Jeffery P. Langer, Ph.D.
Affiliations: | 2005 | Rensselaer Polytechnic Institute, Troy, NY, United States |
Area:
Electronics and Electrical Engineering, Materials Science EngineeringGoogle:
"Jeffery Langer"Parents
Sign in to add mentorPartha S. Dutta | grad student | 2005 | RPI | |
(Plasma etching of antimonide based III-V semiconductor materials and device structures.) |
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Publications
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Bhagwat V, Langer JP, Bhat I, et al. (2004) A comparison of dry plasma and wet chemical etching of GaSb photodiodes Journal of the Electrochemical Society. 151 |
Bhagwat V, Langer JP, Bhat I, et al. (2003) Comparison of GaSb p-n junction photodiodes fabricated using Cl |
Bhagwat V, Langer JP, Bhat IB, et al. (2003) A comparison of dry plasma and wet chemical passivation of GaSb photodiodes Ieee International Symposium On Compound Semiconductors, Proceedings. 2003: 179-180 |
Langer JP, Dutta PS. (2003) Electron cyclotron resonance plasma etching of GaSb in Cl 2/BCl3/CH4/Ar/H2 at room temperature Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21: 1511-1512 |