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Iqbal R. Saraf, Ph.D.

Affiliations: 
2011 Electrical Engineering University of Texas at Dallas, Richardson, TX, United States 
Area:
Electronics and Electrical Engineering
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Lawrence J. Overzet grad student 2011 UT Dallas
 (Fundamentals of deep silicon etch.)

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Publications

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Saraf IR, Goeckner MJ, Goodlin BE, et al. (2013) Kinetics of the deposition step in time multiplexed deep silicon etches Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 31
Saraf I, Goeckner M, Goodlin B, et al. (2011) Mask undercut in deep silicon etch Applied Physics Letters. 98: 161502
Ogawa D, Saraf I, Sra A, et al. (2009) The direct injection of liquid droplets into low pressure plasmas Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 27: 342-351
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