☰

Richard P. Good, Ph.D.

Affiliations: 
2004 University of Texas at Austin, Austin, Texas, U.S.A. 
Area:
Chemical Engineering
Google:
"Richard Good"
Tree Publications Similar researchers PubMed Report error

Parents

Sign in to add mentor
Joe Qin grad student 2004 UT Austin
 (The stability and performance of the EWMA and double-EWMA run -to -run controllers with metrology delay.)

Children

Sign in to add trainee

Collaborators

Sign in to add collaborator
BETA: Related publications

Publications

You can help our author matching system! If you notice any publications incorrectly attributed to this author, please sign in and mark matches as correct or incorrect.

Good R, Qin SJ. (2011) Performance Synthesis of Multiple Input−Multiple Output (MIMO) Exponentially Weighted Moving Average (EWMA) Run-to-Run Controllers with Metrology Delay Industrial & Engineering Chemistry Research. 50: 1400-1409
Good RP, Pabst D, Stirton JB. (2010) Compensating for the initialization and sampling of EWMA run-to-run controlled processes Ieee Transactions On Semiconductor Manufacturing. 23: 168-177
Good RP, Kost D, Cherry GA. (2010) Introducing a unified PCA algorithm for model size reduction Ieee Transactions On Semiconductor Manufacturing. 23: 201-209
Lensing K, Cain J, Prabhu A, et al. (2007) Lithography process control using scatterometry metrology and semi-physical modeling Proceedings of Spie - the International Society For Optical Engineering. 6518
Holfeld A, Barlović R, Good RP. (2007) A fab-wide APC sampling application Ieee Transactions On Semiconductor Manufacturing. 20: 393-399
Qin SJ, Cherry G, Good R, et al. (2006) Semiconductor manufacturing process control and monitoring: A fab-wide framework Journal of Process Control. 16: 179-191
Qin SJ, Cherry G, Good R, et al. (2004) Control and Monitoring of Semiconductor Manufacturing Processes: Challenges and Opportunities Ifac Proceedings Volumes. 37: 125-136
See more...