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Michiel V. Kruger, Ph.D.

Affiliations: 
2003 University of California, Berkeley, Berkeley, CA, United States 
Area:
Control, Intelligent Systems, and Robotics (CIR), System identification; Design, Modeling and Analysis (DMA), Design for Manufacturability; Physical Electronics (PHY), Semiconductor Manufacturing
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Kameshwar Poolla grad student 2003 UC Berkeley
 (Tomography as a metrology technique for semiconductor manufacturing.)

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