Yu-Jen Fan, Ph.D.

Affiliations: 
2011 Nanoscale Science and Engineering-Nanoscale Science State University of New York, Albany, Albany, NY, United States 
Area:
Nanoscience, Nanotechnology, Materials Science Engineering
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Gregory Denbeaux grad student 2011 SUNY Albany
 (Effects of radiation-induced carbon contamination on the printing performance of extreme ultraviolet masks.)