Nathan W. Cheung

Affiliations: 
University of California, Berkeley, Berkeley, CA, United States 
Area:
Electronics and Electrical Engineering, Materials Science Engineering, Nuclear Engineering
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"Nathan Cheung"
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Publications

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Yun CH, Cheung NW. (2000) Fabrication of silicon and oxide membranes over cavities using ion-cut layer transfer Journal of Microelectromechanical Systems. 9: 474-477
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