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Jihong Choi, Ph.D.

Affiliations: 
2006 University of California, Berkeley, Berkeley, CA, United States 
Area:
Mechanical Engineering, Electronics and Electrical Engineering
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David A Dornfeld grad student 2006 UC Berkeley
 (Chip scale modeling of chemical mechanical planarization (CMP) for layout dependent variation.)

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Choi J, Dornfeld DA. (2004) Modeling of Pattern Density Dependent Pressure Non-Uniformity at a Die Scale for ILD Chemical Mechanical Planarization Mrs Proceedings. 816
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