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Derek W. Bassett, Ph.D.

Affiliations: 
2010 University of Texas at Austin, Austin, Texas, U.S.A. 
Area:
Chemical Engineering
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Roger T. Bonnecaze grad student 2010 UT Austin
 (Fluid Management in Immersion and Imprint Microlithography.)

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Publications

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Bassett DW, Taylor JC, Conley W, et al. (2006) Drag-a-drop: A characterization tool for immersion lithography Proceedings of Spie - the International Society For Optical Engineering. 6154
Bassett DW, Bonnecaze RT. (2006) Immersion lithography for laser mask writing Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24: 2659-2667
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