Srikanth Kommu, D.Sc.
Affiliations: | 2001 | Washington University, Saint Louis, St. Louis, MO |
Area:
Chemical EngineeringGoogle:
"Srikanth Kommu"Parents
Sign in to add mentorBamin Khomami | grad student | 2001 | Washington University | |
(A theoretical/experimental study of silicon epitaxy and particle dynamics in CVD reactors.) |
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Publications
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Harish Kumar B, Roy S, Pitney J, et al. (2008) Theoretical analysis of thermally induced structural deformation and relaxation of silicon wafer Ecs Transactions. 16: 261-266 |
Dhumal SY, Kommu S. (2008) A theoretical and experimental study of stresses responsible for the SOI wafer warpage Ecs Transactions. 16: 57-62 |
Kommu S, Khomami B, Biswas P. (2004) Simulation of aerosol dynamics and transport in chemically reacting particulate matter laden flows. Part II: Application to CVD reactors Chemical Engineering Science. 59: 359-371 |
Kommu S, Khomami B, Biswas P. (2004) Simulation of aerosol dynamics and transport in chemically reacting particulate matter laden flows. Part I: Algorithm development and validation Chemical Engineering Science. 59: 345-358 |
Kommu S, Khomami B. (2002) High-volume single-wafer reactors for silicon epitaxy Industrial and Engineering Chemistry Research. 41: 732-743 |
Kommu S, Wilson GM, Khomami B. (2000) Theoretical/experimental study of silicon epitaxy in horizontal single-wafer chemical vapor deposition reactors Journal of the Electrochemical Society. 147: 1538-1550 |
Kommu S, Khomami B, Kardos JL. (1998) Modeling of injected pultrusion processes: A numerical approach Polymer Composites. 19: 335-346 |