Russell A. Burdt, Ph.D.
Affiliations: | 2011 | Electrical Engineering (Applied Physics) | University of California, San Diego, La Jolla, CA |
Area:
Fluid and Plasma Physics, Electronics and Electrical Engineering, Electricity and Magnetism PhysicsGoogle:
"Russell Burdt"Parents
Sign in to add mentor| Farrokh Najmabadi | grad student | 2011 | UCSD | |
| (Ion Emission and Expansion in Laser-Produced Tin Plasma.) | ||||
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Publications
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| Kallas ND, Curry RD, Howard AB, et al. (2017) Square-Pulse Excitation Characteristics of Vitroperm Ieee Transactions On Magnetics. 53: 1-5 |
| Burdt R, Thornes J, Duffey T, et al. (2014) Flexible power 90W to 120W ArF immersion light source for future semiconductor lithography Proceedings of Spie - the International Society For Optical Engineering. 9052 |
| Tao Y, Ueno Y, Yuspeh S, et al. (2011) Investigation on the interaction of long duration Nd:YAG laser pulse with Sn plasma for an EUV metrology source Proceedings of Spie - the International Society For Optical Engineering. 7969 |
| Yuspeh S, Tao Y, Burdt RA, et al. (2011) Dynamics of laser-produced Sn microplasma for a high-brightness extreme ultraviolet light source Applied Physics Letters. 98 |
| Yuspeh S, Ueno Y, Tillack MS, et al. (2011) Cavity formation in a liquid Sn droplet driven by laser ablation pressure for an extreme ultraviolet light source target Journal of Applied Physics. 109 |
| Tao Y, Ueno Y, Yuspeh S, et al. (2010) Experimental and numerical investigations on the density profile of CO 2 laser-produced Sn plasma for an EUVL source Proceedings of Spie - the International Society For Optical Engineering. 7636 |
| Tao Y, Tillack MS, Yuspeh S, et al. (2010) Interaction of a CO2 laser pulse with tin-based plasma for an extreme ultraviolet lithography source Ieee Transactions On Plasma Science. 38: 714-718 |
| Shaikh NM, Tao Y, Burdt RA, et al. (2010) Spectroscopic studies of tin plasma using laser induced breakdown spectroscopy Journal of Physics: Conference Series. 244 |
| Burdt RA, Ueno Y, Tao Y, et al. (2010) Erratum: “Recombination effects during expansion into vacuum in laser produced Sn plasma” [Appl. Phys. Lett. 97, 041502 (2010)] Applied Physics Letters. 97: 169901 |
| Shaikh NM, Tao Y, Burdt RA, et al. (2010) Spectroscopic analysis of temperature and density of Sn plasma produced by a CO2 laser Journal of Applied Physics. 108 |