Davoud Zamani, Ph.D.
Affiliations: | 2012 | Chemical Engineering | University of Arizona, Tucson, AZ |
Area:
Chemical Engineering, Materials Science EngineeringGoogle:
"Davoud Zamani"Parents
Sign in to add mentor| Farhang Shadman | grad student | 2012 | University of Arizona | |
| (Lowering the environmental impact of high-kappa/ metal gate stack surface preparation processes.) | ||||
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Publications
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| Zamani D, Dhane K, Mahdavi O, et al. (2013) Surface cleaning of small structures during spin rinsing of patterned substrates Microelectronic Engineering. 108: 57-65 |
| Ghadiri Zahrani E, Soleimanimehr H, Heidari Shahmaleki A, et al. (2012) A surface roughness study for machining of Udimet500 Superalloy, through statistical analysis of influential parameters Advanced Materials Research. 445: 923-928 |
| Zamani D, Keswani M, Mahdavi O, et al. (2012) Dynamics of interactions between HF and hafnium oxide during surface preparation of high-k dielectrics Ieee Transactions On Semiconductor Manufacturing. 25: 511-515 |
| Zamani D, Keswani M, Yan J, et al. (2011) Determining the fundamental kinetic parameters for rinsing and cleaning of hafnium-based high-k materials Ecs Transactions. 41: 45-50 |
| Dhane K, Han J, Yan J, et al. (2011) Dynamics of cleaning and rinsing of micro and nano structures in single-wafer cleaning tools Ieee Transactions On Semiconductor Manufacturing. 24: 125-133 |