Anton F. Jachim, Ph.D.
Affiliations: | 2001 | University of Wisconsin, Madison, Madison, WI |
Area:
Mechanical Engineering, Materials Science EngineeringGoogle:
"Anton Jachim"Parents
Sign in to add mentorEdward G. Lovell | grad student | 2001 | UW Madison | |
(Interpretation of stresses in thin films from wafer shape.) |
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Publications
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Schlax MP, Jachim AF, Engelstad RL, et al. (1999) Thin film stress mapping using an integrated sensor Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 17: 2714-2718 |