Victor M. Martinez, Ph.D.

Affiliations: 
2002 University of Texas at Austin, Austin, Texas, U.S.A. 
Area:
Chemical Engineering
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"Victor Martinez"

Parents

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Thomas F Edgar grad student 2002 UT Austin
 (Adaptive run -to -run control of overlay in semiconductor manufacturing.)
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Publications

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Martinez VM, Edgar TF. (2006) Control of lithography in semiconductor manufacturing Ieee Control Systems Magazine. 26: 46-55
Martinez VM, Finn K, Edgar TF. (2003) Adaptive on-line estimation and control of overlay tool bias Proceedings of Spie - the International Society For Optical Engineering. 5044: 52-62
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