Juliet A. Rubinstein, Ph.D.
Affiliations: | 2010 | Electrical Engineering & Computer Sciences | University of California, Berkeley, Berkeley, CA, United States |
Area:
Integrated Circuits (INC); Solid-State DevicesGoogle:
"Juliet Rubinstein"Parents
Sign in to add mentor| Andrew R. Neureuther | grad student | 2010 | UC Berkeley | |
| (Pattern matching for advanced lithographic technologies.) | ||||
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Publications
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| Neureuther AR, Rubinstein J, Chin E, et al. (2010) Modeling optical lithography physics Japanese Journal of Applied Physics. 49: 06GA011-06GA017 |
| Poppe W, Au P, Jayasuriya D, et al. (2009) Tiny footprint programmable electrical defocus monitors Proceedings of Spie - the International Society For Optical Engineering. 7275 |
| Rubinstein J, Neureuther AR. (2009) Through-focus pattern matching applied to double patterning Proceedings of Spie - the International Society For Optical Engineering. 7274 |
| Rubinstein J, Neureuther AR. (2008) Post-decomposition assessment of double patterning layout Proceedings of Spie - the International Society For Optical Engineering. 6924 |