Sanket P. Sant, Ph.D.
Affiliations: | 2006 | University of Texas at Dallas, Richardson, TX, United States |
Area:
Electronics and Electrical EngineeringGoogle:
"Sanket Sant"Parents
Sign in to add mentor| Lawrence J. Overzet | grad student | 2006 | UT Dallas | |
| (Understanding the complex chemistry of fluorocarbon plasmas in a long residence time ICP reactor.) | ||||
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Publications
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| Sant SP, Nelson CT, Overzet LJ, et al. (2009) Relationship between gas-phase chemistries and surface processes in fluorocarbon etch plasmas: A process rate model Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 27: 631-642 |
| Sant SP, Nelson CT, Overzet LJ, et al. (2009) Chemistry in long residence time fluorocarbon plasmas Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 27: 193-208 |
| Joseph EA, Zhou BS, Sant SP, et al. (2008) Role of chamber dimension in fluorocarbon based deposition and etching of Si O2 and its effects on gas and surface-phase chemistry Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 26: 545-554 |
| Goeckner MJ, Nelson CT, Sant SP, et al. (2008) Plasma-surface interactions Journal of Physics: Conference Series. 133 |
| Joseph EA, Sant SP, Goeckner MJ, et al. (2007) Effects of pore morphology on the diffusive properties of a porous low- κ dielectric Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 25: 1684-1693 |
| Nelson CT, Sant SP, Overzet LJ, et al. (2007) Surface kinetics with low ion energy bombardment in fluorocarbon plasmas Plasma Sources Science and Technology. 16: 813-821 |
| Ramachandran S, Tao L, Lee TH, et al. (2006) Deposition and patterning of diamondlike carbon as antiwear nanoimprint templates Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24: 2993-2997 |
| Zhou B, Joseph EA, Sant SP, et al. (2005) Effect of surface temperature on plasma-surface interactions in an inductively coupled modified gaseous electronics conference reactor Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 23: 1657-1667 |
| Joseph EA, Zhou B, Sant SP, et al. (2004) Investigation and modeling of plasma-wall interactions in inductively coupled fluorocarbon plasmas Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 22: 689-697 |