Elizabeth A. Costner, Ph.D.

Affiliations: 
2009 Chemical Engineering University of Texas at Austin, Austin, Texas, U.S.A. 
Area:
Chemical Engineering
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C. Grant Willson grad student 2009 UT Austin (Chemistry Tree)
 (The refractive index and absorbance of aqueous and organic fluids for immersion lithography.)
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Publications

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Costner EA, Lin MW, Jen WL, et al. (2009) Nanoimprint lithography materials development for semiconductor device fabrication Annual Review of Materials Research. 39: 155-180
Meiring JE, Lee S, Costner EA, et al. (2009) Pattern recognition of shape-encoded hydrogel biosensor arrays Optical Engineering. 48
Costner EA, Matsumoto K, Long BK, et al. (2008) New high index fluids: exploiting anomalous dispersion for immersion lithography Proceedings of Spie - the International Society For Optical Engineering. 6923
Taylor JC, Costner EA, Goh S, et al. (2008) The effect of added salts on the optical properties of water for high index immersion lithography fluids Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 26: 506-513
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