution and Poisson ratio of epitaxial ScN grown on TiN(001)/MgO(001) by ultrahigh vacuum reactive magnetron sputter deposition Journal of Applied Physics. 86: 5524-5529. DOI: 10.1063/1.371555 |
0.508 |
|
| 1999 |
Chun J-, Petrov I, Greene JE. Dense fully 111-textured TiN diffusion barriers: Enhanced lifetime through microstructure control during layer growth Journal of Applied Physics. 86: 3633-3641. DOI: 10.1063/1.371271 |
0.487 |
|
| 1999 |
Shin C, Gall D, Desjardins P, Vailionis A, Kim H, Petrov I, Greene JE, Odén M. Growth and physical properties of epitaxial metastable cubic TaN(001) Applied Physics Letters. 75: 3808-3810. DOI: 10.1063/1.125463 |
0.465 |
|
| 1999 |
Schneider JM, Anders A, Hjörvarsson B, Petrov I, Macák K, Helmersson U, Sundgren J. Hydrogen uptake in alumina thin films synthesized from an aluminum plasma stream in an oxygen ambient Applied Physics Letters. 74: 200-202. DOI: 10.1063/1.123292 |
0.413 |
|
| 1999 |
Kouznetsov V, Macák K, Schneider JM, Helmersson U, Petrov I. A novel pulsed magnetron sputter technique utilizing very high target power densities Surface & Coatings Technology. 122: 290-293. DOI: 10.1016/S0257-8972(99)00292-3 |
0.372 |
|
| 1998 |
Smith IJ, Münz WD, Donohue LA, Petrov I, Greene JE. IMPROVED Ti1–xAlxN PVD COATINGS FOR DRY HIGH SPEED CUTTING OPERATIONS Surface Engineering. 14: 37-42. DOI: 10.1179/Sur.1998.14.1.37 |
0.361 |
|
| 1998 |
Gall D, Petrov I, Madsen LD, Sundgren J-, Greene JE. Microstructure and electronic properties of the refractory semiconductor ScN grown on MgO(001) by ultra-high-vacuum reactive magnetron sputter deposition Journal of Vacuum Science and Technology. 16: 2411-2417. DOI: 10.1116/1.581360 |
0.506 |
|
| 1998 |
Gall D, Petrov I, Hellgren N, Hultman L, Sundgren JE, Greene JE. Growth of poly- and single-crystal ScN on MgO(001): Role of low-energy N2+ irradiation in determining texture, microstructure evolution, and mechanical properties Journal of Applied Physics. 84: 6034-6041. DOI: 10.1063/1.368913 |
0.511 |
|
| 1998 |
Van Nostrand JE, Cahill DG, Petrov I, Greene JE. Morphology and microstructure of tensile-strained SiGe(001) thin epitaxial films Journal of Applied Physics. 83: 1096-1102. DOI: 10.1063/1.366799 |
0.488 |
|
| 1998 |
Gujrathi SC, Roorda S, D'Arcy JG, Pflueger RJ, Desjardins P, Petrov I, Greene JE. Quantitative compositional depth profiling of Si1−x−yGexCy thin films by simultaneous elastic recoil detection and Rutherford backscattering spectrometry Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms. 654-660. DOI: 10.1016/S0168-583X(97)00881-1 |
0.436 |
|
| 1997 |
Bergstrom DB, Petrov I, Greene JE. Al/TixW1−x metal/diffusion-barrier bilayers: Interfacial reaction pathways and kinetics during annealing Journal of Applied Physics. 82: 2312-2322. DOI: 10.1063/1.366039 |
0.409 |
|
| 1997 |
Bergstrom DB, Petrov I, Allen LH, Greene JE. Aluminide formation in polycrystalline Al/W metal/barrier thin-film bilayers: Reaction paths and kinetics Journal of Applied Physics. 82: 201-209. DOI: 10.1063/1.365798 |
0.475 |
|
| 1997 |
Karr BW, Petrov I, Cahill DG, Greene JE. Morphology of epitaxial TiN(001) grown by magnetron sputtering Applied Physics Letters. 70: 1703-1705. DOI: 10.1063/1.118675 |
0.468 |
|
| 1997 |
Karr BW, Petrov I, Desjardins P, Cahill DG, Greene JE. In situ scanning tunneling microscopy studies of the evolution of surface morphology and microstructure in epitaxial TiN(001) grown by ultra-high-vacuum reactive magnetron sputtering Surface and Coatings Technology. 94: 403-408. DOI: 10.1016/S0257-8972(97)00444-1 |
0.53 |
|
| 1997 |
Donohue LA, Smith IJ, Münz W-, Petrov I, Greene JE. Microstructure and oxidation-resistance of Ti1 − x − y −zAlxCryYzN layers grown by combined steered-arc/unbalanced-magnetron-sputter deposition Surface & Coatings Technology. 226-231. DOI: 10.1016/S0257-8972(97)00249-1 |
0.421 |
|
| 1997 |
Donohue LA, Münz W-, Lewis DB, Cawley J, Hurkmans T, Trinh T, Petrov I, Greene IE. Large-scale fabrication of hard superlattice thin films by combined steered arc evaporation and unbalanced magnetron sputtering Surface & Coatings Technology. 93: 69-87. DOI: 10.1016/S0257-8972(97)00028-5 |
0.444 |
|
| 1997 |
Ivanov I, Ljungcrantz H, Hakansson G, Petrov I, Sundgren J-. Ion energy distributions in reactive arc evaporation discharges used for deposition of TiN films Surface & Coatings Technology. 92: 150-156. DOI: 10.1016/S0257-8972(96)03152-0 |
0.344 |
|
| 1997 |
Petrov I, Losbichler P, Bergstrom D, Greene JE, Münz W-, Hurkmans T, Trinh T. Ion-assisted growth of Ti1−xAlxN/Ti1−yNbyN multilayers by combined cathodic-arc/magnetron-sputter deposition Thin Solid Films. 302: 179-192. DOI: 10.1016/S0040-6090(96)09524-7 |
0.488 |
|
| 1996 |
Kim YW, Petrov I, Greene JE, Rossnagel SM. Development of 111 texture in Al films grown on SiO2/Si(001) by ultrahigh‐vacuum primary‐ion deposition Journal of Vacuum Science and Technology. 14: 346-351. DOI: 10.1116/1.579899 |
0.489 |
|
| 1996 |
Karr BW, Kim YW, Petrov I, Bergstrom DB, Cahill DG, Greene JE, Madsen LD, Sundgren J. Morphology and microstructure of epitaxial Cu(001) films grown by primary ion deposition on Si and Ge substrates Journal of Applied Physics. 80: 6699-6705. DOI: 10.1063/1.363795 |
0.467 |
|
| 1996 |
Salagean EE, Lewis DB, Brooks JS, Münz W-, Petrov I, Greene JE. Combined steered arc-unbalanced magnetron grown niobium coatings for decorative and corrosion resistance applications Surface & Coatings Technology. 82: 57-64. DOI: 10.1016/0257-8972(95)02639-8 |
0.366 |
|
| 1995 |
Bergstrom DB, Petrov I, Allen LH, Greene JE. Reaction paths and kinetics of aluminide formation in Al/epitaxial-W(001) model diffusion barrier systems Journal of Applied Physics. 78: 194-203. DOI: 10.1063/1.360651 |
0.423 |
|
| 1995 |
Hultman L, Sundgren J‐, Greene JE, Bergstrom DB, Petrov I. High‐flux low‐energy (≂20 eV) N+2 ion irradiation during TiN deposition by reactive magnetron sputtering: Effects on microstructure and preferred orientation Journal of Applied Physics. 78: 5395-5403. DOI: 10.1063/1.359720 |
0.521 |
|
| 1995 |
Bergstrom DB, Tian F, Petrov I, Moser J, Greene JE. Origin of compositional variations in sputter‐deposited TixW1−x diffusion barrier layers Applied Physics Letters. 67: 3102-3104. DOI: 10.1063/1.114878 |
0.488 |
|
| 1995 |
Greene JE, Sundgren J‐, Hultman L, Petrov I, Bergstrom DB. Development of preferred orientation in polycrystalline TiN layers grown by ultrahigh vacuum reactive magnetron sputtering Applied Physics Letters. 67: 2928-2930. DOI: 10.1063/1.114845 |
0.518 |
|
| 1994 |
Kim Y‐, Moser J, Petrov I, Greene JE, Rossnagel SM. Directed sputter deposition of AlCu: Film microstructure and microchemistry Journal of Vacuum Science and Technology. 12: 3169-3175. DOI: 10.1116/1.579233 |
0.514 |
|
| 1994 |
Petrov I, Myers A, Greene JE, Abelson JR. Mass and energy resolved detection of ions and neutral sputtered species incident at the substrate during reactive magnetron sputtering of Ti in mixed Ar+N2 mixtures Journal of Vacuum Science & Technology a: Vacuum, Surfaces, and Films. 12: 2846-2854. DOI: 10.1116/1.578955 |
0.425 |
|
| 1994 |
Ivanov I, Kazansky P, Hultman L, Petrov I, Sundgren J‐. Influence of an external axial magnetic field on the plasma characteristics and deposition conditions during direct current planar magnetron sputtering Journal of Vacuum Science and Technology. 12: 314-320. DOI: 10.1116/1.578874 |
0.339 |
|
| 1994 |
Moser JH, Tian F, Haller O, Bergstrom DB, Petrov I, Greene JE, Wiemer C. Single-phase polycrystalline Ti1−xWxN alloys (0⩽x⩽0.7) grown by UHV reactive magnetron sputtering: microstructure and physical properties Thin Solid Films. 253: 445-450. DOI: 10.1016/0040-6090(94)90364-6 |
0.48 |
|
| 1994 |
Statev S, Ivanov I, Petrov I, Carlsson J, Orlinov V. Influence of the plasma kinetics on the Si/C ratio of a-SixC1−x:H thin films deposited by reactive magnetron sputtering of a Si target in Ar+CH4 gas mixtures Contributions to Plasma Physics. 34: 39-49. DOI: 10.1002/Ctpp.2150340106 |
0.435 |
|
| 1993 |
Petrov I, Ivanov I, Orlinov V, Sundgren J‐. Comparison of magnetron sputter deposition conditions in neon, argon, krypton, and xenon discharges Journal of Vacuum Science and Technology. 11: 2733-2741. DOI: 10.1116/1.578634 |
0.362 |
|
| 1993 |
Adibi F, Petrov I, Greene JE, Wahlström U, Sundgren J‐. Design and characterization of a compact two‐target ultrahigh vacuum magnetron sputter deposition system: Application to the growth of epitaxial Ti1−xAlxN alloys and TiN/Ti1−xAlxN superlattices Journal of Vacuum Science and Technology. 11: 136-142. DOI: 10.1116/1.578279 |
0.475 |
|
| 1993 |
Petrov I, Mojab E, Adibi F, Greene JE, Hultman L, Sundgren J‐. Interfacial reactions in epitaxial Al/Ti1−xAlxN (0≤x≤0.2) model diffusion‐barrier structures Journal of Vacuum Science and Technology. 11: 11-17. DOI: 10.1116/1.578277 |
0.409 |
|
| 1993 |
Adibi F, Petrov I, Greene JE, Hultman L, Sundgren J‐. Effects of high‐flux low‐energy (20–100 eV) ion irradiation during deposition on the microstructure and preferred orientation of Ti0.5Al0.5N alloys grown by ultra‐high‐vacuum reactive magnetron sputtering Journal of Applied Physics. 73: 8580-8589. DOI: 10.1063/1.353388 |
0.517 |
|
| 1993 |
Petrov I, Adibi F, Greene JE, Hultman L, Sundgren J‐. Average energy deposited per atom : a universal parameter for describing ion-assisted film growth ? Applied Physics Letters. 63: 36-38. DOI: 10.1063/1.109742 |
0.501 |
|
| 1993 |
Sproul WD, Rudnik PJ, Legg KO, Münz W-, Petrov I, Greene JE. Reactive sputtering in the ABSTM system Surface & Coatings Technology. 56: 179-182. DOI: 10.1016/0257-8972(93)90023-H |
0.392 |
|
| 1993 |
Wahlström U, Hultman L, Sundgren J-, Adibi F, Petrov I, Greene JE. Crystal growth and microstructure of polycrystalline Ti1−xAlxN alloy films deposited by ultra-high-vacuum dual-target magnetron sputtering Thin Solid Films. 235: 62-70. DOI: 10.1016/0040-6090(93)90244-J |
0.49 |
|
| 1993 |
Guinn KV, Donnelly VM, Gross ME, Baiocchi FA, Petrov I, Greene JE. Decomposition of hexafluoroacetylacetonate Cu(I) vinyltrimethylsilane on, and diffusion of Cu into single crystal and polycrystalline titanium nitride Surface Science. 295: 219-229. DOI: 10.1016/0039-6028(93)90198-S |
0.325 |
|
| 1992 |
Guinn KV, Donnelly VM, Gross ME, Baiocchi FA, Petrov I, Greene JE. Copper CVD Reactions of Cu(I)(hfae)(vtms) Adsorbed on TiN Mrs Proceedings. 282: 379. DOI: 10.1557/Proc-282-379 |
0.307 |
|
| 1992 |
Sundgren J, Hultman L, Håkansson G, Birch J, Petrov I. Formation of Defects During Ion-Assisted Growth of Thin Films from the Vapor Phase Mrs Proceedings. 268. DOI: 10.1557/Proc-268-71 |
0.438 |
|
| 1992 |
Petrov I, Hultman L, Sundgren J‐, Greene JE. Polycrystalline TiN films deposited by reactive bias magnetron sputtering: Effects of ion bombardment on resputtering rates, film composition, and microstructure Journal of Vacuum Science and Technology. 10: 265-272. DOI: 10.1116/1.578074 |
0.522 |
|
| 1992 |
Petrov I, Adibi F, Greene JE, Sproul WD, Münz W‐. Use of an externally applied axial magnetic field to control ion/neutral flux ratios incident at the substrate during magnetron sputter deposition Journal of Vacuum Science and Technology. 10: 3283-3287. DOI: 10.1116/1.577812 |
0.375 |
|
| 1992 |
Petrov I, Mojab E, Powell RC, Greene JE, Hultman L, Sundgren J‐. Synthesis of metastable epitaxial zinc‐blende‐structure AlN by solid‐state reaction Applied Physics Letters. 60: 2491-2493. DOI: 10.1063/1.106943 |
0.384 |
|
| 1992 |
Hultman L, Benhenda S, Radnoczi G, Sundgren J-, Greene JE, Petrov I. Interfacial reactions in single-crystal-TiN (100)/Al/polycrystalline-TiN multilayer thin films Thin Solid Films. 215: 152-161. DOI: 10.1016/0040-6090(92)90430-J |
0.431 |
|
| 1992 |
Kimura H, Petrov I, Adibi F, Greene JE. Growth and microstructure of epitaxial 45°-rotated bcc W layers on NaCl-structure MgO(001) substrates and TiN(001) buffer layers Journal of Crystal Growth. 123: 344-356. DOI: 10.1016/0022-0248(92)90594-9 |
0.503 |
|
| 1991 |
Hultman L, Münz W‐, Musil J, Kadlec S, Petrov I, Greene JE. Low‐energy (∼100 eV) ion irradiation during growth of TiN deposited by reactive magnetron sputtering: Effects of ion flux on film microstructure Journal of Vacuum Science and Technology. 9: 434-438. DOI: 10.1116/1.577428 |
0.5 |
|
| 1991 |
Adibi F, Petrov I, Hultman L, Wahlström U, Shimizu T, McIntyre D, Greene JE, Sundgren J‐. Defect structure and phase transitions in epitaxial metastable cubic Ti0.5Al0.5N alloys grown on MgO(001) by ultra‐high‐vacuum magnetron sputter deposition Journal of Applied Physics. 69: 6437-6450. DOI: 10.1063/1.348849 |
0.479 |
|
| 1991 |
Hultman L, Håkansson G, Wahlström U, Sundgren J-, Petrov I, Adibi F, Greene JE. Transmission electron microscopy studies of microstructural evolution, defect structure, and phase transitions in polycrystalline and epitaxial Ti1-xAlxN and TiN films grown by reactive magnetron sputter deposition Thin Solid Films. 205: 153-164. DOI: 10.1016/0040-6090(91)90297-B |
0.491 |
|
| 1990 |
Håkansson G, Petrov I, Sundgren J‐. Growth of TaC thin films by reactive direct current magnetron sputtering: Composition and structure Journal of Vacuum Science and Technology. 8: 3769-3778. DOI: 10.1116/1.576492 |
0.434 |
|
| 1990 |
Rohde SL, Petrov I, Sproul WD, Barnett SA, Rudnik PJ, Graham ME. Effects of an unbalanced magnetron in a unique dual-cathode, high rate reactive sputtering system Thin Solid Films. 193: 117-126. DOI: 10.1016/S0040-6090(05)80019-7 |
0.42 |
|
| 1990 |
Petrov I, Ivanov I, Orlinov V, Kourtev J, Jelev J. Deposition of carbon films by bias magnetron sputtering in neon and argon Thin Solid Films. 185: 247-256. DOI: 10.1016/0040-6090(90)90089-V |
0.464 |
|
| 1989 |
Selinder TI, Larsson G, Helmersson U, Rudner S, Petrov I. The dc magnetron sputter deposition process of YBa2Cu3Ox thin films Physica C-Superconductivity and Its Applications. 162: 599-600. DOI: 10.1016/0921-4534(89)91166-0 |
0.406 |
|
| 1989 |
Petrov I, Hultman L, Helmersson U, Sundgren J-, Greene JE. Microstructure modification of TiN by ion bombardment during reactive sputter deposition Thin Solid Films. 169: 299-314. DOI: 10.1016/0040-6090(89)90713-X |
0.454 |
|
| 1989 |
Petrov I, Orlinov V, Ivanov I, Kourtev J, Jelev J. Effect of ion bombardment during growth on the electrical resistivity of magnetron-sputtered carbon films Thin Solid Films. 168: 239-248. DOI: 10.1016/0040-6090(89)90010-2 |
0.464 |
|
| 1988 |
Petrov I, Orlinov V, Ivanov I, Kourtev J. Influence of the Basic Process Parameters on the Ion/Atom Arrival Rate Ratio during Magnetron Sputter Deposition of Thin Carbon Films Contributions to Plasma Physics. 28: 265-273. DOI: 10.1002/Ctpp.2150280309 |
0.421 |
|
| 1988 |
Petrov I, Orlinov V, Ivanov I, Kourtev J. Electrostatic Probe Measurements in the Glow Discharge Plasma of a D. C. Magnetron Sputtering System Contributions to Plasma Physics. 28: 157-167. DOI: 10.1002/Ctpp.2150280207 |
0.361 |
|
| 1984 |
Petrov I, Orlinov V, Misiuk A. Highly oriented ZnO films obtained by d.c. reactive sputtering of a zinc target Thin Solid Films. 120: 55-67. DOI: 10.1016/0040-6090(84)90173-1 |
0.468 |
|
| 1983 |
Petrov I, Braun M, Fried T, Sätherblom HE. Atomic concentrations of binary compound thin films on elemental substrates determined by Rutherford backscattering techniques Journal of Applied Physics. 54: 1358-1364. DOI: 10.1063/1.332157 |
0.366 |
|
| 1982 |
Orlinov V, Mladenov G, Petrov I, Braun M, Emmoth B. Angular distribution and sputtering yield of Al and Al2O3 during 40 key argon ion bombardment Vacuum. 32: 747-752. DOI: 10.1016/0042-207X(82)93847-7 |
0.403 |
|
| 1978 |
Goranchev B, Orlinov V, Tsaneva V, Petrov I. Direct current reactive sputtering of aluminium Thin Solid Films. 52: 365-371. DOI: 10.1016/0040-6090(78)90179-7 |
0.379 |
|
| Show low-probability matches. |