Nathan W. Cheung
Affiliations: | University of California, Berkeley, Berkeley, CA, United States |
Area:
Electronics and Electrical Engineering, Materials Science Engineering, Nuclear EngineeringGoogle:
"Nathan Cheung"Children
Sign in to add traineeChanghan Yun | grad student | 2000 | UC Berkeley |
John D. Gerling | grad student | 2012 | UC Berkeley |
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Publications
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Yun CH, Cheung NW. (2000) Fabrication of silicon and oxide membranes over cavities using ion-cut layer transfer Journal of Microelectromechanical Systems. 9: 474-477 |