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Jane P. Chang

Affiliations:

Chemical Engineering 0294

University of California, Los Angeles, Los Angeles, CA

Area:

Chemical Engineering, Materials Science Engineering

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Parents

Herbert H. Sawin	grad student	1997	MIT
(Study of Plasma-Surface Kinetics and Simulation of Feature Profile Evolution in Chlorine Etching of Patterned Polysilicon)

Children

You-Sheng Lin	grad student	2003	UCLA
Lin Sha	grad student	2003	UCLA
Ragesh Puthenkovilakam	grad student	2004	UCLA
Dolores Cruz	grad student	2005	UCLA
Trinh T. Van	grad student	2006	UCLA
Carey M. Tanner	grad student	2007	UCLA
Monica S. Mathur	grad student	2008	UCLA
John Hoang	grad student	2011	UCLA
James A. Dorman	grad student	2012	UCLA
Nathan P. Marchack	grad student	2012	UCLA
Ya-Chuan Perng	grad student	2012	UCLA
Vladan Jankovic	grad student	2014	UCLA

Collaborators

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Publications

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Sheil R, Perng YC, Mars J, et al. (2020) Synthesis and Crystallization of Atomic Layer Deposition β-Eucryptite LiAlSiO Thin-Film Solid Electrolytes. Acs Applied Materials & Interfaces
Sang X, Xia Y, Sautet P, et al. (2020) Atomic layer etching of metals with anisotropy, specificity, and selectivity Journal of Vacuum Science and Technology. 38: 43005
Sang X, Chang JP. (2020) Patterning nickel for extreme ultraviolet lithography mask application. II. Hybrid reactive ion etch and atomic layer etch processing Journal of Vacuum Science and Technology. 38: 42604
Sang X, Chen E, Chang JP. (2020) Patterning nickel for extreme ultraviolet lithography mask application I. Atomic layer etch processing Journal of Vacuum Science and Technology. 38: 42603
Sheil R, Chang JP. (2020) Synthesis and integration of thin film solid state electrolytes for 3D Li-ion microbatteries Journal of Vacuum Science and Technology. 38: 32411
Sang X, Chang JP. (2020) Physical and chemical effects in directional Atomic Layer Etching Journal of Physics D. 53: 183001
Acosta A, Fitzell K, Schneider JD, et al. (2020) Underlayer effect on the soft magnetic, high frequency, and magnetostrictive properties of FeGa thin films Journal of Applied Physics. 128: 13903
Acosta A, Fitzell K, Schneider JD, et al. (2020) Enhancing the soft magnetic properties of FeGa with a non-magnetic underlayer for microwave applications Applied Physics Letters. 116: 222404
Choi JH, Pham C, Dorman J, et al. (2020) Atomic layer deposition of YMnO3 thin films Journal of Magnetism and Magnetic Materials. 498: 166146
Altieri ND, Chen JK, Chang JP. (2019) Controlling surface chemical states for selective patterning of CoFeB Journal of Vacuum Science and Technology. 37: 11303

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