Stacy K. Firth, Ph.D.

Affiliations: 
2002 University of Texas at Austin, Austin, Texas, U.S.A. 
Area:
Chemical Engineering
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"Stacy Firth"

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Thomas F Edgar grad student 2002 UT Austin
 (Just-in-time adaptive disturbance estimation for run -to -run control in semiconductor processes.)
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Publications

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Firth SK, Campbell WJ, Toprac A, et al. (2006) Just-in-time adaptive disturbance estimation for run-to-run control of semiconductor processes Ieee Transactions On Semiconductor Manufacturing. 19: 298-315
Firth SK, Campbell WJ, Edgar TF. (2002) Just-in-time adaptive disturbance estimation for run-to-run control of photolithography overlay Proceedings of Spie - the International Society For Optical Engineering. 4692: 147-154
Campbell WJ, Firth SK, Toprac AJ, et al. (2002) A comparison of run-to-run control algorithms Proceedings of the American Control Conference. 3: 2150-2155
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