Sumant D. Padiyar, Ph.D.
Affiliations: | 2003 | State University of New York, Albany, Albany, NY, United States |
Area:
Astronomy and Astrophysics, Materials Science EngineeringGoogle:
"Sumant Padiyar"Parents
Sign in to add mentorRobert E. Geer | grad student | 2003 | SUNY Albany | |
(Integration of amorphous tantalum silicon nitride (TaSiN) films as diffusion barriers in a Cu/SiLK(TM) metallization scheme.) |