Richard P. Good, Ph.D.

Affiliations: 
2004 University of Texas at Austin, Austin, Texas, U.S.A. 
Area:
Chemical Engineering
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Joe Qin grad student 2004 UT Austin
 (The stability and performance of the EWMA and double-EWMA run -to -run controllers with metrology delay.)
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Publications

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Good RP, Pabst D, Stirton JB. (2010) Compensating for the initialization and sampling of EWMA run-to-run controlled processes Ieee Transactions On Semiconductor Manufacturing. 23: 168-177
Good RP, Kost D, Cherry GA. (2010) Introducing a unified PCA algorithm for model size reduction Ieee Transactions On Semiconductor Manufacturing. 23: 201-209
Good RP, Purdy MA. (2007) An MILP approach to wafer sampling and selection Ieee Transactions On Semiconductor Manufacturing. 20: 400-407
Holfeld A, Barlović R, Good RP. (2007) A fab-wide APC sampling application Ieee Transactions On Semiconductor Manufacturing. 20: 393-399
Good RP. (2006) On the stability of MIMO EWMA run-to-run controllers with metrology delay Ieee Transactions On Semiconductor Manufacturing. 19: 78-86
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