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Bo Wu, Ph.D.

Affiliations: 
2002 University of California, Berkeley, Berkeley, CA, United States 
Area:
Integrated Circuits (INC); Solid-State Devices
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Andrew R. Neureuther grad student 2002 UC Berkeley
 (Coulomb interactions in high throughput electron beam lithography.)

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Publications

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Li C, Yuan Y, Yang J, et al. (2016) Inconsistency measurement between two branches of LiNbO3 integrated optic Y-junction Optics Communications. 369: 152-158
Wu B, Neureuther AR. (2001) Energy deposition and transfer in electron-beam lithography Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 19: 2508-2511
Wu B, Neureuther AR. (2000) Structure of stochastic Coulomb interactions in electron beam columns Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 18: 3004-3009
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