Austin J. Kozman, Ph.D.
Affiliations: | 2000 | University of Texas at Arlington, Arlington, TX, United States |
Area:
Mechanical EngineeringGoogle:
"Austin Kozman"Parents
Sign in to add mentor| Kent Lawrence | grad student | 2000 | UT Arlington | |
| (Characterization and improvement of temperature and critical dimension uniformity in a microlithography cluster: An analytical and experimental study.) | ||||