Lili Ji, Ph.D.
Affiliations: | 2007 | University of California, Berkeley, Berkeley, CA, United States |
Area:
Fluid and Plasma Physics, Electronics and Electrical Engineering, Materials Science EngineeringGoogle:
"Lili Ji"Parents
Sign in to add mentorKa-Ngo Leung | grad student | 2007 | UC Berkeley | |
(Plasma ion sources and ion beam technology in microfabrications.) |
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Publications
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Ji Q, Chen Y, Ji L, et al. (2008) Development of C(60) plasma ion source for time-of-flight secondary ion mass spectrometry applications. The Review of Scientific Instruments. 79: 02B309 |
Ji Q, Chen Y, Ji L, et al. (2006) Ion beam imprinting system for nanofabrication Microelectronic Engineering. 83: 796-799 |
Jiang X, Chen Y, Ji L, et al. (2005) Development of a 27.12 MHz radio frequency driven ion source with 3 mTorr operation pressure for neutron generators Review of Scientific Instruments. 76: 103302 |
Ji Q, Ji L, Chen Y, et al. (2004) Combined electron- and ion-beam imprinter and its applications Applied Physics Letters. 85: 4618-4620 |
Jiang X, Ji Q, Ji L, et al. (2003) Resolution improvement for a maskless microion beam reduction lithography system Journal of Vacuum Science & Technology B. 21: 2724-2727 |