Marco F. Aimi, Ph.D.
Affiliations: | 2005 | University of California, Santa Barbara, Santa Barbara, CA, United States |
Area:
Materials Science EngineeringGoogle:
"Marco Aimi"Parents
Sign in to add mentor| Noel C. MacDonald | grad student | 2005 | UC Santa Barbara | |
| (Bulk titanium microelectromechanical systems.) | ||||
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Publications
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| Parker ER, Thibeault BJ, Aimi MF, et al. (2005) Inductively coupled plasma etching of bulk titanium for MEMS applications Journal of the Electrochemical Society. 152: C675-C683 |
| Rao MP, Aimi MF, Parker ER, et al. (2005) Single-mask, high aspect ratio, 3-D micromachining of bulk titanium Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 64-67 |
| Aimi MF, Rao MP, MacDonald NC, et al. (2004) High-aspect-ratio bulk micromachining of titanium. Nature Materials. 3: 103-5 |
| Zhang Y, Parker ER, Rao MP, et al. (2004) Titanium bulk micromachining for biomems applications: A DEP device as a demonstration American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) Mems. 45-48 |
| Rao MP, Aimi MF, MacDonald NC. (2004) Single-mask, three-dimensional microfabrication of high-aspect-ratio structures in bulk silicon using reactive ion etching lag and sacrificial oxidation Applied Physics Letters. 85: 6281-6283 |
| Parker ER, Aimi MF, Thibeault BJ, et al. (2004) High-aspect-ratio inductively coupled plasma etching of bulk titanium for MEMS applications Proceedings - Electrochemical Society. 9: 96-107 |