Harsh Sinha, Ph.D.
Affiliations: | 2012 | Electrical Engineering | University of Wisconsin, Madison, Madison, WI |
Area:
Electronics and Electrical Engineering, Materials Science EngineeringGoogle:
"Harsh Sinha"Parents
Sign in to add mentor| Leon Shohet | grad student | 2012 | UW Madison | |
| (Generation And Reduction Of Charge Produced By VUV Irradiation In Organosilicate Dielectrics.) | ||||
BETA: Related publications
See more...
Publications
|
You can help our author matching system! If you notice any publications incorrectly attributed to this author, please sign in and mark matches as correct or incorrect. |
| Sinha H, Shohet JL. (2012) Equivalent-circuit model for vacuum ultraviolet irradiation of dielectric films Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 30 |
| Lauer JL, Upadhyaya GS, Sinha H, et al. (2012) Plasma and vacuum ultraviolet induced charging of SiO 2 and HfO 2 patterned structures Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 30 |
| Sinha H, Lauer JL, Antonelli GA, et al. (2012) Charging response of back-end-of-the-line barrier dielectrics to VUV radiation Thin Solid Films. 520: 5300-5303 |
| Shohet JL, Sinha H, Ren H, et al. (2011) Damage to low-k porous organosilicate glass from vacuum-ultraviolet irradiation Proceedings of Spie - the International Society For Optical Engineering. 8077 |
| Sinha H, Antonelli GA, Jiang G, et al. (2011) Effects of vacuum ultraviolet radiation on deposited and ultraviolet-cured low-k porous organosilicate glass Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 29 |
| Sinha H, Nichols MT, Sehgal A, et al. (2011) Effect of vacuum ultraviolet and ultraviolet irradiation on mobile charges in the bandgap of low-k-porous organosilicate dielectrics Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 29 |
| Sinha H, Sehgal A, Ren H, et al. (2011) Effect of the dielectric-substrate interface on charge accumulation from vacuum ultraviolet irradiation of low-k porous organosilicate dielectrics Thin Solid Films. 519: 5464-5466 |
| Lauer JL, Sinha H, Nichols MT, et al. (2010) Charge trapping within UV and vacuum UV irradiated low-k porous organosilicate dielectrics Journal of the Electrochemical Society. 157: G177-G182 |
| Sinha H, Straight DB, Lauer JL, et al. (2010) Reflectance and substrate currents of dielectric layers under vacuum ultraviolet irradiation Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 28: 1316-1318 |
| Ren H, Sinha H, Sehgal A, et al. (2010) Surface potential due to charge accumulation during vacuum ultraviolet exposure for high-k and low-k dielectrics Applied Physics Letters. 97 |