John R. Sporre, Ph.D.
Affiliations: | 2013 | Nuclear, Plasma, & Rad Engr | University of Illinois, Urbana-Champaign, Urbana-Champaign, IL |
Area:
Nuclear EngineeringGoogle:
"John Sporre"Parents
Sign in to add mentor| David Neil Ruzic | grad student | 2013 | UIUC | |
| (Diagnosis of the flux emanating from the intermediate focus of an extreme ultraviolet light lithography source.) | ||||
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Publications
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| Sporre JR, Elg DT, Kalathiparambil KK, et al. (2016) Modeling and measuring the transport and scattering of energetic debris in an extreme ultraviolet plasma source Journal of Micro/ Nanolithography, Mems, and Moems. 15 |
| Elg DT, Sporre JR, Panici GA, et al. (2016) In situ collector cleaning and extreme ultraviolet reflectivity restoration by hydrogen plasma for extreme ultraviolet sources Journal of Vacuum Science & Technology a: Vacuum, Surfaces, and Films. 34: 021305 |
| Elg DT, Sporre JR, Curreli D, et al. (2015) Magnetic debris mitigation system for extreme ultraviolet sources Journal of Micro/ Nanolithography, Mems, and Moems. 14 |
| Meng L, Yu H, Sporre JR, et al. (2015) Direct measurement and modeling of the redirected ion flux in a high-powered pulsed-plasma magnetron Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 33 |
| Sporre JR, Elg D, Ruzic DN, et al. (2013) Collector optic in-situ Sn removal using hydrogen plasma Proceedings of Spie - the International Society For Optical Engineering. 8679 |
| Ruzic DN, Sporre J, Elg D, et al. (2013) Contamination concerns at the intermediate focus of an extreme ultraviolet light source Proceedings of Spie - the International Society For Optical Engineering. 8679 |
| Elg D, Sporre J, Curreli D, et al. (2013) Magnetic mitigation of debris for EUV sources Proceedings of Spie - the International Society For Optical Engineering. 8679 |
| Kearney P, Jindal V, Weaver A, et al. (2012) Understanding the ion beam in EUV mask blank production Proceedings of Spie - the International Society For Optical Engineering. 8322 |
| Andruczyk D, Sporre J, Elg D, et al. (2012) Energetic ion and neutral energy analyzer for extreme-ultraviolet light sources Proceedings of Spie - the International Society For Optical Engineering. 8322 |
| Sporre J, Elg D, Andruczyk D, et al. (2012) In-situ Sn contamination removal by hydrogen plasma Proceedings of Spie - the International Society For Optical Engineering. 8322 |